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Class Information
Number: 438/753
Name: Semiconductor device manufacturing: process > Chemical etching > Liquid phase etching > Silicon
Description: Processes wherein the material undergoing wet chemical etching is silicon (Si).
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 5968849 |
Method for pre-shaping a semiconductor substrate for polishing and structure |
Oct. 19, 1999 |
| 5954888 |
Post-CMP wet-HF cleaning station |
Sep. 21, 1999 |
| 5953595 |
Method of manufacturing thin film transistor |
Sep. 14, 1999 |
| 5942449 |
Method for removing an upper layer of material from a semiconductor wafer |
Aug. 24, 1999 |
| 5939336 |
Aqueous solutions of ammonium fluoride in propylene glycol and their use in the removal of etch residues from silicon substrates |
Aug. 17, 1999 |
| 5939741 |
Methods of forming integrated circuitry and integrated circuitry structures |
Aug. 17, 1999 |
| 5928969 |
Method for controlled selective polysilicon etching |
Jul. 27, 1999 |
| 5930650 |
Method of etching silicon materials |
Jul. 27, 1999 |
| 5926705 |
Method for manufacturing a semiconductor device with stabilization of a bipolar transistor and a schottky barrier diode |
Jul. 20, 1999 |
| 5916824 |
Etching method of silicon wafer surface and etching apparatus of the same |
Jun. 29, 1999 |
| 5913980 |
Method for removing complex oxide film growth on silicon crystal |
Jun. 22, 1999 |
| 5914183 |
Porous semiconductor material |
Jun. 22, 1999 |
| 5914281 |
Apparatus for etching wafer |
Jun. 22, 1999 |
| 5906951 |
Strained Si/SiGe layers on insulator |
May. 25, 1999 |
| 5904156 |
Dry film resist removal in the presence of electroplated C4's |
May. 18, 1999 |
| 5904572 |
Wet etching station and a wet etching method adapted for utilizing the same |
May. 18, 1999 |
| 5899743 |
Method for fabricating semiconductor wafers |
May. 4, 1999 |
| 5899750 |
Fine processing method |
May. 4, 1999 |
| 5891354 |
Methods of etching through wafers and substrates with a composite etch stop layer |
Apr. 6, 1999 |
| 5888761 |
Etching method for forming air bridge pattern on silicon substrate |
Mar. 30, 1999 |
| 5883012 |
Method of etching a trench into a semiconductor substrate |
Mar. 16, 1999 |
| 5879572 |
Method of protecting silicon wafers during wet chemical etching |
Mar. 9, 1999 |
| 5869385 |
Selectively oxidized field oxide region |
Feb. 9, 1999 |
| 5869399 |
Method for increasing utilizable surface of rugged polysilicon layer in semiconductor device |
Feb. 9, 1999 |
| 5868862 |
Method of removing inorganic contamination by chemical alteration and extraction in a supercritical fluid media |
Feb. 9, 1999 |
| 5868856 |
Method for removing inorganic contamination by chemical derivitization and extraction |
Feb. 9, 1999 |
| 5854133 |
Method for manufacturing a semiconductor device |
Dec. 29, 1998 |
| 5849624 |
Method of fabricating a bottom electrode with rounded corners for an integrated memory cell capacitor |
Dec. 15, 1998 |
| 5830777 |
Method of manufacturing a capacitance type acceleration sensor |
Nov. 3, 1998 |
| 5827784 |
Method for improving contact openings during the manufacture of an integrated circuit |
Oct. 27, 1998 |
| 5824596 |
POCl.sub.3 process flow for doping polysilicon without forming oxide pillars or gate oxide shorts |
Oct. 20, 1998 |
| 5804516 |
Wet processing tank equipped with rapid drain and rinse system |
Sep. 8, 1998 |
| 5804090 |
Process for etching semiconductors using a hydrazine and metal hydroxide-containing etching solution |
Sep. 8, 1998 |
| 5801103 |
Etching process which protects metal |
Sep. 1, 1998 |
| 5767020 |
Etching solution for etching porous silicon, etching method using the etching solution and method of preparing semiconductor member using the etching solution |
Jun. 16, 1998 |
| 5728259 |
Process for fabricating thin-film semiconductor device without plasma induced damage |
Mar. 17, 1998 |
| 5693181 |
Method of making transducer chips with grooves on the wafer for easy separation of the chips |
Dec. 2, 1997 |
| 5670411 |
Process of making semiconductor-on-insulator substrate |
Sep. 23, 1997 |
| 5630905 |
Method of fabricating quantum bridges by selective etching of superlattice structures |
May. 20, 1997 |
| 5587046 |
Process for treating semiconductor material with an acid-containing fluid |
Dec. 24, 1996 |
| 5573680 |
Method for etching a semiconductor material without altering flow pattern defect distribution |
Nov. 12, 1996 |
| 5565060 |
Methods and compositions for the selective etching of silicon |
Oct. 15, 1996 |
| 5534112 |
Method for testing electrical properties of silicon single crystal |
Jul. 9, 1996 |
| 5518966 |
Method for wet etching polysilicon |
May. 21, 1996 |
| 5516730 |
Pre-thermal treatment cleaning process of wafers |
May. 14, 1996 |
| 5494862 |
Method of making semiconductor wafers |
Feb. 27, 1996 |
| 5484748 |
Method for storage of silicon wafer |
Jan. 16, 1996 |
| 5468344 |
Method for manufacturing semiconductor devices |
Nov. 21, 1995 |
| 5468338 |
Methods for selectively wet etching substrates |
Nov. 21, 1995 |
| 5462639 |
Method of treating particles |
Oct. 31, 1995 |
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