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Class Information
Number: 438/753
Name: Semiconductor device manufacturing: process > Chemical etching > Liquid phase etching > Silicon
Description: Processes wherein the material undergoing wet chemical etching is silicon (Si).
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 5468344 |
Method for manufacturing semiconductor devices |
Nov. 21, 1995 |
| 5462639 |
Method of treating particles |
Oct. 31, 1995 |
| 5454901 |
Process for treating semiconductor substrates |
Oct. 3, 1995 |
| 5431777 |
Methods and compositions for the selective etching of silicon |
Jul. 11, 1995 |
| 5407868 |
Method of making an electrode tip for a tunnel current sensing device |
Apr. 18, 1995 |
| 5403439 |
Method of producing same-sized particles |
Apr. 4, 1995 |
| 5387316 |
Wafer etch protection method |
Feb. 7, 1995 |
| 5374329 |
Process for producing a semiconductor wafer |
Dec. 20, 1994 |
| 5348617 |
Selective etching process |
Sep. 20, 1994 |
| 5316618 |
Etching method for obtaining at least one cavity in a substrate |
May. 31, 1994 |
| 5310457 |
Method of integrated circuit fabrication including selective etching of silicon and silicon compounds |
May. 10, 1994 |
| 5259918 |
Heteroepitaxial growth of germanium on silicon by UHV/CVD |
Nov. 9, 1993 |
| 5181985 |
Process for the wet-chemical surface treatment of semiconductor wafers |
Jan. 26, 1993 |
| 5147499 |
Process for removal of residues remaining after etching polysilicon layer in formation of integrated circuit structure |
Sep. 15, 1992 |
| 5116464 |
Cesium hydroxide etch of a semiconductor crystal |
May. 26, 1992 |
| 5080725 |
Optical properties of solar cells using tilted geometrical features |
Jan. 14, 1992 |
| 5071510 |
Process for anisotropic etching of silicon plates |
Dec. 10, 1991 |
| 5064498 |
Silicon backside etch for semiconductors |
Nov. 12, 1991 |
| 5051134 |
Process for the wet-chemical treatment of semiconductor surfaces |
Sep. 24, 1991 |
| 5024953 |
Method for producing opto-electric transducing element |
Jun. 18, 1991 |
| 4978421 |
Monolithic silicon membrane device fabrication process |
Dec. 18, 1990 |
| 4971654 |
Process and apparatus for etching semiconductor surfaces |
Nov. 20, 1990 |
| 4941941 |
Method of anisotropically etching silicon wafers and wafer etching solution |
Jul. 17, 1990 |
| 4911783 |
Process for etching recesses in a silicon substrate |
Mar. 27, 1990 |
| 4885056 |
Method of reducing defects on semiconductor wafers |
Dec. 5, 1989 |
| 4876224 |
Silicon wafer for a semiconductor substrate and the method for making the same |
Oct. 24, 1989 |
| 4874463 |
Integrated circuits from wafers having improved flatness |
Oct. 17, 1989 |
| 4859280 |
Method of etching silicon by enhancing silicon etching capability of alkali hydroxide through the addition of positive valence impurity ions |
Aug. 22, 1989 |
| 4840701 |
Etching apparatus and method |
Jun. 20, 1989 |
| 4836888 |
Method of chemically etching semiconductor substrate |
Jun. 6, 1989 |
| 4783237 |
Solid state transducer and method of making same |
Nov. 8, 1988 |
| 4765865 |
Silicon etch rate enhancement |
Aug. 23, 1988 |
| 4741964 |
Structure containing hydrogenated amorphous silicon and process |
May. 3, 1988 |
| 4704785 |
Process for making a buried conductor by fusing two wafers |
Nov. 10, 1987 |
| 4681657 |
Preferential chemical etch for doped silicon |
Jul. 21, 1987 |
| 4663820 |
Metallizing process for semiconductor devices |
May. 12, 1987 |
| 4618397 |
Method of manufacturing semiconductor device having a pressure sensor |
Oct. 21, 1986 |
| 4600934 |
Method of undercut anisotropic etching of semiconductor material |
Jul. 15, 1986 |
| 4597003 |
Chemical etching of a semiconductive wafer by undercutting an etch stopped layer |
Jun. 24, 1986 |
| 4592792 |
Method for forming uniformly thick selective epitaxial silicon |
Jun. 3, 1986 |
| 4588472 |
Method of fabricating a semiconductor device |
May. 13, 1986 |
| 4581103 |
Method of etching semiconductor material |
Apr. 8, 1986 |
| 4554046 |
Method of selectively etching high impurity concentration semiconductor layer |
Nov. 19, 1985 |
| 4543171 |
Method for eliminating defects in a photodetector |
Sep. 24, 1985 |
| 4522682 |
Method for producing PNP type lateral transistor separated from substrate by O.D.E. for minimal interference therefrom |
Jun. 11, 1985 |
| 4498229 |
Piezoresistive transducer |
Feb. 12, 1985 |
| 4470875 |
Fabrication of silicon devices requiring anisotropic etching |
Sep. 11, 1984 |
| 4428111 |
Microwave transistor |
Jan. 31, 1984 |
| 4383886 |
Method of manufacturing a semiconductor element |
May. 17, 1983 |
| 4362599 |
Method for making semiconductor device |
Dec. 7, 1982 |
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