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Class Information
Number: 438/750
Name: Semiconductor device manufacturing: process > Chemical etching > Liquid phase etching > Sequential application of etchant > To same side of substrate
Description: Processes wherein the sequential liquid phase etching steps are carried out on the same major surface of the semiconductor substrate.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7608548 |
Method for cleaning a multilayer substrate and method for bonding substrates and method for producing a bonded wafer |
Oct. 27, 2009 |
| 7601642 |
Method of processing silicon wafer |
Oct. 13, 2009 |
| 7569490 |
Electrochemical etching |
Aug. 4, 2009 |
| 7569491 |
Method for enlarging a nano-structure |
Aug. 4, 2009 |
| 7547642 |
Micro-structure manufacturing method |
Jun. 16, 2009 |
| 7541293 |
Method for manufacturing semiconductor device |
Jun. 2, 2009 |
| 7531045 |
Method for removing haze in a photo mask |
May. 12, 2009 |
| 7528076 |
Method for manufacturing gate oxide layer with different thicknesses |
May. 5, 2009 |
| 7482177 |
Method for manufacturing optical device, and optical device wafer |
Jan. 27, 2009 |
| 7470631 |
Methods for fabricating residue-free contact openings |
Dec. 30, 2008 |
| 7465408 |
Solutions for controlled, selective etching of copper |
Dec. 16, 2008 |
| 7452819 |
Chemical mechanical polishing method of organic film and method of manufacturing semiconductor device |
Nov. 18, 2008 |
| 7446051 |
Method of etching silicon |
Nov. 4, 2008 |
| 7442652 |
Method for removing contamination and method for fabricating semiconductor device |
Oct. 28, 2008 |
| 7435689 |
Process for fabricating electron emitting device, electron source, and image display device |
Oct. 14, 2008 |
| 7432204 |
Wafer and the manufacturing and reclaiming methods thereof |
Oct. 7, 2008 |
| 7432214 |
Compositions for dissolution of low-k dielectric film, and methods of use |
Oct. 7, 2008 |
| 7429537 |
Methods and apparatus for rinsing and drying |
Sep. 30, 2008 |
| 7427544 |
Semiconductor device and method of manufacturing the same |
Sep. 23, 2008 |
| 7410908 |
Manufacturing method for a semiconductor device |
Aug. 12, 2008 |
| 7405139 |
Prevention of backside cracks in semiconductor chips or wafers using backside film or backside wet etch |
Jul. 29, 2008 |
| 7405163 |
Selectively accelerated plating of metal features |
Jul. 29, 2008 |
| 7405165 |
Dual-tank etch method for oxide thickness control |
Jul. 29, 2008 |
| 7399713 |
Selective treatment of microelectric workpiece surfaces |
Jul. 15, 2008 |
| 7396773 |
Method for cleaning a gate stack |
Jul. 8, 2008 |
| 7390754 |
Method of forming a silicide |
Jun. 24, 2008 |
| 7384799 |
Method to avoid amorphous-si damage during wet stripping processes in the manufacture of MEMS devices |
Jun. 10, 2008 |
| 7378353 |
High selectivity BPSG to TEOS etchant |
May. 27, 2008 |
| 7378354 |
Atomic layer deposition methods |
May. 27, 2008 |
| 7364666 |
Flexible circuits and method of making same |
Apr. 29, 2008 |
| 7354869 |
Substrate processing method, substrate processing apparatus, and semiconductor device manufacturing method |
Apr. 8, 2008 |
| 7354870 |
Process for chemical etching of parts fabricated by stereolithography |
Apr. 8, 2008 |
| 7344999 |
Method for cleaning substrate having exposed silicon and silicon germanium layers and related method for fabricating semiconductor device |
Mar. 18, 2008 |
| 7338908 |
Method for fabrication of semiconductor interconnect structure with reduced capacitance, leakage current, and improved breakdown voltage |
Mar. 4, 2008 |
| 7338911 |
Method for etching and for forming a contact hole using thereof |
Mar. 4, 2008 |
| 7332437 |
Method for processing semiconductor wafer and semiconductor wafer |
Feb. 19, 2008 |
| 7312159 |
Compositions for dissolution of low-k dielectric films, and methods of use |
Dec. 25, 2007 |
| 7303933 |
Process of manufacturing a semiconductor device |
Dec. 4, 2007 |
| 7291282 |
Method of fabricating a mold for imprinting a structure |
Nov. 6, 2007 |
| 7291283 |
Combined wet etching method for stacked films and wet etching system used for same |
Nov. 6, 2007 |
| 7288207 |
Etching liquid for controlling silicon wafer surface shape and method for manufacturing silicon wafer using the same |
Oct. 30, 2007 |
| 7276452 |
Method for removing mottled etch in semiconductor fabricating process |
Oct. 2, 2007 |
| 7259103 |
Fabrication method of polycrystalline silicon TFT |
Aug. 21, 2007 |
| 7247576 |
Method of manufacturing a semiconductor device |
Jul. 24, 2007 |
| 7241699 |
Wide bandgap semiconductor device construction |
Jul. 10, 2007 |
| 7238621 |
Integrated optical MEMS devices |
Jul. 3, 2007 |
| 7208325 |
Refreshing wafers having low-k dielectric materials |
Apr. 24, 2007 |
| 7205245 |
Method of forming trench isolation within a semiconductor substrate |
Apr. 17, 2007 |
| 7196018 |
Semiconductor etching paste and the use thereof for localized etching of semiconductor substrates |
Mar. 27, 2007 |
| 7192886 |
Method for using additives in the caustic etching of silicon for obtaining improved surface characteristics |
Mar. 20, 2007 |
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