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Class Information
Number: 438/760
Name: Semiconductor device manufacturing: process > Coating of substrate containing semiconductor region or of semiconductor substrate > Utilizing reflow (e.g., planarization, etc.)
Description: Processes wherein the coating step is combined with a step of decreasing the viscosity of the layer and causing a redistribution of the same by the viscous flow thereof.

Patents under this class:
1 2 3 4 5 6

Patent Number Title Of Patent Date Issued
8673791 Method and apparatus for substrate-mask alignment Mar. 18, 2014
RE44761 Solder joint flip chip interconnection having relief structure Feb. 11, 2014
8569183 Low temperature dielectric flow using microwaves Oct. 29, 2013
8470188 Nano-imprint lithography templates Jun. 25, 2013
8435873 Unguarded Schottky barrier diodes with dielectric underetch at silicide interface May. 7, 2013
8426320 Method of formation of coherent wavy nanostructures (variants) Apr. 23, 2013
8404538 Device with self aligned stressor and method of making same Mar. 26, 2013
8273660 Method of manufacturing a dual face package Sep. 25, 2012
8216930 Solder joint flip chip interconnection having relief structure Jul. 10, 2012
8188577 Production method of semiconductor device, semiconductor device, and exposure apparatus May. 29, 2012
8178156 Surface treatment process for circuit board May. 15, 2012
8163657 Process for adjusting the size and shape of nanostructures Apr. 24, 2012
8163656 Process for adjusting the size and shape of nanostructures Apr. 24, 2012
8124318 Over-coating agent for forming fine patterns and a method of forming fine patterns using such agent Feb. 28, 2012
8043798 Method of forming fine patterns Oct. 25, 2011
8034648 Epitaxial regrowth in a distributed feedback laser Oct. 11, 2011
8008148 Method of manufacturing M-I-M capacitor of semiconductor device Aug. 30, 2011
7998868 Self-aligned masks using multi-temperature phase-change materials Aug. 16, 2011
7977226 Flash memory device and method of fabricating the same Jul. 12, 2011
7977252 Method of formation of coherent wavy nanostructures (variants) Jul. 12, 2011
7901743 Plasma-assisted vapor phase treatment of low dielectric constant films using a batch processing system Mar. 8, 2011
7858525 Fluorine-free precursors and methods for the deposition of conformal conductive films for nanointerconnect seed and fill Dec. 28, 2010
7858499 Dicing tape and die attach adhesive with patterned backing Dec. 28, 2010
7838326 Methods of fabricating semiconductor device including phase change layer Nov. 23, 2010
7803693 Bowed wafer hybridization compensation Sep. 28, 2010
7785922 Methods for oriented growth of nanowires on patterned substrates Aug. 31, 2010
7727895 Substrate processing system and substrate processing method Jun. 1, 2010
7700498 Self-repair and enhancement of nanostructures by liquification under guiding conditions Apr. 20, 2010
7696096 Self-aligned masks using multi-temperature phase-change materials Apr. 13, 2010
7645696 Deposition of thin continuous PVD seed layers having improved adhesion to the barrier layer Jan. 12, 2010
7632690 Real-time gate etch critical dimension control by oxygen monitoring Dec. 15, 2009
7618899 Method of patterning a matrix into a substrate via multiple, line-and-space, sacrificial, hard mask layers Nov. 17, 2009
7585765 Formation of oxidation-resistant seed layer for interconnect applications Sep. 8, 2009
7585784 System and method for reducing etch sequencing induced downstream dielectric defects in high volume semiconducting manufacturing Sep. 8, 2009
7582565 Method and apparatus for semiconductor wafer planarization Sep. 1, 2009
7576015 Methods for manufacturing alignment layer, active device array substrate and color filter substrate Aug. 18, 2009
7553610 Method of forming fine patterns Jun. 30, 2009
7527188 Self-encapsulated silver alloys for interconnects May. 5, 2009
7482215 Self-aligned dual segment liner and method of manufacturing the same Jan. 27, 2009
7455955 Planarization method for multi-layer lithography processing Nov. 25, 2008
7446054 Method for manufacturing semiconductor device Nov. 4, 2008
7416985 Semiconductor device having a multilayer interconnection structure and fabrication method thereof Aug. 26, 2008
7384862 Method for fabricating semiconductor device and display device Jun. 10, 2008
7368393 Chemical oxide removal of plasma damaged SiCOH low k dielectrics May. 6, 2008
7338911 Method for etching and for forming a contact hole using thereof Mar. 4, 2008
7297640 Method for reducing argon diffusion from high density plasma films Nov. 20, 2007
7282456 Self-repair and enhancement of nanostructures by liquification under guiding conditions Oct. 16, 2007
7270886 Spin-on glass composition and method of forming silicon oxide layer in semiconductor manufacturing process using the same Sep. 18, 2007
7235345 Agent for forming coating for narrowing patterns and method for forming fine pattern using the same Jun. 26, 2007
7229914 Wiring layer structure for ferroelectric capacitor Jun. 12, 2007

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