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Class Information
Number: 438/754
Name: Semiconductor device manufacturing: process > Chemical etching > Liquid phase etching > Electrically conductive material (e.g., metal, conductive oxide, etc.)
Description: Processes wherein the material undergoing wet chemical etching is an electrically conductive material.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7608547 |
Etchant and method for fabricating liquid crystal display using the same |
Oct. 27, 2009 |
| 7605091 |
Etchant for conductive materials and method of manufacturing a thin film transistor array panel using the same |
Oct. 20, 2009 |
| 7585782 |
Methods of forming semiconductor constructions, and methods of selectively removing metal-containing materials relative to oxide |
Sep. 8, 2009 |
| 7585698 |
Thin film transistor having oxide semiconductor layer and manufacturing method thereof |
Sep. 8, 2009 |
| 7582570 |
Compositions for removal of processing byproducts and method for using same |
Sep. 1, 2009 |
| 7563716 |
Polishing method |
Jul. 21, 2009 |
| 7553341 |
High power density supercapacitors with carbon nanotube electrodes |
Jun. 30, 2009 |
| 7537943 |
Method of manufacturing a semiconductor integrated circuit device |
May. 26, 2009 |
| 7531463 |
Fabrication of semiconductor interconnect structure |
May. 12, 2009 |
| 7524752 |
Method of manufacturing semiconductor device |
Apr. 28, 2009 |
| 7521366 |
Manufacturing method of electro line for liquid crystal display device |
Apr. 21, 2009 |
| 7517811 |
Method for fabricating a floating gate of flash rom |
Apr. 14, 2009 |
| 7517810 |
Reduced metal design rules for power devices |
Apr. 14, 2009 |
| 7468105 |
CMP cleaning composition with microbial inhibitor |
Dec. 23, 2008 |
| 7468316 |
Low fabrication cost, fine pitch and high reliability solder bump |
Dec. 23, 2008 |
| 7456114 |
Microetching composition and method of using the same |
Nov. 25, 2008 |
| 7439087 |
Semiconductor device and manufacturing method thereof |
Oct. 21, 2008 |
| 7432211 |
Method for manufacturing semiconductor device |
Oct. 7, 2008 |
| 7431861 |
Etchant, replenishment solution and method for producing copper wiring using the same |
Oct. 7, 2008 |
| 7427569 |
Metal etching process and rework method thereof |
Sep. 23, 2008 |
| 7425278 |
Process of etching a titanium/tungsten surface and etchant used therein |
Sep. 16, 2008 |
| 7422696 |
Multicomponent nanorods |
Sep. 9, 2008 |
| 7413976 |
Uniform passivation method for conductive features |
Aug. 19, 2008 |
| 7410908 |
Manufacturing method for a semiconductor device |
Aug. 12, 2008 |
| 7402529 |
Method of applying cladding material on conductive lines of MRAM devices |
Jul. 22, 2008 |
| 7396708 |
Etching method for metal layer of display panel |
Jul. 8, 2008 |
| 7396773 |
Method for cleaning a gate stack |
Jul. 8, 2008 |
| 7390754 |
Method of forming a silicide |
Jun. 24, 2008 |
| 7387970 |
Method of using an aqueous solution and composition thereof |
Jun. 17, 2008 |
| 7384799 |
Method to avoid amorphous-si damage during wet stripping processes in the manufacture of MEMS devices |
Jun. 10, 2008 |
| 7371333 |
Methods of etching nickel silicide and cobalt silicide and methods of forming conductive lines |
May. 13, 2008 |
| 7368397 |
Method for monitoring edge bead removal process of copper metal interconnection |
May. 6, 2008 |
| 7364666 |
Flexible circuits and method of making same |
Apr. 29, 2008 |
| 7357878 |
Etchant, and method for fabricating a thin film transistor subtrate including conductive wires using the etchant and the resulting structure |
Apr. 15, 2008 |
| 7358195 |
Method for fabricating liquid crystal display device |
Apr. 15, 2008 |
| 7342637 |
Liquid crystal display device and method for manufacturing the same |
Mar. 11, 2008 |
| 7341958 |
Integrated process for thin film resistors with silicides |
Mar. 11, 2008 |
| 7326650 |
Method of etching dual damascene structure |
Feb. 5, 2008 |
| 7320942 |
Method for removal of metallic residue after plasma etching of a metal layer |
Jan. 22, 2008 |
| 7314834 |
Semiconductor device fabrication method |
Jan. 1, 2008 |
| 7309658 |
Molecular self-assembly in substrate processing |
Dec. 18, 2007 |
| 7279425 |
Polishing method |
Oct. 9, 2007 |
| 7276455 |
Methods of etching an aluminum oxide comprising substrate, and methods of forming a capacitor |
Oct. 2, 2007 |
| 7270762 |
Polishing compositions for noble metals |
Sep. 18, 2007 |
| 7265040 |
Cleaning solution and method for selectively removing layer in a silicidation process |
Sep. 4, 2007 |
| 7256138 |
Method and composition for selectively etching against cobalt silicide |
Aug. 14, 2007 |
| 7253119 |
Passivated nanoparticles, method of fabrication thereof, and devices incorporating nanoparticles |
Aug. 7, 2007 |
| 7235494 |
CMP cleaning composition with microbial inhibitor |
Jun. 26, 2007 |
| 7202165 |
Electronic device having a stacked wiring layer including Al and Ti |
Apr. 10, 2007 |
| 7196013 |
Capping layer for a semiconductor device and a method of fabrication |
Mar. 27, 2007 |
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