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Class Information
Number: 438/759
Name: Semiconductor device manufacturing: process > Coating of substrate containing semiconductor region or of semiconductor substrate > Combined with the removal of material by nonchemical means
Description: Processes having an additional step of removing material from the semiconductor substrate by nonchemical means (e.g., ablating, abrading, grinding, etc.)

Patents under this class:
1 2 3 4 5 6

Patent Number Title Of Patent Date Issued
8673780 Methods of processing semiconductor substrates in forming scribe line alignment marks Mar. 18, 2014
8642488 Multi-step system and method for curing a dielectric film Feb. 4, 2014
8597401 Exhausting method and gas processing apparatus Dec. 3, 2013
8598046 Autosynthesizer for the controlled synthesis of nano- and sub-nanostructures Dec. 3, 2013
8592323 Method of large-area circuit layout recognition Nov. 26, 2013
8575036 Formation of a masking layer on a dielectric region to facilitate formation of a capping layer on electrically conductive regions separated by the dielectric region Nov. 5, 2013
8563438 Method for manufacturing semiconductor device Oct. 22, 2013
8546210 Semiconductor device and method for manufacturing the same Oct. 1, 2013
8535571 Water-soluble electrically conductive polymers Sep. 17, 2013
8501607 FinFET alignment structures using a double trench flow Aug. 6, 2013
8486222 Substrate processing apparatus and method of manufacturing a semiconductor device Jul. 16, 2013
8486738 Light emitting device having auto-cloning photonic crystal structures and manufacturing method thereof Jul. 16, 2013
8486805 Through-silicon via and method for forming the same Jul. 16, 2013
8481342 Method of manufacturing semiconductor device, semiconductor device and semiconductor composite device Jul. 9, 2013
8455368 Methods and apparatus for assembling and operating electronic device manufacturing systems Jun. 4, 2013
8435811 Method for manufacturing evaporation donor substrate and light-emitting device May. 7, 2013
8399356 Manufacturing method of semiconductor device Mar. 19, 2013
8394282 Adaptive nanotopography sculpting Mar. 12, 2013
8372481 Methods of forming material on a substrate, and a method of forming a field effect transistor gate oxide on a substrate Feb. 12, 2013
8323402 Method for growing aluminum nitride crystal, process for producing aluminum nitride crystal, and aluminum nitride crystal Dec. 4, 2012
8318612 Methods for improving the quality of group III-nitride materials and structures produced by the methods Nov. 27, 2012
8278220 Method to direct pattern metals on a substrate Oct. 2, 2012
8273660 Method of manufacturing a dual face package Sep. 25, 2012
8268695 Methods of making capacitors Sep. 18, 2012
8252682 Method for thinning a wafer Aug. 28, 2012
8236592 Method of forming semiconductor device Aug. 7, 2012
8232171 Structure with isotropic silicon recess profile in nanoscale dimensions Jul. 31, 2012
8216927 Method of reducing contamination by providing a removable polymer protection film during microstructure processing Jul. 10, 2012
8183128 Method of reducing roughness of a thick insulating layer May. 22, 2012
8173552 Method of fabricating an identification mark utilizing a liquid film assisted by a laser May. 8, 2012
8168545 Solar cell fabrication using extruded dopant-bearing materials May. 1, 2012
8158517 Method for manufacturing wiring substrate, thin film transistor, display device and television device Apr. 17, 2012
8158532 Topography reduction and control by selective accelerator removal Apr. 17, 2012
8129089 Use of blended solvents in defectivity prevention Mar. 6, 2012
8116894 Chemical mechanical polishing method and chemical mechanical polishing device Feb. 14, 2012
8093158 Semiconductor device manufacturing method and substrate processing apparatus Jan. 10, 2012
8062947 Semiconductor device and method of manufacturing the same Nov. 22, 2011
8043969 Method for manufacturing semiconductor device Oct. 25, 2011
8039353 Semiconductor device and manufacturing method of semiconductor device Oct. 18, 2011
8030178 Layer having functionality, method for forming flexible substrate having the same, and method for manufacturing semiconductor device Oct. 4, 2011
8021983 Method of forming pattern of inorganic material film comprising thermally induced cracking Sep. 20, 2011
8017431 Method for manufacturing semiconductor device Sep. 13, 2011
8008130 Multilayer interconnection board, semiconductor device having the same, and method of forming the same as well as method of mounting the semicondutor chip on the interconnection board Aug. 30, 2011
8002948 Process for forming a patterned thin film structure on a substrate Aug. 23, 2011
7998868 Self-aligned masks using multi-temperature phase-change materials Aug. 16, 2011
7989349 Methods of manufacturing nanotubes having controlled characteristics Aug. 2, 2011
7985694 Method for forming pattern, method for manufacturing semiconductor device and semiconductor device Jul. 26, 2011
7981802 Method for manufacturing shallow trench isolation layer of semiconductor device Jul. 19, 2011
7972472 Process for forming a patterned thin film structure for in-mold decoration Jul. 5, 2011
7964457 Semiconductor integrated circuit device and a manufacturing method for the same Jun. 21, 2011

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