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Class Information
Number: 438/753
Name: Semiconductor device manufacturing: process > Chemical etching > Liquid phase etching > Silicon
Description: Processes wherein the material undergoing wet chemical etching is silicon (Si).
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 4348254 |
Method of making solar cell |
Sep. 7, 1982 |
| 4322571 |
Solar cells and methods for manufacture thereof |
Mar. 30, 1982 |
| 4320168 |
Method of forming semicrystalline silicon article and product produced thereby |
Mar. 16, 1982 |
| 4295923 |
Method of manufacturing a semiconductor/glass composite material |
Oct. 20, 1981 |
| 4294651 |
Method of surface-treating semiconductor substrate |
Oct. 13, 1981 |
| 4261791 |
Two step method of cleaning silicon wafers |
Apr. 14, 1981 |
| 4252865 |
Highly solar-energy absorbing device and method of making the same |
Feb. 24, 1981 |
| 4217393 |
Method of inducing differential etch rates in glow discharge produced amorphous silicon |
Aug. 12, 1980 |
| 4198262 |
Solar cell manufacture |
Apr. 15, 1980 |
| 4187140 |
Method for etching silicon and a residue and oxidation resistant etchant therefor |
Feb. 5, 1980 |
| 4174252 |
Method of defining contact openings in insulating layers on semiconductor devices without the formation of undesirable pinholes |
Nov. 13, 1979 |
| 4172005 |
Method of etching a semiconductor substrate |
Oct. 23, 1979 |
| 4171242 |
Neutral pH silicon etchant for etching silicon in the presence of phosphosilicate glass |
Oct. 16, 1979 |
| 4137123 |
Texture etching of silicon: method |
Jan. 30, 1979 |
| 4113551 |
Polycrystalline silicon etching with tetramethylammonium hydroxide |
Sep. 12, 1978 |
| 4071397 |
Silicon metallographic etch |
Jan. 31, 1978 |
| 4057895 |
Method of forming sloped members of N-type polycrystalline silicon |
Nov. 15, 1977 |
| 4050979 |
Process for thinning silicon with special application to producing silicon on insulator |
Sep. 27, 1977 |
| 4029542 |
Method for sloping the sidewalls of multilayer P+ PN+ junction mesa structures |
Jun. 14, 1977 |
| 4004957 |
Method for etching silicon |
Jan. 25, 1977 |
| 3997381 |
Method of manufacture of an epitaxial semiconductor layer on an insulating substrate |
Dec. 14, 1976 |
| 3977925 |
Method of localized etching of Si crystals |
Aug. 31, 1976 |
| 3971683 |
Method of etching materials containing silicon |
Jul. 27, 1976 |
| 3966517 |
Manufacturing semiconductor devices in which silicon slices or germanium slices are etched and semiconductor devices thus manufactured |
Jun. 29, 1976 |
| 3960623 |
Membrane mask for selective semiconductor etching |
Jun. 1, 1976 |
| 3936331 |
Process for forming sloped topography contact areas between polycrystalline silicon and single-crystal silicon |
Feb. 3, 1976 |
| 3930914 |
THINNING SEMICONDUCTIVE SUBSTRATES |
Jan. 6, 1976 |
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