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Class Information
Number: 438/750
Name: Semiconductor device manufacturing: process > Chemical etching > Liquid phase etching > Sequential application of etchant > To same side of substrate
Description: Processes wherein the sequential liquid phase etching steps are carried out on the same major surface of the semiconductor substrate.










Sub-classes under this class:

Class Number Class Name Patents
438/751 Each etch step exposes surface of an adjacent layer 187


Patents under this class:
1 2 3 4 5 6 7

Patent Number Title Of Patent Date Issued
8703509 Method for manufacturing a substrate for liquid-ejecting heads and a liquid-ejecting head Apr. 22, 2014
8641913 Fine pitch microcontacts and method for forming thereof Feb. 4, 2014
8618000 Selective wet etching of hafnium aluminum oxide films Dec. 31, 2013
8609550 Methods for manufacturing integrated circuit devices having features with reduced edge curvature Dec. 17, 2013
8603837 High productivity combinatorial workflow for post gate etch clean development Dec. 10, 2013
8580126 Piezoelectric vibrating pieces comprising edge mesa steps, and methods for manufacturing same Nov. 12, 2013
8563441 Methods for fabricating memory cells having fin structures with smooth sidewalls and rounded top corners and edges Oct. 22, 2013
8530359 Modulated metal removal using localized wet etching Sep. 10, 2013
8435904 Methods of uniformly removing silicon oxide and an intermediate semiconductor device May. 7, 2013
8419953 Method and system for removing an antiferromagnetic seed structure Apr. 16, 2013
8398877 Method of forming openings in selected material Mar. 19, 2013
8389418 Solution for the selective removal of metal from aluminum substrates Mar. 5, 2013
8372757 Wet etching methods for copper removal and planarization in semiconductor processing Feb. 12, 2013
8318607 Immersion lithography wafer edge bead removal for wafer and scanner defect prevention Nov. 27, 2012
8303723 Liquid processing apparatus, liquid processing method, and storage medium Nov. 6, 2012
8293129 Method for manufacturing piezoelectric element Oct. 23, 2012
8288291 Method for removal of bulk metal contamination from III-V semiconductor substrates Oct. 16, 2012
8283257 Systems and methods for oscillating exposure of a semiconductor workpiece to multiple chemistries Oct. 9, 2012
8283258 Selective wet etching of hafnium aluminum oxide films Oct. 9, 2012
8236704 Etchant and array substrate having copper lines etched by the etchant Aug. 7, 2012
8222118 Wafer backside grinding with stress relief Jul. 17, 2012
8158465 Vertical coffee-stain method for forming self-organized line structures Apr. 17, 2012
8124535 Method of fabricating solar cell Feb. 28, 2012
8053371 Apparatus and methods for selective removal of material from wafer alignment marks Nov. 8, 2011
7993452 Method of manufacturing epitaxial silicon wafer Aug. 9, 2011
7943526 Process for the wet-chemical treatment of one side of silicon wafers May. 17, 2011
7935642 Replenishment method for an advanced coating removal stripping solution May. 3, 2011
7927498 Solar cell and method of texturing solar cell Apr. 19, 2011
7919415 Process of manufacturing a semiconductor device Apr. 5, 2011
7906437 System and method for the manufacture of surgical blades Mar. 15, 2011
7867916 Horizontal coffee-stain method using control structure to pattern self-organized line structures Jan. 11, 2011
7851375 Alkaline etchant for controlling surface roughness of semiconductor wafer Dec. 14, 2010
7829406 Method of manufacturing semiconductor device Nov. 9, 2010
7825028 Method of manufacturing semiconductor device Nov. 2, 2010
7776755 Solution for polymer and capping layer removing with wet dipping in HK metal gate etching process Aug. 17, 2010
7771790 Method and system for fabricating a nano-structure Aug. 10, 2010
7763516 Manufacturing method of semiconductor device having trench isolation Jul. 27, 2010
7732346 Wet cleaning process and method for fabricating semiconductor device using the same Jun. 8, 2010
7727900 Surface preparation for gate oxide formation that avoids chemical oxide formation Jun. 1, 2010
7705925 Method of manufacturing an array substrate for use in a LCD device Apr. 27, 2010
7700497 Methods for fabricating residue-free contact openings Apr. 20, 2010
7648915 Methods of forming semiconductor constructions, and methods of recessing materials within openings Jan. 19, 2010
7608548 Method for cleaning a multilayer substrate and method for bonding substrates and method for producing a bonded wafer Oct. 27, 2009
7601642 Method of processing silicon wafer Oct. 13, 2009
7569490 Electrochemical etching Aug. 4, 2009
7569491 Method for enlarging a nano-structure Aug. 4, 2009
7547642 Micro-structure manufacturing method Jun. 16, 2009
7541293 Method for manufacturing semiconductor device Jun. 2, 2009
7531045 Method for removing haze in a photo mask May. 12, 2009
7528076 Method for manufacturing gate oxide layer with different thicknesses May. 5, 2009

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