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Class Information
Number: 438/763
Name: Semiconductor device manufacturing: process > Coating of substrate containing semiconductor region or of semiconductor substrate > Multiple layers > Layers formed of diverse composition or by diverse coating processes
Description: Processes wherein the plural layers are formed utilizing different processes (e.g., thermal insulator with deposited insulator, etc.) or are of differing composition or physical characteristics (e.g., crystallinity, orientation, etc.).

Patents under this class:

Patent Number Title Of Patent Date Issued
8710618 Fibrous laminate interface for security coatings Apr. 29, 2014
8710579 SONOS stack with split nitride memory layer Apr. 29, 2014
8710578 SONOS stack with split nitride memory layer Apr. 29, 2014
8703623 Fabrication technique for gallium nitride substrates Apr. 22, 2014
8691706 Reducing substrate warpage in semiconductor processing Apr. 8, 2014
8685778 Planar cavity MEMS and related structures, methods of manufacture and design structures Apr. 1, 2014
8673791 Method and apparatus for substrate-mask alignment Mar. 18, 2014
8658501 Method and apparatus for flatband voltage tuning of high-k field effect transistors Feb. 25, 2014
8658490 Passivating point defects in high-K gate dielectric layers during gate stack formation Feb. 25, 2014
8652973 Processing method for forming structure including amorphous carbon film Feb. 18, 2014
8647992 Flowable dielectric using oxide liner Feb. 11, 2014
8643151 Passivation layer for semiconductor devices Feb. 4, 2014
8643079 Nanocrystal formation using atomic layer deposition and resulting apparatus Feb. 4, 2014
8637411 Plasma activated conformal dielectric film deposition Jan. 28, 2014
8633573 Strained semiconductor materials, devices and methods therefore Jan. 21, 2014
8633118 Method of forming thin metal and semi-metal layers by thermal remote oxygen scavenging Jan. 21, 2014
8629055 Manufacturing method of semiconductor device Jan. 14, 2014
8623750 Heat treatment method for promoting crystallization of high dielectric constant film Jan. 7, 2014
8618003 Method of making electronic devices using selective deposition Dec. 31, 2013
8618002 Resist pattern formating method Dec. 31, 2013
8617989 Liner property improvement Dec. 31, 2013
8603924 Methods of forming gate dielectric material Dec. 10, 2013
8603919 Method for fabricating semiconductor device Dec. 10, 2013
8603877 Methods of forming dielectric material-containing structures Dec. 10, 2013
8598044 Method of fabricating a semiconductor device Dec. 3, 2013
8592324 Method for forming laminated structure including amorphous carbon film Nov. 26, 2013
8580584 System and method for increasing productivity of organic light emitting diode material screening Nov. 12, 2013
8575039 Surface treating method and film depositing method Nov. 5, 2013
8575021 Substrate processing including a masking layer Nov. 5, 2013
8569753 Storage device comprising semiconductor elements Oct. 29, 2013
8564025 Nanowire FET having induced radial strain Oct. 22, 2013
8558385 Interconnection architecture for semiconductor device Oct. 15, 2013
8551891 Remote plasma burn-in Oct. 8, 2013
8536017 Method of manufacturing semiconductor device Sep. 17, 2013
8535998 Method for fabricating a gate structure Sep. 17, 2013
8519470 Semiconductor chip, and semiconductor package and system each including the semiconductor chip Aug. 27, 2013
8507389 Methods for forming dielectric layers Aug. 13, 2013
8507388 Prevention of oxidation of substrate surfaces in process chambers Aug. 13, 2013
8501634 Method for fabricating gate structure Aug. 6, 2013
8501609 Method for generating a three-dimensional NAND memory with mono-crystalline channels using sacrificial material Aug. 6, 2013
8497218 Silicon carbide semiconductor device and method for producing the same Jul. 30, 2013
8481430 Method of manufacturing semiconductor device Jul. 9, 2013
8471267 Semiconductor device and method for producing same Jun. 25, 2013
8470719 Method for fabricating phase change memory device using solid state reaction Jun. 25, 2013
8470718 Vapor deposition reactor for forming thin film Jun. 25, 2013
8455369 Trench embedding method Jun. 4, 2013
8455293 Method for processing solar cell substrates Jun. 4, 2013
8450218 Methods of forming silicon oxides and methods of forming interlevel dielectrics May. 28, 2013
8435905 Manufacturing method of semiconductor device, and substrate processing apparatus May. 7, 2013
8435858 Semiconductor device manufacturing method May. 7, 2013

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