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Class Information
Number: 438/752
Name: Semiconductor device manufacturing: process > Chemical etching > Liquid phase etching > Germanium
Description: Processes wherein the material undergoing wet chemical etching is germanium (Ge).

Patents under this class:
1 2 3 4

Patent Number Title Of Patent Date Issued
8709954 Wafer recycling method Apr. 29, 2014
8599616 Three-dimensional NAND memory with stacked mono-crystalline channels Dec. 3, 2013
8586859 Wafer level interconnection of inverted metamorphic multijunction solar cells Nov. 19, 2013
8513141 Defect etching of germanium Aug. 20, 2013
8501609 Method for generating a three-dimensional NAND memory with mono-crystalline channels using sacrificial material Aug. 6, 2013
8497215 Edge deletion of thin-layer solar modules by etching Jul. 30, 2013
8486835 Czochralski growth of randomly oriented polysilicon and use of randomly oriented polysilicon dummy wafers Jul. 16, 2013
8481378 Effecting selectivity of silicon or silicon-germanium deposition on a silicon or silicon-germanium substrate by doping Jul. 9, 2013
8461055 Process for preparing cleaned surfaces of strained silicon Jun. 11, 2013
8420548 Method for treating germanium surfaces and solutions to be employed therein Apr. 16, 2013
8399326 Method of manufacturing memory devices Mar. 19, 2013
8361867 Biaxial strained field effect transistor devices Jan. 29, 2013
8334181 Germanium MOSFET devices and methods for making same Dec. 18, 2012
8330036 Method of fabrication and structure for multi-junction solar cell formed upon separable substrate Dec. 11, 2012
8263853 Wafer level interconnection of inverted metamorphic multijunction solar cells Sep. 11, 2012
8232191 Semiconductor device manufacturing method Jul. 31, 2012
8222657 Light emitting apparatus Jul. 17, 2012
8173891 Monolithic, multi-bandgap, tandem, ultra-thin, strain-counterbalanced, photovoltaic energy converters with optimal subcell bandgaps May. 8, 2012
8138070 Methods of using a set of silicon nanoparticle fluids to control in situ a set of dopant diffusion profiles Mar. 20, 2012
8138064 Method for producing silicon film-transferred insulator wafer Mar. 20, 2012
8133775 Semiconductor device with mushroom electrode and manufacture method thereof Mar. 13, 2012
8093143 Method for producing a wafer comprising a silicon single crystal substrate having a front and a back side and a layer of SiGe deposited on the front side Jan. 10, 2012
8080452 Effecting selectivity of silicon or silicon-germanium deposition on a silicon or silicon-germanium substrate by doping Dec. 20, 2011
8067687 High-efficiency, monolithic, multi-bandgap, tandem photovoltaic energy converters Nov. 29, 2011
8017504 Transistor having a high-k metal gate stack and a compressively stressed channel Sep. 13, 2011
7993949 Heterogeneous substrate including a sacrificial layer, and a method of fabricating it Aug. 9, 2011
7927993 Cross-contamination control for semiconductor process flows having metal comprising gate electrodes Apr. 19, 2011
7906439 Method of fabricating a MEMS/NEMS electromechanical component Mar. 15, 2011
7879734 Method of manufacturing porous body Feb. 1, 2011
7838393 Process for collective manufacturing of small volume high precision membranes and cavities Nov. 23, 2010
7829413 Methods for forming quantum dots and forming gate using the quantum dots Nov. 9, 2010
7825014 Method for fabricating semiconductor device Nov. 2, 2010
7759258 Method for making solar cell Jul. 20, 2010
7749910 Method of reducing the surface roughness of a semiconductor wafer Jul. 6, 2010
7727901 Preparation of group IV semiconductor nanoparticle materials and dispersions thereof Jun. 1, 2010
7666795 Method for manufacturing semiconductor device Feb. 23, 2010
7648864 Semiconductor structure including mixed rare earth oxide formed on silicon Jan. 19, 2010
7648853 Dual channel heterostructure Jan. 19, 2010
7642197 Method to improve performance of secondary active components in an esige CMOS technology Jan. 5, 2010
7635670 Chromium-free etching solution for si-substrates and uses therefor Dec. 22, 2009
7608548 Method for cleaning a multilayer substrate and method for bonding substrates and method for producing a bonded wafer Oct. 27, 2009
7579309 Methods for characterizing defects on silicon surfaces and etching composition and treatment process therefor Aug. 25, 2009
7572740 Methods for optimizing thin film formation with reactive gases Aug. 11, 2009
7569482 Method for the selective removal of an unsilicided metal Aug. 4, 2009
7569493 Nitride-based compound semiconductor, method of cleaning a compound semiconductor, method of producing the same, and substrate Aug. 4, 2009
7569913 Boron etch-stop layer and methods related thereto Aug. 4, 2009
7569490 Electrochemical etching Aug. 4, 2009
7569491 Method for enlarging a nano-structure Aug. 4, 2009
7566659 Method of forming fine pattern of semiconductor device using SiGe layer as sacrificial layer, and method of forming self-aligned contacts using the same Jul. 28, 2009
7544585 Structure of strained silicon on insulator and method of manufacturing the same Jun. 9, 2009

1 2 3 4

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