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Class Information
Number: 438/751
Name: Semiconductor device manufacturing: process > Chemical etching > Liquid phase etching > Sequential application of etchant > To same side of substrate > Each etch step exposes surface of an adjacent layer
Description: Processes wherein a layer on the semiconductor substrate previously covered by a different layer is exposed by each liquid phase etching step.










Patents under this class:
1 2 3 4

Patent Number Title Of Patent Date Issued
8603319 Methods and systems for removing materials from microfeature workpieces with organic and/or non-aqueous electrolytic media Dec. 10, 2013
8598664 Field effect transistor (FET) and method of forming the FET without damaging the wafer surface Dec. 3, 2013
8580599 Bypass diode for a solar cell Nov. 12, 2013
8513039 Method for fabricating semiconductor lighting chip Aug. 20, 2013
8486771 Methods of forming relaxed layers of semiconductor materials, semiconductor structures, devices and engineered substrates including same Jul. 16, 2013
8461056 Self-aligned wet etching process Jun. 11, 2013
8409996 Method of manufacturing a bulk acoustic wave device Apr. 2, 2013
8394653 Method for fabricating semiconductor lighting chip Mar. 12, 2013
8361816 Method of manufacturing vertical gallium nitride based light emitting diode Jan. 29, 2013
8303723 Liquid processing apparatus, liquid processing method, and storage medium Nov. 6, 2012
8232122 Method for fabricating light emitting diode chip Jul. 31, 2012
8202739 Dopant marker for precise recess control Jun. 19, 2012
8163655 Method for forming a sacrificial sandwich structure Apr. 24, 2012
8026613 Interconnections for flip-chip using lead-free solders and having reaction barrier layers Sep. 27, 2011
8012883 Stripping method Sep. 6, 2011
7964463 Method for fabricating semiconductor device including vertical channel transistor Jun. 21, 2011
7927959 Method of patterning a metal on a vertical sidewall of an excavated feature, method of forming an embedded MIM capacitor using same, and embedded memory device produced thereby Apr. 19, 2011
7855435 Integrated circuit, method of manufacturing an integrated circuit, and memory module Dec. 21, 2010
7794540 Method of manufacturing a semiconductor device Sep. 14, 2010
7786005 Method for manufacturing semiconductor device to form a via hole Aug. 31, 2010
7759165 Nanospring Jul. 20, 2010
7759257 Precision synthesis of quantum dot nanostructures for fluorescent and optoelectronic devices Jul. 20, 2010
7754558 Method of avoiding unwanted metal deposition on a semiconductor resistor structure Jul. 13, 2010
7709310 Semiconductor device with mushroom electrode and manufacture method thereof May. 4, 2010
7696102 Methods for fabrication of three-dimensional structures Apr. 13, 2010
7687408 Method for integrated circuit fabrication using pitch multiplication Mar. 30, 2010
7632696 Semiconductor chip with a porous single crystal layer and manufacturing method of the same Dec. 15, 2009
7629265 Cleaning method for use in semiconductor device fabrication Dec. 8, 2009
7629245 Method of forming non-volatile memory device Dec. 8, 2009
7618898 Method and apparatus for forming contact hole Nov. 17, 2009
7605006 Method of manufacturing a magnetic head Oct. 20, 2009
7579202 Method for fabricating light emitting diode element Aug. 25, 2009
7576011 Method of forming contact plug in semiconductor Aug. 18, 2009
7550758 Method for providing a nanoscale, high electron mobility transistor (HEMT) on insulator Jun. 23, 2009
7544520 Method for the application of a protective coating to a thermally stressed component Jun. 9, 2009
7528076 Method for manufacturing gate oxide layer with different thicknesses May. 5, 2009
7517710 Method of manufacturing field emission device Apr. 14, 2009
7517810 Reduced metal design rules for power devices Apr. 14, 2009
7465408 Solutions for controlled, selective etching of copper Dec. 16, 2008
7456113 Cleaning method and solution for cleaning a wafer in a single wafer process Nov. 25, 2008
7442652 Method for removing contamination and method for fabricating semiconductor device Oct. 28, 2008
7435683 Apparatus and method for selectively recessing spacers on multi-gate devices Oct. 14, 2008
7429534 Etching a nitride-based heterostructure Sep. 30, 2008
7410901 Submicron device fabrication Aug. 12, 2008
7371695 Use of TEOS oxides in integrated circuit fabrication processes May. 13, 2008
7344997 Semiconductor substrate, semiconductor device, method for manufacturing semiconductor substrate and method for manufacturing semiconductor device Mar. 18, 2008
7338908 Method for fabrication of semiconductor interconnect structure with reduced capacitance, leakage current, and improved breakdown voltage Mar. 4, 2008
7319076 Low resistance T-shaped ridge structure Jan. 15, 2008
7303933 Process of manufacturing a semiconductor device Dec. 4, 2007
7303995 Method for reducing dimensions between patterns on a photoresist Dec. 4, 2007

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