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Class Information
Number: 438/753
Name: Semiconductor device manufacturing: process > Chemical etching > Liquid phase etching > Silicon
Description: Processes wherein the material undergoing wet chemical etching is silicon (Si).


Patents under this class:
1 2 3 4 5 6 7 8 9 10

Patent Number Title Of Patent Date Issued
7622049 Passivation for cleaning a material Nov. 24, 2009
7618897 Alkali etching liquid for silicon wafer and etching method using same Nov. 17, 2009
7611989 Polysilicon dummy wafers and process used therewith Nov. 3, 2009
7601642 Method of processing silicon wafer Oct. 13, 2009
7598181 Process for enhancing solubility and reaction rates in supercritical fluids Oct. 6, 2009
7585422 Optical element manufacturing method Sep. 8, 2009
7579309 Methods for characterizing defects on silicon surfaces and etching composition and treatment process therefor Aug. 25, 2009
7575945 Method of forming a metal line and method of manufacturing a display substrate by using the same including etching and undercutting the channel layer Aug. 18, 2009
7575962 Fin structure and method of manufacturing fin transistor adopting the fin structure Aug. 18, 2009
7572740 Methods for optimizing thin film formation with reactive gases Aug. 11, 2009
7569468 Method for forming a floating gate memory with polysilicon local interconnects Aug. 4, 2009
7566659 Method of forming fine pattern of semiconductor device using SiGe layer as sacrificial layer, and method of forming self-aligned contacts using the same Jul. 28, 2009
7563724 Method of producing semiconductor pressure sensor Jul. 21, 2009
7547642 Micro-structure manufacturing method Jun. 16, 2009
7544622 Passivation for cleaning a material Jun. 9, 2009
7531463 Fabrication of semiconductor interconnect structure May. 12, 2009
7528072 Crystallographic preferential etch to define a recessed-region for epitaxial growth May. 5, 2009
7524773 Anti-reflective substrate and the manufacturing method thereof Apr. 28, 2009
7517749 Method for forming an array with polysilicon local interconnects Apr. 14, 2009
7517809 Removal of MEMS sacrificial layers using supercritical fluid/chemical formulations Apr. 14, 2009
7514369 Method of producing porous silicon particles by stain-etching and silicon nanoparticles from stain-etched silicon powder Apr. 7, 2009
7510933 Fabrication method of semiconductor integrated circuit device Mar. 31, 2009
7498269 Cleaning methods for silicon electrode assembly surface contamination removal Mar. 3, 2009
7498229 Transistor and in-situ fabrication process Mar. 3, 2009
7498214 Semiconductor devices and manufacturing methods of the same Mar. 3, 2009
7498273 Formation of high quality dielectric films of silicon dioxide for STI: usage of different siloxane-based precursors for harp II--remote plasma enhanced deposition processes Mar. 3, 2009
7485238 Etching method, etched product formed by the same, and piezoelectric vibration device, method for producing the same Feb. 3, 2009
7479461 Method of etching silicon anisotropically Jan. 20, 2009
7479232 Method for producing a semiconductor component and a semiconductor component produced according to the method Jan. 20, 2009
7470622 Fabrication and use of polished silicon micro-mirrors Dec. 30, 2008
7468323 Method of forming high aspect ratio structures Dec. 23, 2008
7449417 Cleaning solution for silicon surface and methods of fabricating semiconductor device using the same Nov. 11, 2008
7446051 Method of etching silicon Nov. 4, 2008
7439184 Method of making comb-teeth electrode pair Oct. 21, 2008
7439165 Method of fabricating tensile strained layers and compressive strain layers for a CMOS device Oct. 21, 2008
7432214 Compositions for dissolution of low-k dielectric film, and methods of use Oct. 7, 2008
7429369 Silicon nanoparticle nanotubes and method for making the same Sep. 30, 2008
7410844 Device fabrication by anisotropic wet etch Aug. 12, 2008
7407868 Chemical thinning of silicon body of an SOI substrate Aug. 5, 2008
7396773 Method for cleaning a gate stack Jul. 8, 2008
7396483 Uniform chemical etching method Jul. 8, 2008
7387739 Mask and method of manufacturing the same, electroluminescent device and method of manufacturing the same, and electronic instrument Jun. 17, 2008
7384799 Method to avoid amorphous-si damage during wet stripping processes in the manufacture of MEMS devices Jun. 10, 2008
7378355 System and methods for polishing a wafer May. 27, 2008
7368395 Method for fabricating a nano-imprinting mold May. 6, 2008
7361538 Transistors and methods of manufacture thereof Apr. 22, 2008
7354863 Methods of selectively removing silicon Apr. 8, 2008
7338610 Etching method for manufacturing semiconductor device Mar. 4, 2008
7332437 Method for processing semiconductor wafer and semiconductor wafer Feb. 19, 2008
7316981 Method of removing silicon from a substrate Jan. 8, 2008

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