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Class Information
Number: 438/750
Name: Semiconductor device manufacturing: process > Chemical etching > Liquid phase etching > Sequential application of etchant > To same side of substrate
Description: Processes wherein the sequential liquid phase etching steps are carried out on the same major surface of the semiconductor substrate.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6984535 |
Selective etching of a protective layer to form a catalyst layer for an electron-emitting device |
Jan. 10, 2006 |
| 6979653 |
Semiconductor fabrication methods and apparatus |
Dec. 27, 2005 |
| 6979655 |
Substrate processing method and substrate processing apparatus |
Dec. 27, 2005 |
| 6974756 |
Methods of forming shallow trench isolation |
Dec. 13, 2005 |
| 6969684 |
Method of making a planarized semiconductor structure |
Nov. 29, 2005 |
| 6955994 |
Method of manufacturing semiconductor device and method of manufacturing optical wave guide |
Oct. 18, 2005 |
| 6903022 |
Method of forming contact hole |
Jun. 7, 2005 |
| 6875705 |
Method of high selectivity wet etching of salicides |
Apr. 5, 2005 |
| 6867148 |
Removal of organic material in integrated circuit fabrication using ozonated organic acid solutions |
Mar. 15, 2005 |
| 6864177 |
Method for manufacturing metal line contact plug of semiconductor device |
Mar. 8, 2005 |
| 6864152 |
Fabrication of trenches with multiple depths on the same substrate |
Mar. 8, 2005 |
| 6861369 |
Method of forming silicidation blocking layer |
Mar. 1, 2005 |
| 6852643 |
Method for using ammonium fluoride solution in a photoelectrochemical etching process of a silicon wafer |
Feb. 8, 2005 |
| 6853076 |
Copper-containing C4 ball-limiting metallurgy stack for enhanced reliability of packaged structures and method of making same |
Feb. 8, 2005 |
| 6852641 |
Method of spiking mixed acid liquid in reactor |
Feb. 8, 2005 |
| 6849924 |
Wide band cross point switch using MEMS technology |
Feb. 1, 2005 |
| 6841452 |
Method of forming device isolation trench |
Jan. 11, 2005 |
| 6828228 |
Methods for fabricating residue-free contact openings |
Dec. 7, 2004 |
| 6825128 |
Method for manufacturing semiconductor device |
Nov. 30, 2004 |
| 6825127 |
Micro-fluidic devices |
Nov. 30, 2004 |
| 6821892 |
Intelligent wet etching tool as a function of chemical concentration, temperature and film loss |
Nov. 23, 2004 |
| 6821908 |
In-situ method for producing a hydrogen terminated hydrophobic surface on a silicon wafer |
Nov. 23, 2004 |
| 6812156 |
Method to reduce residual particulate contamination in CVD and PVD semiconductor wafer manufacturing |
Nov. 2, 2004 |
| 6809039 |
Method for forming a silicide layer |
Oct. 26, 2004 |
| 6802322 |
Method of fabricating a stringerless flash memory |
Oct. 12, 2004 |
| 6803323 |
Method of forming a component overlying a semiconductor substrate |
Oct. 12, 2004 |
| 6797632 |
Bonded wafer producing method and bonded wafer |
Sep. 28, 2004 |
| 6790785 |
Metal-assisted chemical etch porous silicon formation method |
Sep. 14, 2004 |
| 6783694 |
Composition for selectively etching against cobalt silicide |
Aug. 31, 2004 |
| 6783695 |
Acid blend for removing etch residue |
Aug. 31, 2004 |
| 6762134 |
Metal-assisted chemical etch to produce porous group III-V materials |
Jul. 13, 2004 |
| 6756317 |
Method for making a microstructure by surface micromachining |
Jun. 29, 2004 |
| 6750153 |
Process for producing macroscopic cavities beneath the surface of a silicon wafer |
Jun. 15, 2004 |
| 6723656 |
Method and apparatus for etching a semiconductor die |
Apr. 20, 2004 |
| 6706642 |
Method for fabricating semiconductor capacitors |
Mar. 16, 2004 |
| 6703314 |
Method for fabricating semiconductor device |
Mar. 9, 2004 |
| 6703320 |
Successful and easy method to remove polysilicon film |
Mar. 9, 2004 |
| 6692976 |
Post-etch cleaning treatment |
Feb. 17, 2004 |
| 6693044 |
Semiconductor device and method of manufacturing the same |
Feb. 17, 2004 |
| 6677249 |
Method for manufacturing breakaway layers for detaching deposited layer systems |
Jan. 13, 2004 |
| 6673723 |
Circuit board and a method for making the same |
Jan. 6, 2004 |
| 6670277 |
Method of manufacturing semiconductor device |
Dec. 30, 2003 |
| 6664195 |
Method for forming damascene metal gate |
Dec. 16, 2003 |
| 6660652 |
Method for fabricating semiconductor device |
Dec. 9, 2003 |
| 6656851 |
Method for forming isolation film |
Dec. 2, 2003 |
| 6620738 |
Etchant and method for fabricating a semiconductor device using the same |
Sep. 16, 2003 |
| 6617085 |
Wet etch reduction of gate widths |
Sep. 9, 2003 |
| 6610610 |
Methods for selective removal of material from wafer alignment marks |
Aug. 26, 2003 |
| 6602795 |
System and method for analyzing a semiconductor surface |
Aug. 5, 2003 |
| 6596640 |
Method of forming a raised contact for a substrate |
Jul. 22, 2003 |
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