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Class Information
Number: 438/761
Name: Semiconductor device manufacturing: process > Coating of substrate containing semiconductor region or of semiconductor substrate > Multiple layers
Description: Processes wherein plural layers are formed upon the semiconductor substrate.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7622336 |
Manufacturing method of semiconductor device |
Nov. 24, 2009 |
| 7622400 |
Method for improving mechanical properties of low dielectric constant materials |
Nov. 24, 2009 |
| 7622402 |
Method for forming underlying insulation film |
Nov. 24, 2009 |
| 7623935 |
Method for electrochemically fabricating three-dimensional structures including pseudo-rasterization of data |
Nov. 24, 2009 |
| 7618900 |
Semiconductor device and method of fabricating semiconductor device |
Nov. 17, 2009 |
| 7618890 |
Methods for forming conductive structures and structures regarding same |
Nov. 17, 2009 |
| 7615491 |
Defectivity and process control of electroless deposition in microelectronics applications |
Nov. 10, 2009 |
| 7615497 |
Forming fine pattern of semiconductor device using three mask layers and CMP of spin-on carbon layer |
Nov. 10, 2009 |
| 7611988 |
Defectivity and process control of electroless deposition in microelectronics applications |
Nov. 3, 2009 |
| 7611987 |
Defectivity and process control of electroless deposition in microelectronics applications |
Nov. 3, 2009 |
| 7611928 |
Method for producing a substrate |
Nov. 3, 2009 |
| 7601624 |
Device comprising an ohmic via contact, and method of fabricating thereof |
Oct. 13, 2009 |
| 7601608 |
Memory array buried digit line |
Oct. 13, 2009 |
| 7601577 |
Work function control of metals |
Oct. 13, 2009 |
| 7601483 |
Anti-reflective coatings using vinyl ether crosslinkers |
Oct. 13, 2009 |
| 7598183 |
Bi-layer capping of low-K dielectric films |
Oct. 6, 2009 |
| 7591863 |
Laminating system, IC sheet, roll of IC sheet, and method for manufacturing IC chip |
Sep. 22, 2009 |
| 7585783 |
Drop discharge apparatus, method for forming pattern and method for manufacturing semiconductor device |
Sep. 8, 2009 |
| 7582545 |
Forming method for film pattern, device, electro-optical apparatus, electronic apparatus, and manufacturing method for active matrix substrate |
Sep. 1, 2009 |
| 7576013 |
Method of relieving wafer stress |
Aug. 18, 2009 |
| 7572648 |
Method of manufacturing optical sensor |
Aug. 11, 2009 |
| 7569477 |
Method for fabricating fine pattern in semiconductor device |
Aug. 4, 2009 |
| 7566660 |
Semiconductor device and method for manufacturing the same |
Jul. 28, 2009 |
| 7566667 |
Methods of fabricating a semiconductor device having a barrier metal layer and devices formed thereby |
Jul. 28, 2009 |
| 7566919 |
Method to reduce seedlayer topography in BICMOS process |
Jul. 28, 2009 |
| 7563728 |
Methods of modifying interlayer adhesion |
Jul. 21, 2009 |
| 7560793 |
Atomic layer deposition and conversion |
Jul. 14, 2009 |
| 7560301 |
Coating liquid for forming organic layered film, method of manufacturing field effect transistor, and field effect transistor |
Jul. 14, 2009 |
| 7556989 |
Semiconductor device having fuse pattern and methods of fabricating the same |
Jul. 7, 2009 |
| 7556048 |
In-situ removal of surface impurities prior to arsenic-doped polysilicon deposition in the fabrication of a heterojunction bipolar transistor |
Jul. 7, 2009 |
| 7557047 |
Method of forming a layer of material using an atomic layer deposition process |
Jul. 7, 2009 |
| 7547643 |
Techniques promoting adhesion of porous low K film to underlying barrier layer |
Jun. 16, 2009 |
| 7543374 |
Method of manufacturing wiring substrate |
Jun. 9, 2009 |
| 7544535 |
Method for manufacturing semiconductor laser element |
Jun. 9, 2009 |
| 7544614 |
Method of forming a coated film, method of forming an electronic device, and method of manufacturing an electron emission element |
Jun. 9, 2009 |
| 7541263 |
Method for providing mixed stacked structures, with various insulating zones and/or electrically conducting zones vertically localized |
Jun. 2, 2009 |
| 7538036 |
Methods of forming openings, and methods of forming container capacitors |
May. 26, 2009 |
| 7531439 |
Method for forming an integrated semiconductor circuit arrangement |
May. 12, 2009 |
| 7521331 |
High dielectric film and related method of manufacture |
Apr. 21, 2009 |
| 7517816 |
Technique for creating different mechanical stress in different channel regions by forming an etch stop layer having differently modified intrinsic stress |
Apr. 14, 2009 |
| 7514372 |
Epitaxial growth of relaxed silicon germanium layers |
Apr. 7, 2009 |
| 7510931 |
Method of fabricating a nonvolatile memory device |
Mar. 31, 2009 |
| 7507613 |
Ambipolar organic thin-film field-effect transistor and making method |
Mar. 24, 2009 |
| 7494894 |
Protection in integrated circuits |
Feb. 24, 2009 |
| 7488667 |
Method for manufacturing nitride-base semiconductor element and nitride-base semiconductor element |
Feb. 10, 2009 |
| 7485560 |
Method for fabricating crystalline silicon thin films |
Feb. 3, 2009 |
| 7485583 |
Method for fabricating superlattice semiconductor structure using chemical vapor deposition |
Feb. 3, 2009 |
| 7482285 |
Dual epitaxial layer for high voltage vertical conduction power MOSFET devices |
Jan. 27, 2009 |
| 7479366 |
Method for forming pattern |
Jan. 20, 2009 |
| 7470555 |
Semiconductor laser device, and method of manufacturing the same |
Dec. 30, 2008 |
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