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Class Information
Number: 438/763
Name: Semiconductor device manufacturing: process > Coating of substrate containing semiconductor region or of semiconductor substrate > Multiple layers > Layers formed of diverse composition or by diverse coating processes
Description: Processes wherein the plural layers are formed utilizing different processes (e.g., thermal insulator with deposited insulator, etc.) or are of differing composition or physical characteristics (e.g., crystallinity, orientation, etc.).
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7615421 |
Method for fabricating thin film transistor |
Nov. 10, 2009 |
| 7611928 |
Method for producing a substrate |
Nov. 3, 2009 |
| 7611972 |
Semiconductor devices and methods of manufacture thereof |
Nov. 3, 2009 |
| 7611974 |
Multilayer structure and fabrication thereof |
Nov. 3, 2009 |
| 7601648 |
Method for fabricating an integrated gate dielectric layer for field effect transistors |
Oct. 13, 2009 |
| 7592269 |
Method and apparatus for depositing charge and/or nanoparticles |
Sep. 22, 2009 |
| 7592268 |
Method for fabricating semiconductor device |
Sep. 22, 2009 |
| 7589029 |
Atomic layer deposition and conversion |
Sep. 15, 2009 |
| 7585769 |
Parasitic particle suppression in growth of III-V nitride films using MOCVD and HVPE |
Sep. 8, 2009 |
| 7585783 |
Drop discharge apparatus, method for forming pattern and method for manufacturing semiconductor device |
Sep. 8, 2009 |
| 7585786 |
Methods of forming spin-on-glass insulating layers in semiconductor devices and associated semiconductor device |
Sep. 8, 2009 |
| 7582555 |
CVD flowable gap fill |
Sep. 1, 2009 |
| 7579590 |
Method of measuring thin layers using SIMS |
Aug. 25, 2009 |
| 7576015 |
Methods for manufacturing alignment layer, active device array substrate and color filter substrate |
Aug. 18, 2009 |
| 7569403 |
Pattern evaluation method, manufacturing method of semiconductor device, correction method of mask pattern and manufacturing method of exposure mask |
Aug. 4, 2009 |
| 7569495 |
Semiconductor devices and methods of manufacturing the same |
Aug. 4, 2009 |
| 7566660 |
Semiconductor device and method for manufacturing the same |
Jul. 28, 2009 |
| 7563728 |
Methods of modifying interlayer adhesion |
Jul. 21, 2009 |
| 7560297 |
Active matrix substrate, manufacturing method thereof, electro-optical device, and electronic apparatus |
Jul. 14, 2009 |
| 7560329 |
Semiconductor device and method for fabricating the same |
Jul. 14, 2009 |
| 7560377 |
Plasma processes for depositing low dielectric constant films |
Jul. 14, 2009 |
| 7557047 |
Method of forming a layer of material using an atomic layer deposition process |
Jul. 7, 2009 |
| 7553775 |
Method for coating semiconductor surface, process for production of semiconductor particles using said method, and optical element using said semiconductor particles |
Jun. 30, 2009 |
| 7550397 |
Method of manufacturing a semiconductor device having a pre-metal dielectric liner |
Jun. 23, 2009 |
| 7547952 |
Method for hafnium nitride deposition |
Jun. 16, 2009 |
| 7544535 |
Method for manufacturing semiconductor laser element |
Jun. 9, 2009 |
| 7538045 |
Coating process to enable electrophoretic deposition |
May. 26, 2009 |
| 7538007 |
Semiconductor device with flowable insulation layer formed on capacitor and method for fabricating the same |
May. 26, 2009 |
| 7538000 |
Method of forming double gate transistors having varying gate dielectric thicknesses |
May. 26, 2009 |
| 7534731 |
Method for growing a thin oxynitride film on a substrate |
May. 19, 2009 |
| 7531467 |
Manufacturing method of semiconductor device and substrate processing apparatus |
May. 12, 2009 |
| 7524777 |
Method for manufacturing an isolation structure using an energy beam treatment |
Apr. 28, 2009 |
| 7521312 |
Method and system for creating self-aligned twin wells with co-planar surfaces in a semiconductor device |
Apr. 21, 2009 |
| 7521380 |
Methods for fabricating a stress enhanced semiconductor device having narrow pitch and wide pitch transistors |
Apr. 21, 2009 |
| 7514372 |
Epitaxial growth of relaxed silicon germanium layers |
Apr. 7, 2009 |
| 7507644 |
Method of forming dielectric layer of flash memory device |
Mar. 24, 2009 |
| 7501351 |
Relaxed SiGe platform for high speed CMOS electronics and high speed analog circuits |
Mar. 10, 2009 |
| 7498232 |
Semiconductor devices and methods of manufacture thereof |
Mar. 3, 2009 |
| 7498208 |
Chevron CMOS trigate structure |
Mar. 3, 2009 |
| 7494894 |
Protection in integrated circuits |
Feb. 24, 2009 |
| 7491651 |
Method of forming thick silica-based film |
Feb. 17, 2009 |
| 7488514 |
Methods of forming barium strontium titanate layers |
Feb. 10, 2009 |
| 7482215 |
Self-aligned dual segment liner and method of manufacturing the same |
Jan. 27, 2009 |
| 7479430 |
Non-volatile semiconductor memory device |
Jan. 20, 2009 |
| 7476626 |
Etch stop layer for a metallization layer with enhanced etch selectivity and hermeticity |
Jan. 13, 2009 |
| 7470584 |
TEOS deposition method |
Dec. 30, 2008 |
| 7470611 |
In situ deposition of a low K dielectric layer, barrier layer, etch stop, and anti-reflective coating for damascene application |
Dec. 30, 2008 |
| 7459372 |
Methods of manufacturing a thin film including hafnium titanium oxide and methods of manufacturing a semiconductor device including the same |
Dec. 2, 2008 |
| 7459405 |
Method using TEOS ramp-up during TEOS/ozone CVD for improved gap-fill |
Dec. 2, 2008 |
| 7459325 |
MEMS passivation with transition metals |
Dec. 2, 2008 |
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