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Class Information
Number: 438/753
Name: Semiconductor device manufacturing: process > Chemical etching > Liquid phase etching > Silicon
Description: Processes wherein the material undergoing wet chemical etching is silicon (Si).










Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13

Patent Number Title Of Patent Date Issued
8703509 Method for manufacturing a substrate for liquid-ejecting heads and a liquid-ejecting head Apr. 22, 2014
8692339 Micromechanical component having a rear volume Apr. 8, 2014
8685269 Laser processing method Apr. 1, 2014
8685863 Semiconductor process, semiconductor element and package having semiconductor element Apr. 1, 2014
8664086 Semiconductor wafer, semiconductor thin film, and method for manufacturing semiconductor thin film devices Mar. 4, 2014
8658543 Methods for pFET fabrication using APM solutions Feb. 25, 2014
8658544 Method for texturing silicon surfaces and wafers thereof Feb. 25, 2014
8652869 Method for roughening substrate surface and method for manufacturing photovoltaic device Feb. 18, 2014
8603348 Method of reducing main pole corrosion during aluminum oxide etch Dec. 10, 2013
8599616 Three-dimensional NAND memory with stacked mono-crystalline channels Dec. 3, 2013
8586859 Wafer level interconnection of inverted metamorphic multijunction solar cells Nov. 19, 2013
8585910 Process of making a microtube and microfluidic devices formed therewith Nov. 19, 2013
8586456 Use of CL2 and/or HCL during silicon epitaxial film formation Nov. 19, 2013
8580696 Systems and methods for detecting watermark formations on semiconductor wafers Nov. 12, 2013
8569139 Method of manufacturing strained source/drain structures Oct. 29, 2013
8562855 Silicon etching liquid and etching method Oct. 22, 2013
8563440 Method for chemically treating a substrate Oct. 22, 2013
8555806 Apparatus for making electrode of dye-sensitized solar cell in one working station Oct. 15, 2013
8551846 Methods for fabricating semiconductor devices Oct. 8, 2013
8551889 Manufacture method for photovoltaic module Oct. 8, 2013
8524610 Process for enhancing solubility and reaction rates in supercritical fluids Sep. 3, 2013
8512588 Method of fabricating a scalable nanoporous membrane filter Aug. 20, 2013
8501609 Method for generating a three-dimensional NAND memory with mono-crystalline channels using sacrificial material Aug. 6, 2013
8497215 Edge deletion of thin-layer solar modules by etching Jul. 30, 2013
8486843 Method of forming nanoscale three-dimensional patterns in a porous material Jul. 16, 2013
8476165 Method for thinning a bonding wafer Jul. 2, 2013
8470190 Method for processing portions of walls of an opening formed in a silicon substrate Jun. 25, 2013
8466003 Methods of building crystalline silicon solar cells for use in combinatorial screening Jun. 18, 2013
8466071 Method for etching single wafer Jun. 18, 2013
8461057 Process for the rough-etching of silicon solar cells Jun. 11, 2013
8455324 Method of manufacturing a semiconductor device Jun. 4, 2013
8455325 Method of manufacturing a semiconductor device Jun. 4, 2013
8440573 Method and apparatus for pattern collapse free wet processing of semiconductor devices May. 14, 2013
8435903 Semiconductor substrate surface treatment method May. 7, 2013
8419962 Method for disposing a microstructure Apr. 16, 2013
8419965 System and method for texturing glass Apr. 16, 2013
8415254 Method for removing dummy poly in a gate last process Apr. 9, 2013
8409462 System and method for the manufacture of surgical blades Apr. 2, 2013
8399326 Method of manufacturing memory devices Mar. 19, 2013
8387230 Method of making an ultrasonic transducer system Mar. 5, 2013
8383523 Method for texturing silicon wafers, treatment liquid therefor, and use Feb. 26, 2013
8343873 Method for producing a semiconductor wafer Jan. 1, 2013
8329547 Semiconductor process for etching a recess into a substrate by using an etchant that contains hydrogen peroxide Dec. 11, 2012
8329046 Methods for damage etch and texturing of silicon single crystal substrates Dec. 11, 2012
8329589 Semiconductor device with gate-undercutting recessed region Dec. 11, 2012
8329595 Process for enhancing solubility and reaction rates in supercritical fluids Dec. 11, 2012
8330036 Method of fabrication and structure for multi-junction solar cell formed upon separable substrate Dec. 11, 2012
8324113 Silicon processing method and silicon substrate with etching mask Dec. 4, 2012
8304860 Epitaxially coated silicon wafer and method for producing an epitaxially coated silicon wafer Nov. 6, 2012
8298962 Device made of single-crystal silicon Oct. 30, 2012

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