| Patent Number |
Title Of Patent |
Date Issued |
| 6709912 |
Dual Si-Ge polysilicon gate with different Ge concentrations for CMOS device optimization |
Mar. 23, 2004 |
| 6699763 |
Disposable spacer technology for reduced cost CMOS processing |
Mar. 2, 2004 |
| 6677192 |
Method of fabricating a relaxed silicon germanium platform having planarizing for high speed CMOS electronics and high speed analog circuits |
Jan. 13, 2004 |
| 6653211 |
Semiconductor substrate, SOI substrate and manufacturing method therefor |
Nov. 25, 2003 |
| 6645831 |
Thermally stable crystalline defect-free germanium bonded to silicon and silicon dioxide |
Nov. 11, 2003 |
| 6620665 |
Method for fabricating semiconductor device |
Sep. 16, 2003 |
| 6613679 |
Method for fabricating a semiconductor device |
Sep. 2, 2003 |
| 6605548 |
Process for etching gallium nitride compound based semiconductors |
Aug. 12, 2003 |
| 6599803 |
Method for fabricating semiconductor device |
Jul. 29, 2003 |
| 6599840 |
Material removal method for forming a structure |
Jul. 29, 2003 |
| 6590236 |
Semiconductor structure for use with high-frequency signals |
Jul. 8, 2003 |
| 6562728 |
Surface treatment method of germanium-containing semiconductor substrate that includes immersion of the substrate in chemical solutions to remove foreign matter |
May. 13, 2003 |
| 6551936 |
Method of etching patterns into epitaxial material |
Apr. 22, 2003 |
| 6545323 |
Semiconductor memory device including a pair of MOS transistors forming a detection circuit |
Apr. 8, 2003 |
| 6537894 |
Process for fabricating a substrate of the silicon-on-insulator or silicon-on-nothing type and resulting device |
Mar. 25, 2003 |
| 6531405 |
Process for producing a light-emitting and/or a light-receiving semiconductor body |
Mar. 11, 2003 |
| 6518197 |
Method for manufacturing semiconductor device |
Feb. 11, 2003 |
| 6514875 |
Chemical method for producing smooth surfaces on silicon wafers |
Feb. 4, 2003 |
| 6482751 |
Titanium dioxide layer serving as a mask and its removed method |
Nov. 19, 2002 |
| 6458662 |
Method of fabricating a semiconductor device having an asymmetrical dual-gate silicon-germanium (SiGe) channel MOSFET and a device thereby formed |
Oct. 1, 2002 |
| 6440766 |
Microfabrication using germanium-based release masks |
Aug. 27, 2002 |
| 6399502 |
Process for fabricating a planar heterostructure |
Jun. 4, 2002 |
| 6383917 |
Method for making integrated circuits |
May. 7, 2002 |
| 6290859 |
Tungsten coating for improved wear resistance and reliability of microelectromechanical devices |
Sep. 18, 2001 |
| 6284672 |
Method of forming a super-shallow amorphous layer in silicon |
Sep. 4, 2001 |
| 6261964 |
Material removal method for forming a structure |
Jul. 17, 2001 |
| 6217228 |
Fiber channel drive adapter |
Apr. 17, 2001 |
| 6207555 |
Electron beam process during dual damascene processing |
Mar. 27, 2001 |
| 6153514 |
Self-aligned dual damascene arrangement for metal interconnection with low k dielectric constant materials and nitride middle etch stop layer |
Nov. 28, 2000 |
| 6143655 |
Methods and structures for silver interconnections in integrated circuits |
Nov. 7, 2000 |
| 6140248 |
Process for producing a semiconductor device with a roughened semiconductor surface |
Oct. 31, 2000 |
| 6121126 |
Methods and structures for metal interconnections in integrated circuits |
Sep. 19, 2000 |
| 6103624 |
Method of improving Cu damascene interconnect reliability by laser anneal before barrier polish |
Aug. 15, 2000 |
| 6093657 |
Fabrication process of semiconductor device |
Jul. 25, 2000 |
| 6087239 |
Disposable spacer and method of forming and using same |
Jul. 11, 2000 |
| 6051444 |
Method of manufacture of liquid crystal display device having characteristics which differ locally |
Apr. 18, 2000 |
| 6004881 |
Digital wet etching of semiconductor materials |
Dec. 21, 1999 |
| 5937272 |
Patterned organic layers in a full-color organic electroluminescent display array on a thin film transistor array substrate |
Aug. 10, 1999 |
| 5906951 |
Strained Si/SiGe layers on insulator |
May. 25, 1999 |
| 5895223 |
Method for etching nitride |
Apr. 20, 1999 |
| 5874365 |
Semiconductor wafer etching method |
Feb. 23, 1999 |
| 5731245 |
High aspect ratio low resistivity lines/vias with a tungsten-germanium alloy hard cap |
Mar. 24, 1998 |
| 5630905 |
Method of fabricating quantum bridges by selective etching of superlattice structures |
May. 20, 1997 |
| 5587046 |
Process for treating semiconductor material with an acid-containing fluid |
Dec. 24, 1996 |
| 5316618 |
Etching method for obtaining at least one cavity in a substrate |
May. 31, 1994 |
| 4971654 |
Process and apparatus for etching semiconductor surfaces |
Nov. 20, 1990 |
| 4855015 |
Dry etch process for selectively etching non-homogeneous material bilayers |
Aug. 8, 1989 |
| 4600934 |
Method of undercut anisotropic etching of semiconductor material |
Jul. 15, 1986 |
| 4252865 |
Highly solar-energy absorbing device and method of making the same |
Feb. 24, 1981 |
| 3966517 |
Manufacturing semiconductor devices in which silicon slices or germanium slices are etched and semiconductor devices thus manufactured |
Jun. 29, 1976 |
