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Class Information
Number: 438/748
Name: Semiconductor device manufacturing: process > Chemical etching > Liquid phase etching > Projection of etchant against a moving substrate or controlling the angle or pattern of projected etchant
Description: Processes wherein the chemical etchant is sprayed upon the moving semiconductor substrate or sprayed upon the semiconductor substrate in a specific angle or pattern.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 5868898 |
Fluid dispensing device for wet chemical process tank and method of using |
Feb. 9, 1999 |
| 5866480 |
Method and apparatus for polishing semiconductor substrate |
Feb. 2, 1999 |
| 5851928 |
Method of etching a semiconductor substrate |
Dec. 22, 1998 |
| 5821170 |
Method for etching an insulating material |
Oct. 13, 1998 |
| 5780363 |
Etching composition and use thereof |
Jul. 14, 1998 |
| 5759427 |
Method and apparatus for polishing metal surfaces |
Jun. 2, 1998 |
| 5489557 |
Methods for processing semiconductors to reduce surface particles |
Feb. 6, 1996 |
| 5474641 |
Processing method and apparatus thereof |
Dec. 12, 1995 |
| 5468344 |
Method for manufacturing semiconductor devices |
Nov. 21, 1995 |
| 5403439 |
Method of producing same-sized particles |
Apr. 4, 1995 |
| 5279704 |
Method of fabricating semiconductor device |
Jan. 18, 1994 |
| 5185056 |
Method and apparatus for etching semiconductor wafers and developing resists |
Feb. 9, 1993 |
| 5181985 |
Process for the wet-chemical surface treatment of semiconductor wafers |
Jan. 26, 1993 |
| 5127984 |
Rapid wafer thinning process |
Jul. 7, 1992 |
| 5087323 |
Fine line pattern formation by aerosol centrifuge etching technique |
Feb. 11, 1992 |
| 5041229 |
Aerosol jet etching |
Aug. 20, 1991 |
| 5037506 |
Method of stripping layers of organic materials |
Aug. 6, 1991 |
| 5019205 |
Apparatus for wet etching of thin films |
May. 28, 1991 |
| 5001084 |
Method for applying a treatment liquid on a semiconductor wafer |
Mar. 19, 1991 |
| 4973379 |
Method of aerosol jet etching |
Nov. 27, 1990 |
| 4968375 |
Etching apparatus |
Nov. 6, 1990 |
| 4871417 |
Method and apparatus for surface treating of substrates |
Oct. 3, 1989 |
| 4778536 |
Sulfur trioxide vapor phase stripping |
Oct. 18, 1988 |
| 4732785 |
Edge bead removal process for spin on films |
Mar. 22, 1988 |
| 4600463 |
Treatment basin for semiconductor material |
Jul. 15, 1986 |
| 4384917 |
Jet etch method for decapsulation of molded devices |
May. 24, 1983 |
| 4350562 |
Method for etching semiconductor wafers on one side |
Sep. 21, 1982 |
| 4142893 |
Spray etch dicing method |
Mar. 6, 1979 |
| 4086126 |
Production of high radiance light emitting diodes |
Apr. 25, 1978 |
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