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Class Information
Number: 438/754
Name: Semiconductor device manufacturing: process > Chemical etching > Liquid phase etching > Electrically conductive material (e.g., metal, conductive oxide, etc.)
Description: Processes wherein the material undergoing wet chemical etching is an electrically conductive material.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7371333 |
Methods of etching nickel silicide and cobalt silicide and methods of forming conductive lines |
May. 13, 2008 |
| 7368397 |
Method for monitoring edge bead removal process of copper metal interconnection |
May. 6, 2008 |
| 7364666 |
Flexible circuits and method of making same |
Apr. 29, 2008 |
| 7357878 |
Etchant, and method for fabricating a thin film transistor subtrate including conductive wires using the etchant and the resulting structure |
Apr. 15, 2008 |
| 7358195 |
Method for fabricating liquid crystal display device |
Apr. 15, 2008 |
| 7341958 |
Integrated process for thin film resistors with silicides |
Mar. 11, 2008 |
| 7342637 |
Liquid crystal display device and method for manufacturing the same |
Mar. 11, 2008 |
| 7326650 |
Method of etching dual damascene structure |
Feb. 5, 2008 |
| 7320942 |
Method for removal of metallic residue after plasma etching of a metal layer |
Jan. 22, 2008 |
| 7314834 |
Semiconductor device fabrication method |
Jan. 1, 2008 |
| 7309658 |
Molecular self-assembly in substrate processing |
Dec. 18, 2007 |
| 7279425 |
Polishing method |
Oct. 9, 2007 |
| 7276455 |
Methods of etching an aluminum oxide comprising substrate, and methods of forming a capacitor |
Oct. 2, 2007 |
| 7270762 |
Polishing compositions for noble metals |
Sep. 18, 2007 |
| 7265040 |
Cleaning solution and method for selectively removing layer in a silicidation process |
Sep. 4, 2007 |
| 7256138 |
Method and composition for selectively etching against cobalt silicide |
Aug. 14, 2007 |
| 7253119 |
Passivated nanoparticles, method of fabrication thereof, and devices incorporating nanoparticles |
Aug. 7, 2007 |
| 7235494 |
CMP cleaning composition with microbial inhibitor |
Jun. 26, 2007 |
| 7202165 |
Electronic device having a stacked wiring layer including Al and Ti |
Apr. 10, 2007 |
| 7196013 |
Capping layer for a semiconductor device and a method of fabrication |
Mar. 27, 2007 |
| 7192835 |
Method of forming a high-k film on a semiconductor device |
Mar. 20, 2007 |
| 7189656 |
Method for manufacturing ag-oxide-based electric contact material and product of the same |
Mar. 13, 2007 |
| 7186657 |
Method for patterning HfO2-containing dielectric |
Mar. 6, 2007 |
| 7183203 |
Method of plating a metal or metal compound on a semiconductor substrate that includes using the same main component in both plating and etching solutions |
Feb. 27, 2007 |
| 7172976 |
Extrusion-free wet cleaning process for copper-dual damascene structures |
Feb. 6, 2007 |
| 7166543 |
Methods for forming an enriched metal oxide surface for use in a semiconductor device |
Jan. 23, 2007 |
| 7160482 |
Composition comprising an oxidizing and complexing compound |
Jan. 9, 2007 |
| 7153782 |
Effective solution and process to wet-etch metal-alloy films in semiconductor processing |
Dec. 26, 2006 |
| 7153775 |
Conductive material patterning methods |
Dec. 26, 2006 |
| 7151057 |
Flexible MEMS transducer manufacturing method |
Dec. 19, 2006 |
| 7147798 |
Aqueous based metal etchant |
Dec. 12, 2006 |
| 7138342 |
Process of maintaining hybrid etch |
Nov. 21, 2006 |
| 7135444 |
Cleaning composition useful in semiconductor integrated circuit fabrication |
Nov. 14, 2006 |
| 7132367 |
Polishing method |
Nov. 7, 2006 |
| 7128844 |
Metal/ceramic circuit board and method for producing same |
Oct. 31, 2006 |
| 7129160 |
Method for simultaneously removing multiple conductive materials from microelectronic substrates |
Oct. 31, 2006 |
| 7129182 |
Method for etching a thin metal layer |
Oct. 31, 2006 |
| 7122484 |
Process for removing organic materials during formation of a metal interconnect |
Oct. 17, 2006 |
| 7115526 |
Method for wet etching of high k thin film at low temperature |
Oct. 3, 2006 |
| 7115527 |
Methods of etching an aluminum oxide comprising substrate, and methods of forming a capacitor |
Oct. 3, 2006 |
| 7104267 |
Planarized copper cleaning for reduced defects |
Sep. 12, 2006 |
| 7101809 |
Method of manufacturing a substrate for an electronic device by using etchant and electronic device having the substrate |
Sep. 5, 2006 |
| 7098136 |
Structure having flush circuit features and method of making |
Aug. 29, 2006 |
| 7094131 |
Microelectronic substrate having conductive material with blunt cornered apertures, and associated methods for removing conductive material |
Aug. 22, 2006 |
| 7093356 |
Method for producing wiring substrate |
Aug. 22, 2006 |
| 7087534 |
Semiconductor substrate cleaning |
Aug. 8, 2006 |
| 7067465 |
Cleaning composition useful in semiconductor integrated circuit fabricating |
Jun. 27, 2006 |
| 7067016 |
Chemically assisted mechanical cleaning of MRAM structures |
Jun. 27, 2006 |
| 7060631 |
Methods of cleaning surfaces of copper-containing materials, and methods of forming openings to copper-containing substrates |
Jun. 13, 2006 |
| 7049245 |
Two-step GC etch for GC profile and process window improvement |
May. 23, 2006 |
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