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Class Information
Number: 438/762
Name: Semiconductor device manufacturing: process > Coating of substrate containing semiconductor region or of semiconductor substrate > Multiple layers > At least one layer formed by reaction with substrate
Description: Processes wherein at least one of the layers is formed by reacting an external agent with a constituent of the substrate to form a compound thereof.

Patents under this class:
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Patent Number Title Of Patent Date Issued
8637955 Semiconductor structure with reduced junction leakage and method of fabrication thereof Jan. 28, 2014
8618003 Method of making electronic devices using selective deposition Dec. 31, 2013
8598706 Method for forming interlayer dielectric film, interlayer dielectric film, semiconductor device and semiconductor manufacturing apparatus Dec. 3, 2013
8563353 Method of making a multicomponent film Oct. 22, 2013
8536017 Method of manufacturing semiconductor device Sep. 17, 2013
8536066 Methods of forming SiC MOSFETs with high inversion layer mobility Sep. 17, 2013
8524612 Plasma-activated deposition of conformal films Sep. 3, 2013
8525275 Methods of forming non-volatile memory devices Sep. 3, 2013
8518825 Method to manufacture trench-first copper interconnection Aug. 27, 2013
8501636 Method for fabricating silicon dioxide layer Aug. 6, 2013
8492289 Barrier layer formation for metal interconnects through enhanced impurity diffusion Jul. 23, 2013
8455369 Trench embedding method Jun. 4, 2013
8426320 Method of formation of coherent wavy nanostructures (variants) Apr. 23, 2013
8334015 Vapor based combinatorial processing Dec. 18, 2012
8329531 Strain memorization in strained SOI substrates of semiconductor devices Dec. 11, 2012
8330275 Interconnect structure for semiconductor devices Dec. 11, 2012
8318520 Method of microminiaturizing a nano-structure Nov. 27, 2012
8318612 Methods for improving the quality of group III-nitride materials and structures produced by the methods Nov. 27, 2012
8227355 Method and apparatus of fabricating semiconductor device Jul. 24, 2012
8207023 Methods of selectively depositing an epitaxial layer Jun. 26, 2012
8206788 Method for treating a damaged porous dielectric Jun. 26, 2012
8193027 Method of making a multicomponent film Jun. 5, 2012
8168546 Method for selective deposition and devices May. 1, 2012
8148242 Oxidation after oxide dissolution Apr. 3, 2012
8084345 Methods of forming dispersions of nanoparticles, and methods of forming flash memory cells Dec. 27, 2011
8084368 Method of forming barrier film Dec. 27, 2011
8062552 Electrocatalyst for oxygen reduction with reduced platinum oxidation and dissolution rates Nov. 22, 2011
8053356 Interconnect structure for semiconductor devices Nov. 8, 2011
8053372 Method of reducing plasma stabilization time in a cyclic deposition process Nov. 8, 2011
8048713 Process for manufacturing a CBRAM memory having enhanced reliability Nov. 1, 2011
8039382 Method for forming self-aligned metal silicide contacts Oct. 18, 2011
8034179 Method for insulating film formation, storage medium from which information is readable with computer, and processing system Oct. 11, 2011
8008204 Method of manufacturing semiconductor device Aug. 30, 2011
7998878 Method for selective deposition and devices Aug. 16, 2011
7977252 Method of formation of coherent wavy nanostructures (variants) Jul. 12, 2011
7939442 Strontium ruthenium oxide interface May. 10, 2011
7928017 Method of forming nanowire and method of manufacturing semiconductor device comprising the nanowire Apr. 19, 2011
7875559 Method of manufacturing P-type ZnO semiconductor layer using atomic layer deposition and thin film transistor including the P-type ZnO semiconductor layer Jan. 25, 2011
7867914 System and method for forming an integrated barrier layer Jan. 11, 2011
7855153 Method for manufacturing semiconductor device Dec. 21, 2010
7838431 Method for surface treatment of semiconductor substrates Nov. 23, 2010
7816278 In-situ hybrid deposition of high dielectric constant films using atomic layer deposition and chemical vapor deposition Oct. 19, 2010
7807535 Methods of forming layers comprising epitaxial silicon Oct. 5, 2010
7785919 Image sensor and method for manufacturing the same Aug. 31, 2010
7741183 Method of forming a gate dielectric Jun. 22, 2010
7737047 Semiconductor constructions, and methods of forming dielectric materials Jun. 15, 2010
7718231 Thin buried oxides by low-dose oxygen implantation into modified silicon May. 18, 2010
7709399 Atomic layer deposition systems and methods including metal .beta.-diketiminate compounds May. 4, 2010
7670963 Single-wafer process for fabricating a nonvolatile charge trap memory device Mar. 2, 2010
7655556 Interconnect structures for semiconductor devices Feb. 2, 2010

1 2 3 4 5 6 7

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