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Class Information
Number: 438/745
Name: Semiconductor device manufacturing: process > Chemical etching > Liquid phase etching
Description: Processes wherein the chemical etchant is in a liquid state when brought into contact with the semiconductive substrate.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7070702 |
Pattern formation method using light-induced suppression of etching |
Jul. 4, 2006 |
| 7071072 |
Forming shallow trench isolation without the use of CMP |
Jul. 4, 2006 |
| 7067015 |
Modified clean chemistry and megasonic nozzle for removing backside CMP slurries |
Jun. 27, 2006 |
| 7067016 |
Chemically assisted mechanical cleaning of MRAM structures |
Jun. 27, 2006 |
| 7064082 |
Methods for forming pin alloy-semiconductor devices with rectifying junction contacts |
Jun. 20, 2006 |
| 7060630 |
Method of forming isolation film of semiconductor device |
Jun. 13, 2006 |
| 7060631 |
Methods of cleaning surfaces of copper-containing materials, and methods of forming openings to copper-containing substrates |
Jun. 13, 2006 |
| 7052623 |
Method for processing silicon using etching processes |
May. 30, 2006 |
| 7049235 |
Method of manufacturing semiconductor device |
May. 23, 2006 |
| 7041232 |
Selective etching of substrates with control of the etch profile |
May. 9, 2006 |
| 7037844 |
Method for manufacturing a housing for a chip having a micromechanical structure |
May. 2, 2006 |
| 7037845 |
Selective etch process for making a semiconductor device having a high-k gate dielectric |
May. 2, 2006 |
| 7037852 |
Composition for stripping photoresist and method of preparing the same |
May. 2, 2006 |
| 7037853 |
Wafer cleaning apparatus |
May. 2, 2006 |
| 7037854 |
Method for chemical-mechanical jet etching of semiconductor structures |
May. 2, 2006 |
| 7030024 |
Dual-gate structure and method of fabricating integrated circuits having dual-gate structures |
Apr. 18, 2006 |
| 7030025 |
Method of manufacturing flotox type eeprom |
Apr. 18, 2006 |
| 7030032 |
Photodiode passivation technique |
Apr. 18, 2006 |
| 7030034 |
Methods of etching silicon nitride substantially selectively relative to an oxide of aluminum |
Apr. 18, 2006 |
| 7030036 |
Method of forming oxide layer in semiconductor device |
Apr. 18, 2006 |
| 7026250 |
Method for reducing contact resistance of a semiconductor device |
Apr. 11, 2006 |
| 7026254 |
Manufacture of masks and electronic parts |
Apr. 11, 2006 |
| 7021320 |
Method of removing a via fence |
Apr. 4, 2006 |
| 7022254 |
Chromate-free method for surface etching of titanium |
Apr. 4, 2006 |
| 7018552 |
Method of manufacturing electronic device |
Mar. 28, 2006 |
| 7018554 |
Method to reduce stacking fault nucleation sites and reduce forward voltage drift in bipolar devices |
Mar. 28, 2006 |
| 7018926 |
Method of manufacturing semiconductor device |
Mar. 28, 2006 |
| 7018937 |
Compositions for removal of processing byproducts and method for using same |
Mar. 28, 2006 |
| 7015183 |
Resist remover composition |
Mar. 21, 2006 |
| 7008837 |
Method of manufacturing capacitor by performing multi-stepped wet treatment on surface of electrode |
Mar. 7, 2006 |
| 7008853 |
Method and system for fabricating free-standing nanostructures |
Mar. 7, 2006 |
| 7005078 |
Micromachined fluidic device and method for making same |
Feb. 28, 2006 |
| 7005388 |
Method of forming through-the-wafer metal interconnect structures |
Feb. 28, 2006 |
| 7001086 |
Developing method, substrate treating method, and substrate treating apparatus |
Feb. 21, 2006 |
| 7001533 |
Chromate-free method for surface etching of aluminum and aluminum alloys |
Feb. 21, 2006 |
| 7001842 |
Methods of fabricating semiconductor devices having salicide |
Feb. 21, 2006 |
| 7001849 |
Surface treatment and protection method for cadmium zinc telluride crystals |
Feb. 21, 2006 |
| 7001874 |
Non-corrosive cleaning composition for removing plasma etching residues |
Feb. 21, 2006 |
| 6998352 |
Cleaning method, method for fabricating semiconductor device and cleaning solution |
Feb. 14, 2006 |
| 6993826 |
Method of manufacturing a probe array |
Feb. 7, 2006 |
| 6995089 |
Method to remove copper without pattern density effect |
Feb. 7, 2006 |
| 6995092 |
Method for manufacturing an electronic device |
Feb. 7, 2006 |
| 6992014 |
Method and apparatus for etch rate uniformity control |
Jan. 31, 2006 |
| 6992015 |
Pattern formation method |
Jan. 31, 2006 |
| 6992016 |
Chemical processing method, and method of manufacturing semiconductor device |
Jan. 31, 2006 |
| 6992342 |
Magnetic memory device having a non-volatile magnetic section and manufacturing thereof |
Jan. 31, 2006 |
| 6989331 |
Hard mask removal |
Jan. 24, 2006 |
| 6989334 |
Manufacturing method of a semiconductor device |
Jan. 24, 2006 |
| 6987062 |
Manufacturing method of semiconductor device |
Jan. 17, 2006 |
| 6987064 |
Method and composition to improve a nitride/oxide wet etching selectivity |
Jan. 17, 2006 |
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