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Class Information
Number: 438/745
Name: Semiconductor device manufacturing: process > Chemical etching > Liquid phase etching
Description: Processes wherein the chemical etchant is in a liquid state when brought into contact with the semiconductive substrate.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6783694 |
Composition for selectively etching against cobalt silicide |
Aug. 31, 2004 |
| 6783695 |
Acid blend for removing etch residue |
Aug. 31, 2004 |
| 6784084 |
Method for fabricating semiconductor device capable of reducing seam generations |
Aug. 31, 2004 |
| 6779247 |
Method of producing suspended elements for electrical connection between two portions of a micromechanism which can move relative to one another |
Aug. 24, 2004 |
| 6780739 |
Bit line contact structure and method for forming the same |
Aug. 24, 2004 |
| 6780751 |
Method for eliminating voiding in plated solder |
Aug. 24, 2004 |
| 6780776 |
Nitride offset spacer to minimize silicon recess by using poly reoxidation layer as etch stop layer |
Aug. 24, 2004 |
| 6780780 |
Method for removing Si-needles of wafer |
Aug. 24, 2004 |
| 6780783 |
Method of wet etching low dielectric constant materials |
Aug. 24, 2004 |
| 6780784 |
Etchant and array substrate having copper lines etched by the etchant |
Aug. 24, 2004 |
| 6780785 |
Self-aligned structure with unique erasing gate in split gate flash |
Aug. 24, 2004 |
| 6780786 |
Method for producing a porous silicon film |
Aug. 24, 2004 |
| 6776919 |
Method and apparatus for etching ruthenium films |
Aug. 17, 2004 |
| 6777299 |
Method for removal of a spacer |
Aug. 17, 2004 |
| 6777334 |
Method for protecting a wafer backside from etching damage |
Aug. 17, 2004 |
| 6774047 |
Method of manufacturing a semiconductor integrated circuit device |
Aug. 10, 2004 |
| 6770564 |
Method of etching metallic thin film on thin film resistor |
Aug. 3, 2004 |
| 6770565 |
System for planarizing metal conductive layers |
Aug. 3, 2004 |
| 6767751 |
Integrated driver process flow |
Jul. 27, 2004 |
| 6767840 |
Wafer processing apparatus, wafer processing method, and semiconductor substrate fabrication method |
Jul. 27, 2004 |
| 6767841 |
Process for producing a semiconductor wafer |
Jul. 27, 2004 |
| 6762132 |
Compositions for dissolution of low-K dielectric films, and methods of use |
Jul. 13, 2004 |
| 6762133 |
System and method for control of hardmask etch to prevent pattern collapse of ultra-thin resists |
Jul. 13, 2004 |
| 6762134 |
Metal-assisted chemical etch to produce porous group III-V materials |
Jul. 13, 2004 |
| 6759343 |
Method and composition for selectively etching against cobalt silicide |
Jul. 6, 2004 |
| 6755989 |
Aqueous cleaning composition containing copper-specific corrosion inhibitor for cleaning inorganic residues on semiconductor substrate |
Jun. 29, 2004 |
| 6756284 |
Method for forming a sublithographic opening in a semiconductor process |
Jun. 29, 2004 |
| 6756316 |
Semiconductor pressure transducer structures and methods for making the same |
Jun. 29, 2004 |
| 6756317 |
Method for making a microstructure by surface micromachining |
Jun. 29, 2004 |
| 6753237 |
Method of shallow trench isolation fill-in without generation of void |
Jun. 22, 2004 |
| 6750148 |
Method of manufacturing wireless suspension blank |
Jun. 15, 2004 |
| 6750153 |
Process for producing macroscopic cavities beneath the surface of a silicon wafer |
Jun. 15, 2004 |
| 6750154 |
Gas assisted method for applying resist stripper and gas-resist stripper combinations |
Jun. 15, 2004 |
| 6746621 |
Micro-etching composition for copper or copper alloy, micro-etching method, and method for manufacturing printed circuit board |
Jun. 8, 2004 |
| 6746959 |
Liquid crystal display and method |
Jun. 8, 2004 |
| 6746963 |
Method for processing coating film and method for manufacturing semiconductor element with use of the same method |
Jun. 8, 2004 |
| 6743697 |
Thin silicon circuits and method for making the same |
Jun. 1, 2004 |
| 6740252 |
Ruthenium silicide wet etch |
May. 25, 2004 |
| 6740411 |
Embedding resin, wiring substrate using same and process for producing wiring substrate using same |
May. 25, 2004 |
| 6740595 |
Etch process for recessing polysilicon in trench structures |
May. 25, 2004 |
| 6737334 |
Method of fabricating a shallow trench isolation structure |
May. 18, 2004 |
| 6737356 |
Method of fabricating a semiconductor work object |
May. 18, 2004 |
| 6737359 |
Method of forming a shallow trench isolation using a sion anti-reflective coating which eliminates water spot defects |
May. 18, 2004 |
| 6737360 |
Controlled potential anodic etching process for the selective removal of conductive thin films |
May. 18, 2004 |
| 6734112 |
Divided pressure vessel apparatus for carbon dioxide based systems and methods of using same |
May. 11, 2004 |
| 6730239 |
Cleaning agent for semiconductor device & method of fabricating semiconductor device |
May. 4, 2004 |
| 6730602 |
Method for forming aluminum bumps by sputtering and chemical mechanical polishing |
May. 4, 2004 |
| 6730605 |
Redistribution of copper deposited films |
May. 4, 2004 |
| 6730612 |
Spray member and method for using the same |
May. 4, 2004 |
| 6726848 |
Apparatus and method for single substrate processing |
Apr. 27, 2004 |
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