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Class Information
Number: 438/749
Name: Semiconductor device manufacturing: process > Chemical etching > Liquid phase etching > Sequential application of etchant
Description: Processes wherein plural liquid phase etching steps are carried out on the semiconductor substrate in succession to one another.


Sub-classes under this class:

Class Number Class Name Patents
438/750 To same side of substrate 269


Patents under this class:
1 2 3 4

Patent Number Title Of Patent Date Issued
7595266 Method of manufacturing a semiconductor integrated circuit device Sep. 29, 2009
7591959 Etchants and etchant systems with plural etch selectivities Sep. 22, 2009
7569492 Method for post-etch cleans Aug. 4, 2009
7557042 Method for making a semiconductor device with reduced spacing Jul. 7, 2009
7550183 Method for manufacturing conductive element substrate, conductive element substrate, method for manufacturing liquid crystal display, liquid crystal display and electronic information equipmen Jun. 23, 2009
7541293 Method for manufacturing semiconductor device Jun. 2, 2009
7534728 Process for cleaning silicon substrate May. 19, 2009
7507616 Method of manufacturing a flexible thin film transistor array panel including plastic substrate Mar. 24, 2009
7456113 Cleaning method and solution for cleaning a wafer in a single wafer process Nov. 25, 2008
7431860 Etching process Oct. 7, 2008
7419914 Semiconductor device fabrication method Sep. 2, 2008
7405165 Dual-tank etch method for oxide thickness control Jul. 29, 2008
7390755 Methods for post etch cleans Jun. 24, 2008
7354869 Substrate processing method, substrate processing apparatus, and semiconductor device manufacturing method Apr. 8, 2008
7344999 Method for cleaning substrate having exposed silicon and silicon germanium layers and related method for fabricating semiconductor device Mar. 18, 2008
7323421 Silicon wafer etching process and composition Jan. 29, 2008
7319076 Low resistance T-shaped ridge structure Jan. 15, 2008
7303933 Process of manufacturing a semiconductor device Dec. 4, 2007
7291283 Combined wet etching method for stacked films and wet etching system used for same Nov. 6, 2007
7288206 High-purity alkali etching solution for silicon wafers and use thereof Oct. 30, 2007
7267127 Method for manufacturing electronic device Sep. 11, 2007
7256138 Method and composition for selectively etching against cobalt silicide Aug. 14, 2007
7205184 Method of crystallizing silicon film and method of manufacturing thin film transistor liquid crystal display Apr. 17, 2007
7205245 Method of forming trench isolation within a semiconductor substrate Apr. 17, 2007
7195927 Process for making magnetic memory structures having different-sized memory cell layers Mar. 27, 2007
7189628 Fabrication of trenches with multiple depths on the same substrate Mar. 13, 2007
7183226 Method of forming a trench for use in manufacturing a semiconductor device Feb. 27, 2007
7183575 High reverse voltage silicon carbide diode and method of manufacturing the same high reverse voltage silicon carbide diode Feb. 27, 2007
7172975 Process for the wet chemical treatment of semiconductor wafers Feb. 6, 2007
7160816 Method for fabricating semiconductor device Jan. 9, 2007
7148114 Process for patterning high-k dielectric material Dec. 12, 2006
7135414 Method for producing multicrystalline silicon substrate for solar cells Nov. 14, 2006
7119022 Manufacturing method of semiconductor device Oct. 10, 2006
7104267 Planarized copper cleaning for reduced defects Sep. 12, 2006
7105361 Method of etching a magnetic material Sep. 12, 2006
7037852 Composition for stripping photoresist and method of preparing the same May. 2, 2006
7030034 Methods of etching silicon nitride substantially selectively relative to an oxide of aluminum Apr. 18, 2006
7029965 Semiconductor device and manufacturing method thereof Apr. 18, 2006
7015134 Method for reducing anti-reflective coating layer removal during removal of photoresist Mar. 21, 2006
7015147 Fabrication of silicon-on-nothing (SON) MOSFET fabrication using selective etching of Si.sub.1-xGe.sub.x layer Mar. 21, 2006
7005384 Chemical mechanical polishing method, and washing/rinsing method associated therewith Feb. 28, 2006
6992017 Process for cleaning silicon surface and fabrication of thin film transistor by the process Jan. 31, 2006
6991991 Method for preventing to form a spacer undercut in SEG pre-clean process Jan. 31, 2006
6955988 Method of forming a cavity and SOI in a semiconductor substrate Oct. 18, 2005
6946369 Method for forming, by CVD, nanostructures of semi-conductor material of homogenous and controlled size on dielectric material Sep. 20, 2005
6938340 Method of forming a printhead using a silicon on insulator substrate Sep. 6, 2005
6924162 Process of manufacturing a semiconductor device Aug. 2, 2005
6864152 Fabrication of trenches with multiple depths on the same substrate Mar. 8, 2005
6835617 Methods of forming hemispherical grained silicon on a template on a semiconductor work object Dec. 28, 2004
6828228 Methods for fabricating residue-free contact openings Dec. 7, 2004

1 2 3 4


 
 
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