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Class Information
Number: 438/765
Name: Semiconductor device manufacturing: process > Coating of substrate containing semiconductor region or of semiconductor substrate > By reaction with substrate
Description: Processes wherein a coating layer is formed by reacting an external agent with a constituent of the substrate to form the coating thereupon.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7622397 |
InN/TiO.sub.2 photosensitized electrode |
Nov. 24, 2009 |
| 7576015 |
Methods for manufacturing alignment layer, active device array substrate and color filter substrate |
Aug. 18, 2009 |
| 7572741 |
Methods of fabricating oxide layers on silicon carbide layers utilizing atomic oxygen |
Aug. 11, 2009 |
| 7566481 |
Method of making scratch resistant coated glass article including layer(s) resistant to fluoride-based etchant(s) |
Jul. 28, 2009 |
| 7560393 |
Systems and methods of forming refractory metal nitride layers using disilazanes |
Jul. 14, 2009 |
| 7560352 |
Selective deposition |
Jul. 14, 2009 |
| 7553776 |
Patterned functionalized silicon surfaces |
Jun. 30, 2009 |
| 7547643 |
Techniques promoting adhesion of porous low K film to underlying barrier layer |
Jun. 16, 2009 |
| 7541295 |
Method of manufacturing semiconductor device |
Jun. 2, 2009 |
| 7541294 |
Semiconductor package and semiconductor package mounting method |
Jun. 2, 2009 |
| 7534729 |
Modification of semiconductor surfaces in a liquid |
May. 19, 2009 |
| 7534730 |
Producing method of semiconductor device and substrate processing apparatus |
May. 19, 2009 |
| 7521376 |
Method of forming a semiconductor structure using a non-oxygen chalcogen passivation treatment |
Apr. 21, 2009 |
| 7521344 |
Method of forming semiconductor compound film for fabrication of electronic device and film produced by same using a solid solution |
Apr. 21, 2009 |
| 7517812 |
Method and system for forming a nitrided germanium-containing layer using plasma processing |
Apr. 14, 2009 |
| 7446052 |
Method for forming insulation film |
Nov. 4, 2008 |
| 7420202 |
Electronic device including a transistor structure having an active region adjacent to a stressor layer and a process for forming the electronic device |
Sep. 2, 2008 |
| 7413914 |
Method and apparatus for manufacturing semiconductor device, method and apparatus for controlling the same, and method and apparatus for simulating manufacturing process of semiconductor devic |
Aug. 19, 2008 |
| 7378319 |
Method of forming double gate dielectric layers and semiconductor device having the same |
May. 27, 2008 |
| 7378358 |
Method for forming insulating film on substrate, method for manufacturing semiconductor device and substrate-processing apparatus |
May. 27, 2008 |
| 7365028 |
Methods of forming metal oxide and semimetal oxide |
Apr. 29, 2008 |
| 7358162 |
Method of manufacturing semiconductor device |
Apr. 15, 2008 |
| 7312163 |
Atomic layer deposition methods, and methods of forming materials over semiconductor substrates |
Dec. 25, 2007 |
| 7309660 |
Buffer layer for selective SiGe growth for uniform nucleation |
Dec. 18, 2007 |
| 7304002 |
Method of oxidizing member to be treated |
Dec. 4, 2007 |
| 7288490 |
Increased alignment in carbon nanotube growth |
Oct. 30, 2007 |
| 7268090 |
Method of manufacturing flash memory device |
Sep. 11, 2007 |
| 7256259 |
Methods for ligation of molecules to surfaces |
Aug. 14, 2007 |
| 7250375 |
Substrate processing method and material for electronic device |
Jul. 31, 2007 |
| 7238612 |
Methods of forming a double metal salicide layer and methods of fabricating semiconductor devices incorporating the same |
Jul. 3, 2007 |
| 7238629 |
Deposition method, method of manufacturing semiconductor device, and semiconductor device |
Jul. 3, 2007 |
| 7232772 |
Substrate processing method |
Jun. 19, 2007 |
| 7199063 |
Process for passivating polysilicon and process for fabricating polysilicon thin film transistor |
Apr. 3, 2007 |
| 7176146 |
Method of making a molecule-surface interface |
Feb. 13, 2007 |
| 7172967 |
Methods for forming cobalt layers including introducing vaporized cobalt precursors and methods for manufacturing semiconductor devices using the same |
Feb. 6, 2007 |
| 7169713 |
Atomic layer deposition (ALD) method with enhanced deposition rate |
Jan. 30, 2007 |
| 7160802 |
Adhesion of tungsten nitride films to a silicon surface |
Jan. 9, 2007 |
| 7144746 |
Method for monitoring implantation depth of impurity |
Dec. 5, 2006 |
| 7125811 |
Oxidation method for semiconductor process |
Oct. 24, 2006 |
| 7122464 |
Systems and methods of forming refractory metal nitride layers using disilazanes |
Oct. 17, 2006 |
| 7122484 |
Process for removing organic materials during formation of a metal interconnect |
Oct. 17, 2006 |
| 7105459 |
Method for forming thin film |
Sep. 12, 2006 |
| 7091136 |
Method of forming semiconductor compound film for fabrication of electronic device and film produced by same |
Aug. 15, 2006 |
| 7091135 |
Method of manufacturing semiconductor device |
Aug. 15, 2006 |
| 7084075 |
Method for producing a layer on a substrate |
Aug. 1, 2006 |
| 7071127 |
Methods for improving quality of semiconductor oxide composition formed from halogen-containing precursor |
Jul. 4, 2006 |
| 7067410 |
Method of forming a metal silicide |
Jun. 27, 2006 |
| 7067328 |
Methods, devices and compositions for depositing and orienting nanostructures |
Jun. 27, 2006 |
| 7053007 |
Method for fabricating semiconductor integrated circuit device |
May. 30, 2006 |
| 7033956 |
Semiconductor memory devices and methods for making the same |
Apr. 25, 2006 |
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