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Class Information
Number: 438/753
Name: Semiconductor device manufacturing: process > Chemical etching > Liquid phase etching > Silicon
Description: Processes wherein the material undergoing wet chemical etching is silicon (Si).
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7368395 |
Method for fabricating a nano-imprinting mold |
May. 6, 2008 |
| 7361538 |
Transistors and methods of manufacture thereof |
Apr. 22, 2008 |
| 7354863 |
Methods of selectively removing silicon |
Apr. 8, 2008 |
| 7338610 |
Etching method for manufacturing semiconductor device |
Mar. 4, 2008 |
| 7332437 |
Method for processing semiconductor wafer and semiconductor wafer |
Feb. 19, 2008 |
| 7316981 |
Method of removing silicon from a substrate |
Jan. 8, 2008 |
| 7297568 |
Three-dimensional structural body composed of silicon fine wire, its manufacturing method, and device using same |
Nov. 20, 2007 |
| 7256077 |
Method for removing a semiconductor layer |
Aug. 14, 2007 |
| 7247578 |
Method of varying etch selectivities of a film |
Jul. 24, 2007 |
| 7247579 |
Cleaning methods for silicon electrode assembly surface contamination removal |
Jul. 24, 2007 |
| 7241707 |
Layered films formed by controlled phase segregation |
Jul. 10, 2007 |
| 7238621 |
Integrated optical MEMS devices |
Jul. 3, 2007 |
| 7235495 |
Controlled growth of highly uniform, oxide layers, especially ultrathin layers |
Jun. 26, 2007 |
| 7202121 |
Methods for preserving strained semiconductor substrate layers during CMOS processing |
Apr. 10, 2007 |
| 7199015 |
Rare earth-oxides, rare earth-nitrides, rare earth-phosphides and ternary alloys with silicon |
Apr. 3, 2007 |
| 7195934 |
Method and system for deposition tuning in an epitaxial film growth apparatus |
Mar. 27, 2007 |
| 7192886 |
Method for using additives in the caustic etching of silicon for obtaining improved surface characteristics |
Mar. 20, 2007 |
| 7192885 |
Method for texturing surfaces of silicon wafers |
Mar. 20, 2007 |
| 7192882 |
Component for electromagnetic waves and a method for manufacturing the same |
Mar. 20, 2007 |
| 7186649 |
Submicron semiconductor device and a fabricating method thereof |
Mar. 6, 2007 |
| 7183225 |
Method for fabricating semiconductor device |
Feb. 27, 2007 |
| 7172975 |
Process for the wet chemical treatment of semiconductor wafers |
Feb. 6, 2007 |
| 7166539 |
Wet etching method of removing silicon from a substrate |
Jan. 23, 2007 |
| 7163903 |
Method for making a semiconductor structure using silicon germanium |
Jan. 16, 2007 |
| 7160815 |
Removal of MEMS sacrificial layers using supercritical fluid/chemical formulations |
Jan. 9, 2007 |
| 7157382 |
Method for expanding a trench in a semiconductor structure |
Jan. 2, 2007 |
| 7153753 |
Strained Si/SiGe/SOI islands and processes of making same |
Dec. 26, 2006 |
| 7151026 |
Semiconductor processing methods |
Dec. 19, 2006 |
| 7148114 |
Process for patterning high-k dielectric material |
Dec. 12, 2006 |
| 7135381 |
Wet etching method of removing silicon from a substrate and method of forming trench isolation |
Nov. 14, 2006 |
| 7105103 |
System and method for the manufacture of surgical blades |
Sep. 12, 2006 |
| 7094696 |
Method for TMAH etching of CMOS integrated circuits |
Aug. 22, 2006 |
| 7091085 |
Reduced cell-to-cell shorting for memory arrays |
Aug. 15, 2006 |
| 7091131 |
Method of forming integrated circuit structures in silicone ladder polymer |
Aug. 15, 2006 |
| 7090325 |
Liquid drop discharge head and manufacture method thereof, micro device ink-jet head ink cartridge and ink-jet printing device |
Aug. 15, 2006 |
| 7084073 |
Method of forming a via hole through a glass wafer |
Aug. 1, 2006 |
| 7083741 |
Process and device for the wet-chemical treatment of silicon |
Aug. 1, 2006 |
| 7081384 |
Method of forming a silicon dioxide layer |
Jul. 25, 2006 |
| 7067425 |
Method of manufacturing flash memory device |
Jun. 27, 2006 |
| 7052623 |
Method for processing silicon using etching processes |
May. 30, 2006 |
| 7045468 |
Isolated junction structure and method of manufacture |
May. 16, 2006 |
| 7037438 |
Method for production of a semiconductor component and a semiconductor component produced by said method |
May. 2, 2006 |
| 7037854 |
Method for chemical-mechanical jet etching of semiconductor structures |
May. 2, 2006 |
| 7030020 |
Method to shrink cell size in a split gate flash |
Apr. 18, 2006 |
| 7026255 |
Method and device for photo-electrochemically etching a semiconductor sample, especially gallium nitride |
Apr. 11, 2006 |
| 7018937 |
Compositions for removal of processing byproducts and method for using same |
Mar. 28, 2006 |
| 6993826 |
Method of manufacturing a probe array |
Feb. 7, 2006 |
| 6982208 |
Method for producing high throughput strained-Si channel MOSFETS |
Jan. 3, 2006 |
| 6979407 |
Process for producing an SPM sensor |
Dec. 27, 2005 |
| 6972227 |
Semiconductor processing methods, and methods of forming a dynamic random access memory (DRAM) storage capacitor |
Dec. 6, 2005 |
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