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Class Information
Number: 438/748
Name: Semiconductor device manufacturing: process > Chemical etching > Liquid phase etching > Projection of etchant against a moving substrate or controlling the angle or pattern of projected etchant
Description: Processes wherein the chemical etchant is sprayed upon the moving semiconductor substrate or sprayed upon the semiconductor substrate in a specific angle or pattern.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7354869 |
Substrate processing method, substrate processing apparatus, and semiconductor device manufacturing method |
Apr. 8, 2008 |
| 7351642 |
Deglaze route to compensate for film non-uniformities after STI oxide processing |
Apr. 1, 2008 |
| 7344955 |
Cut-and-paste imprint lithographic mold and method therefor |
Mar. 18, 2008 |
| 7338909 |
Micro-etching method to replicate alignment marks for semiconductor wafer photolithography |
Mar. 4, 2008 |
| 7312160 |
Removing solution, cleaning method for semiconductor substrate, and process for production of semiconductor device |
Dec. 25, 2007 |
| 7276449 |
Gas assisted method for applying resist stripper and gas-resist stripper combinations |
Oct. 2, 2007 |
| 7186577 |
Method for monitoring a density profile of impurities |
Mar. 6, 2007 |
| 7179753 |
Process for planarizing substrates of semiconductor technology |
Feb. 20, 2007 |
| 7160808 |
Chuck for supporting wafers with a fluid |
Jan. 9, 2007 |
| 7151058 |
Etchant for etching nitride and method for removing a nitride layer using the same |
Dec. 19, 2006 |
| 7129174 |
Methods of fabricating a semiconductor substrate for reducing wafer warpage |
Oct. 31, 2006 |
| 7119026 |
Basic material for patterning and patterning method |
Oct. 10, 2006 |
| 7119027 |
Method for manufacturing display device that includes supplying solution to the underside of a glass substrate |
Oct. 10, 2006 |
| 7022610 |
Wet cleaning method to eliminate copper corrosion |
Apr. 4, 2006 |
| 7008877 |
Etching of chromium layers on photomasks utilizing high density plasma and low frequency RF bias |
Mar. 7, 2006 |
| 7001086 |
Developing method, substrate treating method, and substrate treating apparatus |
Feb. 21, 2006 |
| 6992014 |
Method and apparatus for etch rate uniformity control |
Jan. 31, 2006 |
| 6969688 |
Wet etchant composition and method for etching HfO2 and ZrO2 |
Nov. 29, 2005 |
| 6967174 |
Wafer chuck for use in edge bevel removal of copper from silicon wafers |
Nov. 22, 2005 |
| 6955994 |
Method of manufacturing semiconductor device and method of manufacturing optical wave guide |
Oct. 18, 2005 |
| 6927164 |
Method of fabricating semiconductor device and semiconductor device |
Aug. 9, 2005 |
| 6861359 |
Process for semiconductor apparatus including forming an insulator and a semiconductor film on the backside of the wafer and removing the semiconductor film from the backside |
Mar. 1, 2005 |
| 6855640 |
Apparatus and process for bulk wet etch with leakage protection |
Feb. 15, 2005 |
| 6828196 |
Trench filling process for preventing formation of voids in trench |
Dec. 7, 2004 |
| 6821892 |
Intelligent wet etching tool as a function of chemical concentration, temperature and film loss |
Nov. 23, 2004 |
| 6815371 |
Edge bead removal for spin-on materials containing low volatility solvents using carbon dioxide cleaning |
Nov. 9, 2004 |
| 6806209 |
Develop processing method of a resist surface on a substrate for reduced processing time and reduced defect density |
Oct. 19, 2004 |
| 6806205 |
Stiction-free microstructure releasing method for fabricating MEMS device |
Oct. 19, 2004 |
| 6803323 |
Method of forming a component overlying a semiconductor substrate |
Oct. 12, 2004 |
| 6794270 |
Method for shallow trench isolation fabrication and partial oxide layer removal |
Sep. 21, 2004 |
| 6794291 |
Reactor for processing a semiconductor wafer |
Sep. 21, 2004 |
| 6790786 |
Etching processes for integrated circuit manufacturing including methods of forming capacitors |
Sep. 14, 2004 |
| 6780780 |
Method for removing Si-needles of wafer |
Aug. 24, 2004 |
| 6767841 |
Process for producing a semiconductor wafer |
Jul. 27, 2004 |
| 6746615 |
Methods of achieving selective etching |
Jun. 8, 2004 |
| 6743722 |
Method of spin etching wafers with an alkali solution |
Jun. 1, 2004 |
| 6723656 |
Method and apparatus for etching a semiconductor die |
Apr. 20, 2004 |
| 6720263 |
Planarization of metal layers on a semiconductor wafer through non-contact de-plating and control with endpoint detection |
Apr. 13, 2004 |
| 6709531 |
Chemical liquid processing apparatus for processing a substrate and the method thereof |
Mar. 23, 2004 |
| 6686297 |
Method of manufacturing a semiconductor device and apparatus to be used therefore |
Feb. 3, 2004 |
| 6683009 |
Method for local etching |
Jan. 27, 2004 |
| 6680123 |
Embedding resin |
Jan. 20, 2004 |
| 6649077 |
Method and apparatus for removing coating layers from alignment marks on a wafer |
Nov. 18, 2003 |
| 6645874 |
Delivery of dissolved ozone |
Nov. 11, 2003 |
| 6624087 |
Etchant for patterning indium tin oxide and method of fabricating liquid crystal display device using the same |
Sep. 23, 2003 |
| 6589882 |
Copper post-etch cleaning process |
Jul. 8, 2003 |
| 6589855 |
Methods of processing semiconductor wafer and producing IC card, and carrier |
Jul. 8, 2003 |
| 6586342 |
Edge bevel removal of copper from silicon wafers |
Jul. 1, 2003 |
| 6579382 |
Chemical liquid processing apparatus for processing a substrate and the method thereof |
Jun. 17, 2003 |
| 6579810 |
Method of removing a photoresist layer on a semiconductor wafer |
Jun. 17, 2003 |
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