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Class Information
Number: 438/754
Name: Semiconductor device manufacturing: process > Chemical etching > Liquid phase etching > Electrically conductive material (e.g., metal, conductive oxide, etc.)
Description: Processes wherein the material undergoing wet chemical etching is an electrically conductive material.










Sub-classes under this class:

Class Number Class Name Patents
438/755 Silicide 80


Patents under this class:
1 2 3 4 5 6 7 8 9 10 11

Patent Number Title Of Patent Date Issued
8703621 Manufacturing method of magnetic recording medium Apr. 22, 2014
8691705 Method of patterning metal alloy material layer having hafnium and molybdenum Apr. 8, 2014
8679984 Method of manufacturing electric device, array of electric devices, and manufacturing method therefor Mar. 25, 2014
8674352 Overvoltage testing apparatus Mar. 18, 2014
8669190 Method for manufacturing semiconductor device and semiconductor wafer Mar. 11, 2014
8652345 Method of forming a patterned substrate Feb. 18, 2014
8652972 Stabilized etching solutions for CU and CU/NI layers Feb. 18, 2014
8647031 Method of making a semiconductor device having a multicomponent oxide Feb. 11, 2014
8623773 Etchant for metal layer including copper or a copper alloy, method of manufacturing a display substrate using the same and display substrate Jan. 7, 2014
8623231 Method for etching an ultra thin film Jan. 7, 2014
8617944 Method of etching a pixel electrode Dec. 31, 2013
8618000 Selective wet etching of hafnium aluminum oxide films Dec. 31, 2013
8612038 Target object processing system and method of controlling the same Dec. 17, 2013
8603837 High productivity combinatorial workflow for post gate etch clean development Dec. 10, 2013
8591756 Method of manufacturing a metallized ceramic substrate Nov. 26, 2013
8592297 Wafer and method of processing wafer Nov. 26, 2013
8586483 Semiconductor device structures and compositions for forming same Nov. 19, 2013
8586481 Chemical planarization of copper wafer polishing Nov. 19, 2013
8574449 Method for manufacturing printed wiring board Nov. 5, 2013
8563356 Thin film transistor and method of fabricating the same Oct. 22, 2013
8557711 Etching solution composition for metal films Oct. 15, 2013
8541314 Method for smoothing group III nitride semiconductor substrate Sep. 24, 2013
8535953 Process for selectively patterning a magnetic film structure Sep. 17, 2013
8513139 Etching agent, etching method and liquid for preparing etching agent Aug. 20, 2013
8513120 Gold-tin etch using combination of halogen plasma and wet etch Aug. 20, 2013
8512587 Highly selective doped oxide etchant Aug. 20, 2013
8513140 Post-dry etching cleaning liquid composition and process for fabricating semiconductor device Aug. 20, 2013
8497215 Edge deletion of thin-layer solar modules by etching Jul. 30, 2013
8491799 Method for forming magnetic tunnel junction cell Jul. 23, 2013
8481432 Fabrication of semiconductor interconnect structure Jul. 9, 2013
8470634 Method of manufacturing oxide thin film transistor Jun. 25, 2013
8461054 Method of manufacturing liquid crystal display device Jun. 11, 2013
8445388 Methods of forming semiconductor devices and devices formed using such methods May. 21, 2013
8440577 Method for reducing metal, multilayer interconnection structure and manufacturing method for the same, and semiconductor device and manufacturing method for the same May. 14, 2013
8435862 Method of manufacturing semiconductor device May. 7, 2013
8435903 Semiconductor substrate surface treatment method May. 7, 2013
8426319 Composition for etching a metal hard mask material in semiconductor processing Apr. 23, 2013
8426235 Method for manufacturing capacitive electromechanical transducer Apr. 23, 2013
8419964 Apparatus and method for edge bevel removal of copper from silicon wafers Apr. 16, 2013
8420436 Method for manufacturing solar cell, etching device, and CVD device Apr. 16, 2013
8414790 Bevel plasma treatment to enhance wet edge clean Apr. 9, 2013
8409999 Etching composition for etching a transparent electrode Apr. 2, 2013
8409937 Producing transistor including multi-layer reentrant profile Apr. 2, 2013
8389418 Solution for the selective removal of metal from aluminum substrates Mar. 5, 2013
8377830 Method of manufacturing a semiconductor device and wet processing apparatus Feb. 19, 2013
8377317 Method for manufacturing printed circuit board with thick traces Feb. 19, 2013
8378341 Semiconductor device and method of manufacturing semiconductor device Feb. 19, 2013
8372757 Wet etching methods for copper removal and planarization in semiconductor processing Feb. 12, 2013
8354288 Etchant and method of manufacturing an array substrate using the same Jan. 15, 2013
8338311 Method for the production of structured layers of titanium and nickel Dec. 25, 2012

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