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Class Information
Number: 438/749
Name: Semiconductor device manufacturing: process > Chemical etching > Liquid phase etching > Sequential application of etchant
Description: Processes wherein plural liquid phase etching steps are carried out on the semiconductor substrate in succession to one another.

Sub-classes under this class:

Class Number Class Name Patents
438/750 To same side of substrate 311

Patents under this class:
1 2 3 4 5

Patent Number Title Of Patent Date Issued
8703005 Methods for removing dielectric materials Apr. 22, 2014
8691703 Method of manufacturing semiconductor device Apr. 8, 2014
8632690 Method and apparatus for preventing native oxide regrowth Jan. 21, 2014
8623231 Method for etching an ultra thin film Jan. 7, 2014
8613864 Methods of forming semiconductor constructions Dec. 24, 2013
8609550 Methods for manufacturing integrated circuit devices having features with reduced edge curvature Dec. 17, 2013
8603837 High productivity combinatorial workflow for post gate etch clean development Dec. 10, 2013
8563429 Methods of forming a metal silicide layer for semiconductor devices Oct. 22, 2013
8551846 Methods for fabricating semiconductor devices Oct. 8, 2013
8492288 Methods of treating semiconductor substrates, methods of forming openings during semiconductor fabrication, and methods of removing particles from over semiconductor substrates Jul. 23, 2013
8461056 Self-aligned wet etching process Jun. 11, 2013
8455366 Use of an organic planarizing mask for cutting a plurality of gate lines Jun. 4, 2013
8435903 Semiconductor substrate surface treatment method May. 7, 2013
8420546 Manufacturing method of semiconductor device Apr. 16, 2013
8409893 Semiconductor light-emitting element, fabrication method thereof, convex part formed on backing, and convex part formation method for backing Apr. 2, 2013
8398877 Method of forming openings in selected material Mar. 19, 2013
8378385 Methods of preparing flexible photovoltaic devices using epitaxial liftoff, and preserving the integrity of growth substrates used in epitaxial growth Feb. 19, 2013
8377830 Method of manufacturing a semiconductor device and wet processing apparatus Feb. 19, 2013
8367556 Use of an organic planarizing mask for cutting a plurality of gate lines Feb. 5, 2013
8354348 Method for reprocessing semiconductor substrate, method for manufacturing reprocessed semiconductor substrate, and method for manufacturing SOI substrate Jan. 15, 2013
8338205 Method of fabricating and encapsulating MEMS devices Dec. 25, 2012
8303723 Liquid processing apparatus, liquid processing method, and storage medium Nov. 6, 2012
8283257 Systems and methods for oscillating exposure of a semiconductor workpiece to multiple chemistries Oct. 9, 2012
8278187 Method for reprocessing semiconductor substrate by stepwise etching with at least two etching treatments Oct. 2, 2012
8222160 Metal containing sacrifice material and method of damascene wiring formation Jul. 17, 2012
8221642 Methods for removing dielectric materials Jul. 17, 2012
8173462 Manufacturing method of nitride crystalline film, nitride film and substrate structure May. 8, 2012
8148271 Substrate processing apparatus, coolant gas supply nozzle and semiconductor device manufacturing method Apr. 3, 2012
8142669 Electromechanical element, electric circuit device and production method of those Mar. 27, 2012
8138002 Semiconductor light-emitting element, fabrication method thereof, convex part formed on backing, and convex part formation method for backing Mar. 20, 2012
8075702 Resist removing method and resist removing apparatus Dec. 13, 2011
8058181 Method for post-etch cleans Nov. 15, 2011
7998876 Method of producing semiconductor element Aug. 16, 2011
7943515 Shared masks for x-lines and shared masks for y-lines for fabrication of 3D memory arrays May. 17, 2011
7927498 Solar cell and method of texturing solar cell Apr. 19, 2011
7884027 Method of manufacturing semiconductor device Feb. 8, 2011
7879735 Cleaning solution for silicon surface and methods of fabricating semiconductor device using the same Feb. 1, 2011
7851370 Patterning method Dec. 14, 2010
7833905 Method of manufacturing a semiconductor integrated circuit device Nov. 16, 2010
7790625 Method for manufacturing semiconductor device Sep. 7, 2010
7776755 Solution for polymer and capping layer removing with wet dipping in HK metal gate etching process Aug. 17, 2010
7776756 Etching apparatus, a method of controlling an etching solution, and a method of manufacturing a semiconductor device Aug. 17, 2010
7749910 Method of reducing the surface roughness of a semiconductor wafer Jul. 6, 2010
7731801 Semiconductor wafer treatment method and apparatus therefor Jun. 8, 2010
7696098 Tuneable unipolar lasers Apr. 13, 2010
7687376 Method of manufacturing vertical gallium nitride-based light emitting diode Mar. 30, 2010
7651952 Aerodynamic shapes for wafer structures to reduce damage caused by cleaning processes Jan. 26, 2010
7595266 Method of manufacturing a semiconductor integrated circuit device Sep. 29, 2009
7591959 Etchants and etchant systems with plural etch selectivities Sep. 22, 2009
7569492 Method for post-etch cleans Aug. 4, 2009

1 2 3 4 5

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