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Class Information
Number: 438/747
Name: Semiconductor device manufacturing: process > Chemical etching > Liquid phase etching > With relative movement between substrate and confined pool of etchant
Description: Processes including the step of causing a relative motion between the semiconductor substrate being etched and the liquid phase etchant which is confined by a container.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 8685864 |
Method and device for treating a substrate surface of a substrate |
Apr. 1, 2014 |
| 8563440 |
Method for chemically treating a substrate |
Oct. 22, 2013 |
| 8530359 |
Modulated metal removal using localized wet etching |
Sep. 10, 2013 |
| 8513140 |
Post-dry etching cleaning liquid composition and process for fabricating semiconductor device |
Aug. 20, 2013 |
| 8481432 |
Fabrication of semiconductor interconnect structure |
Jul. 9, 2013 |
| 8466071 |
Method for etching single wafer |
Jun. 18, 2013 |
| 8435903 |
Semiconductor substrate surface treatment method |
May. 7, 2013 |
| 8309471 |
Method of manufacturing semiconductor device |
Nov. 13, 2012 |
| 8159050 |
Single crystal silicon structures |
Apr. 17, 2012 |
| 8145342 |
Methods and systems for adjusting operation of a wafer grinder using feedback from warp data |
Mar. 27, 2012 |
| 8053371 |
Apparatus and methods for selective removal of material from wafer alignment marks |
Nov. 8, 2011 |
| 8043974 |
Semiconductor wet etchant and method of forming interconnection structure using the same |
Oct. 25, 2011 |
| 7981807 |
Manufacturing method of semiconductor device with smoothing |
Jul. 19, 2011 |
| 7976637 |
Substrate processing system, substrate surface processing apparatus, substrate surface inspecting apparatus, substrate surface inspecting method, and storage medium storing program for impleme |
Jul. 12, 2011 |
| 7943526 |
Process for the wet-chemical treatment of one side of silicon wafers |
May. 17, 2011 |
| 7906438 |
Single wafer etching method |
Mar. 15, 2011 |
| 7887636 |
Substrate dryer and a drying method |
Feb. 15, 2011 |
| 7743783 |
Method and apparatus for recycling process fluids |
Jun. 29, 2010 |
| 7709341 |
Methods of shaping vertical single crystal silicon walls and resulting structures |
May. 4, 2010 |
| 7691207 |
Method for cleaning disk-shape glass substrate and magnetic disk |
Apr. 6, 2010 |
| 7601642 |
Method of processing silicon wafer |
Oct. 13, 2009 |
| 7592201 |
Adjustments of masks by re-flow |
Sep. 22, 2009 |
| 7566644 |
Method for forming gate electrode of semiconductor device |
Jul. 28, 2009 |
| 7563717 |
Method for fabricating a semiconductor device |
Jul. 21, 2009 |
| 7521374 |
Method and apparatus for cleaning semiconductor substrates |
Apr. 21, 2009 |
| 7521373 |
Compositions for dissolution of low-k dielectric films, and methods of use |
Apr. 21, 2009 |
| 7476554 |
Substrate processing method |
Jan. 13, 2009 |
| 7470622 |
Fabrication and use of polished silicon micro-mirrors |
Dec. 30, 2008 |
| 7468325 |
Method of cleaning silicon nitride layer |
Dec. 23, 2008 |
| 7456113 |
Cleaning method and solution for cleaning a wafer in a single wafer process |
Nov. 25, 2008 |
| 7432214 |
Compositions for dissolution of low-k dielectric film, and methods of use |
Oct. 7, 2008 |
| 7396773 |
Method for cleaning a gate stack |
Jul. 8, 2008 |
| 7371694 |
Semiconductor device fabrication method and fabrication apparatus |
May. 13, 2008 |
| 7371693 |
Manufacturing method of semiconductor device with chamfering |
May. 13, 2008 |
| 7354530 |
Chemical mechanical polishing systems and methods for their use |
Apr. 8, 2008 |
| 7354869 |
Substrate processing method, substrate processing apparatus, and semiconductor device manufacturing method |
Apr. 8, 2008 |
| 7341065 |
Single wafer cleaning method to reduce particle defects on a wafer surface |
Mar. 11, 2008 |
| 7332437 |
Method for processing semiconductor wafer and semiconductor wafer |
Feb. 19, 2008 |
| 7312159 |
Compositions for dissolution of low-k dielectric films, and methods of use |
Dec. 25, 2007 |
| 7307026 |
Method of forming an epitaxial layer for raised drain and source regions by removing contaminations |
Dec. 11, 2007 |
| 7291283 |
Combined wet etching method for stacked films and wet etching system used for same |
Nov. 6, 2007 |
| 7288207 |
Etching liquid for controlling silicon wafer surface shape and method for manufacturing silicon wafer using the same |
Oct. 30, 2007 |
| 7235141 |
Lift-off method and chemical liquid tank |
Jun. 26, 2007 |
| 7205245 |
Method of forming trench isolation within a semiconductor substrate |
Apr. 17, 2007 |
| 7179693 |
Method for manufacturing thin film device that includes a chemical etchant process |
Feb. 20, 2007 |
| 7172708 |
Process for the fabrication of thin-film device and thin-film device |
Feb. 6, 2007 |
| 7104267 |
Planarized copper cleaning for reduced defects |
Sep. 12, 2006 |
| 7030034 |
Methods of etching silicon nitride substantially selectively relative to an oxide of aluminum |
Apr. 18, 2006 |
| 7026255 |
Method and device for photo-electrochemically etching a semiconductor sample, especially gallium nitride |
Apr. 11, 2006 |
| 7018939 |
Micellar technology for post-etch residues |
Mar. 28, 2006 |
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