Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Browse by Category: Main > Engineering
Class Information
Number: 438/770
Name: Semiconductor device manufacturing: process > Coating of substrate containing semiconductor region or of semiconductor substrate > By reaction with substrate > Reaction with silicon semiconductive region (e.g., oxynitride formation, etc.) > Oxidation
Description: Processes wherein the external agent supplies oxygen which reacts with the silicon substrate region to form a compound therewith.










Sub-classes under this class:

Class Number Class Name Patents
438/774 In atmosphere containing halogen 132
438/773 In atmosphere containing water vapor (i.e., wet oxidation) 224
438/771 Using electromagnetic or wave energy 192


Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16

Patent Number Title Of Patent Date Issued
8710682 Materials and methods for stress reduction in semiconductor wafer passivation layers Apr. 29, 2014
8671878 Profile and CD uniformity control by plasma oxidation treatment Mar. 18, 2014
8662886 System for improved pressure control in horizontal diffusion furnace scavenger system for controlling oxide growth Mar. 4, 2014
8642486 Thin film forming method, thin film forming apparatus, and program Feb. 4, 2014
8614124 SONOS ONO stack scaling Dec. 24, 2013
8609554 Semiconductor structure and method for manufacturing the same Dec. 17, 2013
8598706 Method for forming interlayer dielectric film, interlayer dielectric film, semiconductor device and semiconductor manufacturing apparatus Dec. 3, 2013
8598049 Deposition method Dec. 3, 2013
8598018 Forming an electrode having reduced corrosion and water decomposition on surface using a custom oxide layer Dec. 3, 2013
8592325 Insulating layers on different semiconductor materials Nov. 26, 2013
8580698 Method for fabricating a gate dielectric layer Nov. 12, 2013
8557716 Semiconductor device manufacturing method and substrate processing apparatus Oct. 15, 2013
8547085 Plasma-facing probe arrangement including vacuum gap for use in a plasma processing chamber Oct. 1, 2013
8546920 Semiconductor-on-insulator (SOI) structures including gradient nitrided buried oxide (BOX) Oct. 1, 2013
8546272 Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus Oct. 1, 2013
8536066 Methods of forming SiC MOSFETs with high inversion layer mobility Sep. 17, 2013
8501636 Method for fabricating silicon dioxide layer Aug. 6, 2013
8492290 Fabrication of silicon oxide and oxynitride having sub-nanometer thickness Jul. 23, 2013
8492289 Barrier layer formation for metal interconnects through enhanced impurity diffusion Jul. 23, 2013
8492292 Methods of forming oxide layers on substrates Jul. 23, 2013
8470187 Method of depositing film with tailored comformality Jun. 25, 2013
8455293 Method for processing solar cell substrates Jun. 4, 2013
8445352 Manufacturing method of semiconductor device May. 21, 2013
8435906 Methods for forming conformal oxide layers on semiconductor devices May. 7, 2013
8431494 Film formation method and film formation apparatus Apr. 30, 2013
8420553 Semiconductor device and manufacturing method thereof Apr. 16, 2013
8410002 Semiconductor device and manufacturing method thereof Apr. 2, 2013
8404601 Method of manufacturing a semiconductor device Mar. 26, 2013
8395902 Modular chip stack and packaging technology with voltage segmentation, regulation, integrated decoupling capacitance and cooling structure and process Mar. 12, 2013
8389412 Finishing method for a silicon on insulator substrate Mar. 5, 2013
8372761 Plasma oxidation processing method, plasma processing apparatus and storage medium Feb. 12, 2013
8367557 Method of forming an insulation film having low impurity concentrations Feb. 5, 2013
8357619 Film formation method for forming silicon-containing insulating film Jan. 22, 2013
8349743 Method for fabricating light emitting device Jan. 8, 2013
8343879 Method for forming isolation layer of semiconductor device Jan. 1, 2013
8338312 Film formation method, film formation apparatus, and method for using film formation apparatus Dec. 25, 2012
8334215 Substrate processing method and substrate processing apparatus Dec. 18, 2012
8334222 Semiconductor wafer processing method and apparatus Dec. 18, 2012
8329598 Sacrificial nitride and gate replacement Dec. 11, 2012
8318608 Method of fabricating a nonvolatile charge trap memory device Nov. 27, 2012
8309440 Method and apparatus for cleaning a substrate surface Nov. 13, 2012
8304352 Method of manufacturing a semiconductor device Nov. 6, 2012
8298949 Profile and CD uniformity control by plasma oxidation treatment Oct. 30, 2012
8293661 Semiconductor device and manufacturing method thereof Oct. 23, 2012
8288826 Semiconductor-on-insulator (SOI) structures including gradient nitrided buried oxide (BOX) Oct. 16, 2012
8288204 Methods for fabricating components with precise dimension control Oct. 16, 2012
8283261 Radical oxidation process for fabricating a nonvolatile charge trap memory device Oct. 9, 2012
8278165 Methods for protecting film layers while removing hardmasks during fabrication of semiconductor devices Oct. 2, 2012
8278175 Compressively stressed FET device structures Oct. 2, 2012
8268731 Semiconductor device producing method, substrate producing method and substrate processing apparatus Sep. 18, 2012

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16










 
 
  Recently Added Patents
(4936
Integrated circuit with electromagnetic intrachip communication and methods for use therewith
Towel clip
Quinoid thiophene organic photoelectric material, preparation method thereof and application thereof
Vehicle control apparatus
Correction information calculating device, image processing apparatus, image display system, and image correcting method
Method for forming ventilation holes in an electrode plate
  Randomly Featured Patents
Universal pill counting device
Electronic device with openable cases
Porous material and tubular filter made of said material
Random copolymers of p-dioxanone, lactide and/or glycolide as coating polymers for surgical filaments
Purification system
Carrier wave recovery circuit
Process for monitoring the refrigerant fill-level in a refrigeration system
Artificial knee joint
Process for extracting urea from a solution with alkenylaromatic polymers with .alpha.-ketoalhydic groups
Expandable thoracic access port