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Class Information
Number: 438/747
Name: Semiconductor device manufacturing: process > Chemical etching > Liquid phase etching > With relative movement between substrate and confined pool of etchant
Description: Processes including the step of causing a relative motion between the semiconductor substrate being etched and the liquid phase etchant which is confined by a container.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 5945347 |
Apparatus and method for polishing a semiconductor wafer in an overhanging position |
Aug. 31, 1999 |
| 5942449 |
Method for removing an upper layer of material from a semiconductor wafer |
Aug. 24, 1999 |
| 5942450 |
Method of fabricating semiconductor device |
Aug. 24, 1999 |
| 5914281 |
Apparatus for etching wafer |
Jun. 22, 1999 |
| 5911889 |
Method of removing damaged crystal regions from silicon wafers |
Jun. 15, 1999 |
| 5904572 |
Wet etching station and a wet etching method adapted for utilizing the same |
May. 18, 1999 |
| 5899743 |
Method for fabricating semiconductor wafers |
May. 4, 1999 |
| 5883011 |
Method of removing an inorganic antireflective coating from a semiconductor substrate |
Mar. 16, 1999 |
| 5874365 |
Semiconductor wafer etching method |
Feb. 23, 1999 |
| 5866480 |
Method and apparatus for polishing semiconductor substrate |
Feb. 2, 1999 |
| 5855811 |
Cleaning composition containing tetraalkylammonium salt and use thereof in semiconductor fabrication |
Jan. 5, 1999 |
| 5851924 |
Method for fabricating semiconductor wafers |
Dec. 22, 1998 |
| 5849636 |
Method for fabricating a semiconductor wafer |
Dec. 15, 1998 |
| 5846374 |
Gas agitated liquid etcher |
Dec. 8, 1998 |
| 5840199 |
Method for purging a multi-layer sacrificial etched silicon substrate |
Nov. 24, 1998 |
| 5783497 |
Forced-flow wafer polisher |
Jul. 21, 1998 |
| 5736427 |
Polishing pad contour indicator for mechanical or chemical-mechanical planarization |
Apr. 7, 1998 |
| 5710069 |
Measuring slurry particle size during substrate polishing |
Jan. 20, 1998 |
| 5700379 |
Method for drying micromechanical components |
Dec. 23, 1997 |
| 5645675 |
Selective planarization apparatus |
Jul. 8, 1997 |
| 5593538 |
Method for etching a dielectric layer on a semiconductor |
Jan. 14, 1997 |
| 5516399 |
Contactless real-time in-situ monitoring of a chemical etching |
May. 14, 1996 |
| 5500081 |
Dynamic semiconductor wafer processing using homogeneous chemical vapors |
Mar. 19, 1996 |
| 5489361 |
Measuring film etching uniformity during a chemical etching process |
Feb. 6, 1996 |
| 5474644 |
Method and apparatus for high-flatness etching of wafer |
Dec. 12, 1995 |
| 5468338 |
Methods for selectively wet etching substrates |
Nov. 21, 1995 |
| 5445706 |
Wet treatment adapted for mirror etching ZnSe |
Aug. 29, 1995 |
| 5437733 |
Method and apparatus for treating a substrate |
Aug. 1, 1995 |
| 5374325 |
Liquid agitation and purification system |
Dec. 20, 1994 |
| 5340437 |
Process and apparatus for etching semiconductor wafers |
Aug. 23, 1994 |
| 5282923 |
Liquid agitation and purification system |
Feb. 1, 1994 |
| 4943540 |
Method for selectively wet etching aluminum gallium arsenide |
Jul. 24, 1990 |
| 4840701 |
Etching apparatus and method |
Jun. 20, 1989 |
| 4734151 |
Non-contact polishing of semiconductor materials |
Mar. 29, 1988 |
| 4417945 |
Apparatus for chemical etching of a wafer material |
Nov. 29, 1983 |
| 4339297 |
Apparatus for etching of oxide film on semiconductor wafer |
Jul. 13, 1982 |
| 4323422 |
Method for preparing optically flat damage-free surfaces |
Apr. 6, 1982 |
| 4251317 |
Method of preventing etch masking during wafer etching |
Feb. 17, 1981 |
| 4021278 |
Reduced meniscus-contained method of handling fluids in the manufacture of semiconductor wafers |
May. 3, 1977 |
| 3977926 |
Methods for treating articles |
Aug. 31, 1976 |
| 3953265 |
Meniscus-contained method of handling fluids in the manufacture of semiconductor wafers |
Apr. 27, 1976 |
| 3951728 |
Method of treating semiconductor wafers |
Apr. 20, 1976 |
| 3930914 |
THINNING SEMICONDUCTIVE SUBSTRATES |
Jan. 6, 1976 |
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