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Class Information
Number: 438/761
Name: Semiconductor device manufacturing: process > Coating of substrate containing semiconductor region or of semiconductor substrate > Multiple layers
Description: Processes wherein plural layers are formed upon the semiconductor substrate.

Sub-classes under this class:

Class Number Class Name Patents
438/762 At least one layer formed by reaction with substrate 346
438/763 Layers formed of diverse composition or by diverse coating processes 1,162

Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16

Patent Number Title Of Patent Date Issued
8709887 Method for fabricating a nitrided silicon-oxide gate dielectric Apr. 29, 2014
8703622 Flat panel display device and method of manufacturing the same Apr. 22, 2014
8691669 Vapor deposition reactor for forming thin film Apr. 8, 2014
8691706 Reducing substrate warpage in semiconductor processing Apr. 8, 2014
8691708 Method of manufacturing semiconductor device and substrate processing apparatus Apr. 8, 2014
8673757 Structure and method for using high-k material as an etch stop layer in dual stress layer process Mar. 18, 2014
8664116 Heat treatment method for growing silicide Mar. 4, 2014
8652920 Substrate with embedded patterned capacitance Feb. 18, 2014
8648444 Wafer scribe line structure for improving IC reliability Feb. 11, 2014
8633536 Gate dielectric of semiconductor device Jan. 21, 2014
8629048 Methods of forming a pattern on a substrate Jan. 14, 2014
8629055 Manufacturing method of semiconductor device Jan. 14, 2014
8609491 Method for fabricating semiconductor device with buried bit lines Dec. 17, 2013
8609519 Combinatorial approach for screening of ALD film stacks Dec. 17, 2013
8609551 Method for manufacturing semiconductor device and substrate processing apparatus Dec. 17, 2013
8599616 Three-dimensional NAND memory with stacked mono-crystalline channels Dec. 3, 2013
8580697 CVD flowable gap fill Nov. 12, 2013
8575038 Method for reducing thickness of interfacial layer, method for forming high dielectric constant gate insulating film, high dielectric constant gate insulating film, high dielectric constant ga Nov. 5, 2013
8575037 Method for fabricating a cavity structure, for fabricating a cavity structure for a semiconductor structure and a semiconductor microphone fabricated by the same Nov. 5, 2013
8575027 Sputtering and aligning multiple layers having different boundaries Nov. 5, 2013
8575021 Substrate processing including a masking layer Nov. 5, 2013
8569166 Methods of modifying interlayer adhesion Oct. 29, 2013
8557712 PECVD flowable dielectric gap fill Oct. 15, 2013
8557713 Semiconductor devices and method of forming the same Oct. 15, 2013
8557714 Adhesiveness of fluorocarbon (CFX) film by doping of amorphous carbon Oct. 15, 2013
8551891 Remote plasma burn-in Oct. 8, 2013
8552565 Chip package and method for forming the same Oct. 8, 2013
8546218 Method for fabricating semiconductor device with buried word line Oct. 1, 2013
8541316 Method of manufacturing semiconductor device including sequentially forming first and second mask material layers and forming a dotted photoresist pattern on the second mask material layer Sep. 24, 2013
8536065 Ultra high selectivity doped amorphous carbon strippable hardmask development and integration Sep. 17, 2013
8531759 Dielectric microstructure for use in microelectromechanical systems and method of forming same Sep. 10, 2013
8524614 III-V compound semiconductor material passivation with crystalline interlayer Sep. 3, 2013
8525275 Methods of forming non-volatile memory devices Sep. 3, 2013
8518834 Method and apparatus for forming oxide film on carbon film Aug. 27, 2013
8513143 Semiconductor structure and method of manufacturing Aug. 20, 2013
8513132 Method for fabricating metal pattern in semiconductor device Aug. 20, 2013
8513043 Method for MEMS device fabrication and device formed Aug. 20, 2013
8501609 Method for generating a three-dimensional NAND memory with mono-crystalline channels using sacrificial material Aug. 6, 2013
8501633 Forming substrate structure by filling recesses with deposition material Aug. 6, 2013
8497208 Semiconductor device and method for manufacturing the same Jul. 30, 2013
8492203 Semiconductor device and method for forming semiconductor package having build-up interconnect structure over semiconductor die with different CTE insulating layers Jul. 23, 2013
8486844 Method and system for isolated and discretized process sequence integration Jul. 16, 2013
8487413 Passivation film for electronic device and method of manufacturing the same Jul. 16, 2013
8481431 Method for opening one-side contact region of vertical transistor and method for fabricating one-side junction region using the same Jul. 9, 2013
8470680 Substrate with embedded patterned capacitance Jun. 25, 2013
RE44303 Passivation layer for a circuit device and method of manufacture Jun. 18, 2013
8455369 Trench embedding method Jun. 4, 2013
8450140 Method for large-scale manufacturing of photovoltaic cells for a converter panel and photovoltaic converter panel May. 28, 2013
8446021 Microfluidic component and method for manufacturing same May. 21, 2013
8435882 Film forming method for a semiconductor May. 7, 2013

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16

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