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Class Information
Number: 438/753
Name: Semiconductor device manufacturing: process > Chemical etching > Liquid phase etching > Silicon
Description: Processes wherein the material undergoing wet chemical etching is silicon (Si).
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7622049 |
Passivation for cleaning a material |
Nov. 24, 2009 |
| 7618897 |
Alkali etching liquid for silicon wafer and etching method using same |
Nov. 17, 2009 |
| 7611989 |
Polysilicon dummy wafers and process used therewith |
Nov. 3, 2009 |
| 7601642 |
Method of processing silicon wafer |
Oct. 13, 2009 |
| 7598181 |
Process for enhancing solubility and reaction rates in supercritical fluids |
Oct. 6, 2009 |
| 7585422 |
Optical element manufacturing method |
Sep. 8, 2009 |
| 7579309 |
Methods for characterizing defects on silicon surfaces and etching composition and treatment process therefor |
Aug. 25, 2009 |
| 7575945 |
Method of forming a metal line and method of manufacturing a display substrate by using the same including etching and undercutting the channel layer |
Aug. 18, 2009 |
| 7575962 |
Fin structure and method of manufacturing fin transistor adopting the fin structure |
Aug. 18, 2009 |
| 7572740 |
Methods for optimizing thin film formation with reactive gases |
Aug. 11, 2009 |
| 7569468 |
Method for forming a floating gate memory with polysilicon local interconnects |
Aug. 4, 2009 |
| 7566659 |
Method of forming fine pattern of semiconductor device using SiGe layer as sacrificial layer, and method of forming self-aligned contacts using the same |
Jul. 28, 2009 |
| 7563724 |
Method of producing semiconductor pressure sensor |
Jul. 21, 2009 |
| 7547642 |
Micro-structure manufacturing method |
Jun. 16, 2009 |
| 7544622 |
Passivation for cleaning a material |
Jun. 9, 2009 |
| 7531463 |
Fabrication of semiconductor interconnect structure |
May. 12, 2009 |
| 7528072 |
Crystallographic preferential etch to define a recessed-region for epitaxial growth |
May. 5, 2009 |
| 7524773 |
Anti-reflective substrate and the manufacturing method thereof |
Apr. 28, 2009 |
| 7517749 |
Method for forming an array with polysilicon local interconnects |
Apr. 14, 2009 |
| 7517809 |
Removal of MEMS sacrificial layers using supercritical fluid/chemical formulations |
Apr. 14, 2009 |
| 7514369 |
Method of producing porous silicon particles by stain-etching and silicon nanoparticles from stain-etched silicon powder |
Apr. 7, 2009 |
| 7510933 |
Fabrication method of semiconductor integrated circuit device |
Mar. 31, 2009 |
| 7498269 |
Cleaning methods for silicon electrode assembly surface contamination removal |
Mar. 3, 2009 |
| 7498229 |
Transistor and in-situ fabrication process |
Mar. 3, 2009 |
| 7498214 |
Semiconductor devices and manufacturing methods of the same |
Mar. 3, 2009 |
| 7498273 |
Formation of high quality dielectric films of silicon dioxide for STI: usage of different siloxane-based precursors for harp II--remote plasma enhanced deposition processes |
Mar. 3, 2009 |
| 7485238 |
Etching method, etched product formed by the same, and piezoelectric vibration device, method for producing the same |
Feb. 3, 2009 |
| 7479461 |
Method of etching silicon anisotropically |
Jan. 20, 2009 |
| 7479232 |
Method for producing a semiconductor component and a semiconductor component produced according to the method |
Jan. 20, 2009 |
| 7470622 |
Fabrication and use of polished silicon micro-mirrors |
Dec. 30, 2008 |
| 7468323 |
Method of forming high aspect ratio structures |
Dec. 23, 2008 |
| 7449417 |
Cleaning solution for silicon surface and methods of fabricating semiconductor device using the same |
Nov. 11, 2008 |
| 7446051 |
Method of etching silicon |
Nov. 4, 2008 |
| 7439184 |
Method of making comb-teeth electrode pair |
Oct. 21, 2008 |
| 7439165 |
Method of fabricating tensile strained layers and compressive strain layers for a CMOS device |
Oct. 21, 2008 |
| 7432214 |
Compositions for dissolution of low-k dielectric film, and methods of use |
Oct. 7, 2008 |
| 7429369 |
Silicon nanoparticle nanotubes and method for making the same |
Sep. 30, 2008 |
| 7410844 |
Device fabrication by anisotropic wet etch |
Aug. 12, 2008 |
| 7407868 |
Chemical thinning of silicon body of an SOI substrate |
Aug. 5, 2008 |
| 7396773 |
Method for cleaning a gate stack |
Jul. 8, 2008 |
| 7396483 |
Uniform chemical etching method |
Jul. 8, 2008 |
| 7387739 |
Mask and method of manufacturing the same, electroluminescent device and method of manufacturing the same, and electronic instrument |
Jun. 17, 2008 |
| 7384799 |
Method to avoid amorphous-si damage during wet stripping processes in the manufacture of MEMS devices |
Jun. 10, 2008 |
| 7378355 |
System and methods for polishing a wafer |
May. 27, 2008 |
| 7368395 |
Method for fabricating a nano-imprinting mold |
May. 6, 2008 |
| 7361538 |
Transistors and methods of manufacture thereof |
Apr. 22, 2008 |
| 7354863 |
Methods of selectively removing silicon |
Apr. 8, 2008 |
| 7338610 |
Etching method for manufacturing semiconductor device |
Mar. 4, 2008 |
| 7332437 |
Method for processing semiconductor wafer and semiconductor wafer |
Feb. 19, 2008 |
| 7316981 |
Method of removing silicon from a substrate |
Jan. 8, 2008 |
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