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Class Information
Number: 438/746
Name: Semiconductor device manufacturing: process > Chemical etching > Liquid phase etching > Utilizing electromagnetic or wave energy
Description: Processes wherein the liquid phase etching is conducted using irradiation of electromagnetic or wave energy.

Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8637409 Etching method, method for manufacturing semiconductor device, and etching device Jan. 28, 2014
8524610 Process for enhancing solubility and reaction rates in supercritical fluids Sep. 3, 2013
8384089 Nitride semiconductor device and method of manufacturing the same Feb. 26, 2013
8344300 Device to reduce shadowing during radiative heating of a substrate Jan. 1, 2013
8329595 Process for enhancing solubility and reaction rates in supercritical fluids Dec. 11, 2012
8216384 Combinatorial approach to the development of cleaning formulations for wet removal of high dose implant photoresist Jul. 10, 2012
8159050 Single crystal silicon structures Apr. 17, 2012
8153019 Methods for substantially equalizing rates at which material is removed over an area of a structure or film that includes recesses or crevices Apr. 10, 2012
8053264 Photoelectrochemical etching of P-type semiconductor heterostructures Nov. 8, 2011
7993936 System and method for controlling an electrochemical etch process Aug. 9, 2011
7985700 Composition for forming insulating film and method for fabricating semiconductor device Jul. 26, 2011
7951725 Manufacturing method of translucent solar cell May. 31, 2011
7935266 Wet etching method using ultraviolet-light and method of manufacturing semiconductor device May. 3, 2011
7887636 Substrate dryer and a drying method Feb. 15, 2011
7883951 CMOS device with metal and silicide gate electrodes and a method for making it Feb. 8, 2011
7776756 Etching apparatus, a method of controlling an etching solution, and a method of manufacturing a semiconductor device Aug. 17, 2010
7776757 Method of fabricating high-k metal gate devices Aug. 17, 2010
7732351 Manufacturing method of semiconductor device and laser processing apparatus Jun. 8, 2010
7709341 Methods of shaping vertical single crystal silicon walls and resulting structures May. 4, 2010
7691207 Method for cleaning disk-shape glass substrate and magnetic disk Apr. 6, 2010
7598181 Process for enhancing solubility and reaction rates in supercritical fluids Oct. 6, 2009
7563717 Method for fabricating a semiconductor device Jul. 21, 2009
7550395 Control of photoelectrochemical (PEC) etching by modification of the local electrochemical potential of the semiconductor structure relative to the electrolyte Jun. 23, 2009
7538042 Method of manufacturing a structure having a projection May. 26, 2009
7452478 Method for converting and purifying materials for modifying surfaces of semiconductor nanoparticles Nov. 18, 2008
7410814 Process and apparatus for cleaning silicon wafers Aug. 12, 2008
7410909 Method of removing ion implanted photoresist Aug. 12, 2008
7375017 Method for fabricating semiconductor device having stacked-gate structure May. 20, 2008
7307026 Method of forming an epitaxial layer for raised drain and source regions by removing contaminations Dec. 11, 2007
7247577 Insulated pad conditioner and method of using same Jul. 24, 2007
7129160 Method for simultaneously removing multiple conductive materials from microelectronic substrates Oct. 31, 2006
7064082 Methods for forming pin alloy-semiconductor devices with rectifying junction contacts Jun. 20, 2006
7049235 Method of manufacturing semiconductor device May. 23, 2006
7026255 Method and device for photo-electrochemically etching a semiconductor sample, especially gallium nitride Apr. 11, 2006
7018936 Ion implant lithography method of processing a semiconductor substrate Mar. 28, 2006
7018938 Controlled use of photochemically susceptible chemistries for etching, cleaning and surface conditioning Mar. 28, 2006
6989312 Method for fabricating semiconductor optical device Jan. 24, 2006
6943124 Two step exposure to strengthen structure of polyimide or negative tone photosensitive material Sep. 13, 2005
6914008 Structure having pores and its manufacturing method Jul. 5, 2005
6897161 Method of cleaning component in plasma processing chamber and method of producing semiconductor devices May. 24, 2005
6878634 Structure having recesses and projections, method of manufacturing structure, and functional device Apr. 12, 2005
6869889 Etching metal carbide films Mar. 22, 2005
6863769 Configuration and method for making contact with the back surface of a semiconductor substrate Mar. 8, 2005
6852643 Method for using ammonium fluoride solution in a photoelectrochemical etching process of a silicon wafer Feb. 8, 2005
6849859 Fabrication of precision optics using an imbedded reference surface Feb. 1, 2005
6835319 Method of patterning a substrate Dec. 28, 2004
6784007 Nano-structures, process for preparing nano-structures and devices Aug. 31, 2004
6770568 Selective etching using sonication Aug. 3, 2004
6589882 Copper post-etch cleaning process Jul. 8, 2003

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