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Class Information
Number: 438/745
Name: Semiconductor device manufacturing: process > Chemical etching > Liquid phase etching
Description: Processes wherein the chemical etchant is in a liquid state when brought into contact with the semiconductive substrate.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6984535 |
Selective etching of a protective layer to form a catalyst layer for an electron-emitting device |
Jan. 10, 2006 |
| 6982217 |
Nano-structure and method of manufacturing nano-structure |
Jan. 3, 2006 |
| 6979407 |
Process for producing an SPM sensor |
Dec. 27, 2005 |
| 6979616 |
Method for fabricating semiconductor device with dual gate dielectric structure |
Dec. 27, 2005 |
| 6979632 |
Fabrication method for thin-film semiconductor |
Dec. 27, 2005 |
| 6979653 |
Semiconductor fabrication methods and apparatus |
Dec. 27, 2005 |
| 6979654 |
Method of avoiding dielectric layer deterioation with a low dielectric constant during a stripping process |
Dec. 27, 2005 |
| 6979655 |
Substrate processing method and substrate processing apparatus |
Dec. 27, 2005 |
| 6977222 |
Pattern forming method and apparatus, and device fabrication method and device |
Dec. 20, 2005 |
| 6969688 |
Wet etchant composition and method for etching HfO2 and ZrO2 |
Nov. 29, 2005 |
| 6967173 |
Hydrogen plasma photoresist strip and polymeric residue cleanup processs for low dielectric constant materials |
Nov. 22, 2005 |
| 6967174 |
Wafer chuck for use in edge bevel removal of copper from silicon wafers |
Nov. 22, 2005 |
| 6964928 |
Method for removing residue from a magneto-resistive random access memory (MRAM) film stack using a dual mask |
Nov. 15, 2005 |
| 6964929 |
Method of forming a narrow gate, and product produced thereby |
Nov. 15, 2005 |
| 6964930 |
Method of fabricating dielectric layer |
Nov. 15, 2005 |
| 6960536 |
Method for producing integrated microsystems |
Nov. 1, 2005 |
| 6955485 |
Developing method and developing unit |
Oct. 18, 2005 |
| 6955994 |
Method of manufacturing semiconductor device and method of manufacturing optical wave guide |
Oct. 18, 2005 |
| 6955995 |
Methods of cleaning surfaces of copper-containing materials, and methods of forming openings to copper-containing substrates |
Oct. 18, 2005 |
| 6951764 |
Ferroelectric memory device with a conductive polymer layer and a method of formation |
Oct. 4, 2005 |
| 6951819 |
High efficiency, monolithic multijunction solar cells containing lattice-mismatched materials and methods of forming same |
Oct. 4, 2005 |
| 6949397 |
Fabrication of silicon micro mechanical structures |
Sep. 27, 2005 |
| 6949427 |
Methods of forming a capacitor structure |
Sep. 27, 2005 |
| 6949457 |
Barrier enhancement |
Sep. 27, 2005 |
| 6946399 |
Cleaning system method and apparatus for the manufacture of integrated cicuits |
Sep. 20, 2005 |
| 6941956 |
Substrate treating method and apparatus |
Sep. 13, 2005 |
| 6943139 |
Removal of particle contamination on patterned silicon/silicon dioxide using supercritical carbon dioxide/chemical formulations |
Sep. 13, 2005 |
| 6939574 |
Method for reducing leaching in metal-coated MEMS |
Sep. 6, 2005 |
| 6933186 |
Method for BEOL resistor tolerance improvement using anodic oxidation |
Aug. 23, 2005 |
| 6933224 |
Method of fabricating integrated circuitry |
Aug. 23, 2005 |
| 6933237 |
Substrate etch method and device |
Aug. 23, 2005 |
| 6930027 |
Method of manufacturing a semiconductor component |
Aug. 16, 2005 |
| 6930053 |
Method of forming grating microstructures by anodic oxidation |
Aug. 16, 2005 |
| 6930054 |
Slurry composition for use in chemical mechanical polishing of metal wiring |
Aug. 16, 2005 |
| 6930055 |
Substrates having features formed therein and methods of forming |
Aug. 16, 2005 |
| 6930057 |
Columnar structured material and manufacturing method therefor |
Aug. 16, 2005 |
| 6927082 |
Method of evaluating the quality of a contact plug fill |
Aug. 9, 2005 |
| 6927167 |
Method for manufacturing semiconductor device having controlled surface roughness |
Aug. 9, 2005 |
| 6927171 |
Piezoresistive device and manufacturing processes of this device |
Aug. 9, 2005 |
| 6927174 |
Site-specific method for large area uniform thickness plan view transmission electron microscopy sample preparation |
Aug. 9, 2005 |
| 6927176 |
Cleaning method and solution for cleaning a wafer in a single wafer process |
Aug. 9, 2005 |
| 6923919 |
Liquid crystal polymers for flexible circuits |
Aug. 2, 2005 |
| 6924162 |
Process of manufacturing a semiconductor device |
Aug. 2, 2005 |
| 6924196 |
Anti-reflective coating and process using an anti-reflective coating |
Aug. 2, 2005 |
| 6916720 |
Thin film devices and method for fabricating thin film devices |
Jul. 12, 2005 |
| 6913994 |
Method to form Cu/OSG dual damascene structure for high performance and reliable interconnects |
Jul. 5, 2005 |
| 6911362 |
Methods for forming electronic devices including capacitor structures |
Jun. 28, 2005 |
| 6911390 |
Fabrication method for an interconnect on a substrate |
Jun. 28, 2005 |
| 6911393 |
Composition and method for copper chemical mechanical planarization |
Jun. 28, 2005 |
| 6908569 |
Ruthenium silicide wet etch |
Jun. 21, 2005 |
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