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Class Information
Number: 438/748
Name: Semiconductor device manufacturing: process > Chemical etching > Liquid phase etching > Projection of etchant against a moving substrate or controlling the angle or pattern of projected etchant
Description: Processes wherein the chemical etchant is sprayed upon the moving semiconductor substrate or sprayed upon the semiconductor substrate in a specific angle or pattern.

Patents under this class:
1 2 3 4

Patent Number Title Of Patent Date Issued
8636915 Liquid processing apparatus and liquid processing method Jan. 28, 2014
8618001 Lifting-off method and method for manufacturing TFT array substrate Dec. 31, 2013
8596623 Device and process for liquid treatment of a wafer shaped article Dec. 3, 2013
8530359 Modulated metal removal using localized wet etching Sep. 10, 2013
8529707 Liquid processing apparatus, liquid processing method, and storage medium having computer program recorded therein Sep. 10, 2013
8507387 Methods of removing noble metal-containing nanoparticles Aug. 13, 2013
8466071 Method for etching single wafer Jun. 18, 2013
8420550 Method for cleaning backside etch during manufacture of integrated circuits Apr. 16, 2013
8419964 Apparatus and method for edge bevel removal of copper from silicon wafers Apr. 16, 2013
8394721 Method for obtaining a layout design for an existing integrated circuit Mar. 12, 2013
8384225 Through silicon via with improved reliability Feb. 26, 2013
8318607 Immersion lithography wafer edge bead removal for wafer and scanner defect prevention Nov. 27, 2012
8303723 Liquid processing apparatus, liquid processing method, and storage medium Nov. 6, 2012
8283199 Solar cell patterning and metallization Oct. 9, 2012
8257605 Apparatus and method for removing coating film Sep. 4, 2012
8252638 Method for forming under a thin layer of a first material portions of another material and/or empty areas Aug. 28, 2012
8148271 Substrate processing apparatus, coolant gas supply nozzle and semiconductor device manufacturing method Apr. 3, 2012
8026175 Cleaning apparatus of semiconductor substrate and method of manufacturing semiconductor device Sep. 27, 2011
8007594 Method for manufacturing semiconductor device Aug. 30, 2011
7998876 Method of producing semiconductor element Aug. 16, 2011
7972969 Method and apparatus for thinning a substrate Jul. 5, 2011
7887636 Substrate dryer and a drying method Feb. 15, 2011
7884028 Method of removing material layer and remnant metal Feb. 8, 2011
7833912 Semiconductor device and method of manufacturing the same Nov. 16, 2010
7776709 Cut-and-paste imprint lithographic mold and method therefor Aug. 17, 2010
7759252 Method of two-step backside etching Jul. 20, 2010
7745237 Pattern forming method and pattern forming system Jun. 29, 2010
7655496 Metal lift-off systems and methods using liquid solvent and frozen gas Feb. 2, 2010
7566652 Electrically inactive via for electromigration reliability improvement Jul. 28, 2009
7541293 Method for manufacturing semiconductor device Jun. 2, 2009
7476554 Substrate processing method Jan. 13, 2009
7470622 Fabrication and use of polished silicon micro-mirrors Dec. 30, 2008
7446051 Method of etching silicon Nov. 4, 2008
7431861 Etchant, replenishment solution and method for producing copper wiring using the same Oct. 7, 2008
7405139 Prevention of backside cracks in semiconductor chips or wafers using backside film or backside wet etch Jul. 29, 2008
7396483 Uniform chemical etching method Jul. 8, 2008
7387455 Substrate processing device, substrate processing method, and developing device Jun. 17, 2008
7354869 Substrate processing method, substrate processing apparatus, and semiconductor device manufacturing method Apr. 8, 2008
7351642 Deglaze route to compensate for film non-uniformities after STI oxide processing Apr. 1, 2008
7344955 Cut-and-paste imprint lithographic mold and method therefor Mar. 18, 2008
7338909 Micro-etching method to replicate alignment marks for semiconductor wafer photolithography Mar. 4, 2008
7312160 Removing solution, cleaning method for semiconductor substrate, and process for production of semiconductor device Dec. 25, 2007
7276449 Gas assisted method for applying resist stripper and gas-resist stripper combinations Oct. 2, 2007
7186577 Method for monitoring a density profile of impurities Mar. 6, 2007
7179753 Process for planarizing substrates of semiconductor technology Feb. 20, 2007
7160808 Chuck for supporting wafers with a fluid Jan. 9, 2007
7151058 Etchant for etching nitride and method for removing a nitride layer using the same Dec. 19, 2006
7129174 Methods of fabricating a semiconductor substrate for reducing wafer warpage Oct. 31, 2006
7119026 Basic material for patterning and patterning method Oct. 10, 2006
7119027 Method for manufacturing display device that includes supplying solution to the underside of a glass substrate Oct. 10, 2006

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