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Class Information
Number: 438/758
Name: Semiconductor device manufacturing: process > Coating of substrate containing semiconductor region or of semiconductor substrate
Description: Processes for forming or applying a coating on a semiconductor substrate, and wherein the intent is to use the electrical properties of the semiconductor for at least one of the purposes outlined in section I, B, of the Class 438 definition above.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7622396 |
Method of producing a semiconductor device |
Nov. 24, 2009 |
| 7618902 |
Plasma treatment of a semiconductor surface for enhanced nucleation of a metal-containing layer |
Nov. 17, 2009 |
| 7615498 |
Method of manufacturing a semiconductor device |
Nov. 10, 2009 |
| 7615479 |
Assembly comprising functional block deposited therein |
Nov. 10, 2009 |
| 7615500 |
Method for depositing film and method for manufacturing semiconductor device |
Nov. 10, 2009 |
| 7615501 |
Method for making a thin film layer |
Nov. 10, 2009 |
| 7608549 |
Method of forming non-conformal layers |
Oct. 27, 2009 |
| 7604832 |
Film forming method, film forming apparatus, pattern forming method, and manufacturing method of semiconductor apparatus |
Oct. 20, 2009 |
| 7598182 |
Anti-reflective coating forming composition containing polyamic acid |
Oct. 6, 2009 |
| 7591937 |
Method of fixing macro-objects to an electricity conducting- or semi-conducting surface by means of electrografting, surfaces thus obtained and applications thereof |
Sep. 22, 2009 |
| 7592254 |
Methods for coating and filling high aspect ratio recessed features |
Sep. 22, 2009 |
| 7588799 |
Metal film production apparatus |
Sep. 15, 2009 |
| 7588995 |
Method to create damage-free porous low-k dielectric films and structures resulting therefrom |
Sep. 15, 2009 |
| 7585783 |
Drop discharge apparatus, method for forming pattern and method for manufacturing semiconductor device |
Sep. 8, 2009 |
| 7585784 |
System and method for reducing etch sequencing induced downstream dielectric defects in high volume semiconducting manufacturing |
Sep. 8, 2009 |
| 7582571 |
Substrate processing method and recording medium |
Sep. 1, 2009 |
| 7582585 |
Coating compositions |
Sep. 1, 2009 |
| 7582555 |
CVD flowable gap fill |
Sep. 1, 2009 |
| 7576012 |
Atomic layer deposition methods |
Aug. 18, 2009 |
| 7576016 |
Process for manufacturing semiconductor device |
Aug. 18, 2009 |
| 7572686 |
System for thin film deposition utilizing compensating forces |
Aug. 11, 2009 |
| 7572739 |
Tape removal in semiconductor structure fabrication |
Aug. 11, 2009 |
| 7569913 |
Boron etch-stop layer and methods related thereto |
Aug. 4, 2009 |
| 7563725 |
Method of depositing materials on a non-planar surface |
Jul. 21, 2009 |
| 7560392 |
Electrical components for microelectronic devices and methods of forming the same |
Jul. 14, 2009 |
| 7560393 |
Systems and methods of forming refractory metal nitride layers using disilazanes |
Jul. 14, 2009 |
| 7557047 |
Method of forming a layer of material using an atomic layer deposition process |
Jul. 7, 2009 |
| 7550336 |
Method for fabricating an NMOS transistor |
Jun. 23, 2009 |
| 7547643 |
Techniques promoting adhesion of porous low K film to underlying barrier layer |
Jun. 16, 2009 |
| 7547644 |
Methods and apparatus for forming barrier layers in high aspect ratio vias |
Jun. 16, 2009 |
| 7547645 |
Method for coating a structure comprising semiconductor chips |
Jun. 16, 2009 |
| 7541226 |
Manufacturing process of thin film transistor |
Jun. 2, 2009 |
| 7541297 |
Method and system for improving dielectric film quality for void free gap fill |
Jun. 2, 2009 |
| 7538043 |
Phase change memory device and fabrication method thereof |
May. 26, 2009 |
| 7534467 |
Reduced-pressure drying unit and coating film forming method |
May. 19, 2009 |
| 7534729 |
Modification of semiconductor surfaces in a liquid |
May. 19, 2009 |
| 7531452 |
Strained metal silicon nitride films and method of forming |
May. 12, 2009 |
| 7531891 |
Semiconductor device |
May. 12, 2009 |
| 7524750 |
Integrated process modulation (IPM) a novel solution for gapfill with HDP-CVD |
Apr. 28, 2009 |
| 7521376 |
Method of forming a semiconductor structure using a non-oxygen chalcogen passivation treatment |
Apr. 21, 2009 |
| 7521379 |
Deposition and densification process for titanium nitride barrier layers |
Apr. 21, 2009 |
| 7517771 |
Method for manufacturing semiconductor device having trench |
Apr. 14, 2009 |
| 7514277 |
Etching method and apparatus |
Apr. 7, 2009 |
| 7514371 |
Semiconductor substrate surface protection method |
Apr. 7, 2009 |
| 7514370 |
Compressive nitride film and method of manufacturing thereof |
Apr. 7, 2009 |
| 7507675 |
Device manufacturing method and device |
Mar. 24, 2009 |
| 7507676 |
Film formation method and apparatus for semiconductor process |
Mar. 24, 2009 |
| 7504344 |
Method of forming a carbon polymer film using plasma CVD |
Mar. 17, 2009 |
| 7501315 |
Methods and devices for forming nanostructure monolayers and devices including such monolayers |
Mar. 10, 2009 |
| 7501350 |
Plasma processing method |
Mar. 10, 2009 |
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