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Class Information
Number: 438/745
Name: Semiconductor device manufacturing: process > Chemical etching > Liquid phase etching
Description: Processes wherein the chemical etchant is in a liquid state when brought into contact with the semiconductive substrate.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7151057 |
Flexible MEMS transducer manufacturing method |
Dec. 19, 2006 |
| 7148149 |
Method for fabricating nitride-based compound semiconductor element |
Dec. 12, 2006 |
| 7148114 |
Process for patterning high-k dielectric material |
Dec. 12, 2006 |
| 7147798 |
Aqueous based metal etchant |
Dec. 12, 2006 |
| 7144817 |
Etching solutions and processes for manufacturing flexible wiring boards |
Dec. 5, 2006 |
| 7141180 |
Etchant for wire, method of manufacturing wire using etchant, thin film transistor array panel including wire and manufacturing method thereof |
Nov. 28, 2006 |
| 7138342 |
Process of maintaining hybrid etch |
Nov. 21, 2006 |
| 7135414 |
Method for producing multicrystalline silicon substrate for solar cells |
Nov. 14, 2006 |
| 7135413 |
Cleaning solution for removing damaged portion of ferroelectric layer and cleaning method using the same |
Nov. 14, 2006 |
| 7132370 |
Method for selective removal of high-k material |
Nov. 7, 2006 |
| 7129183 |
Method of forming grating microstrutures by anodic oxidation |
Oct. 31, 2006 |
| 7129182 |
Method for etching a thin metal layer |
Oct. 31, 2006 |
| 7129172 |
Bonded wafer processing method |
Oct. 31, 2006 |
| 7125495 |
Large area electronic device with high and low resolution patterned film features |
Oct. 24, 2006 |
| 7122484 |
Process for removing organic materials during formation of a metal interconnect |
Oct. 17, 2006 |
| 7115527 |
Methods of etching an aluminum oxide comprising substrate, and methods of forming a capacitor |
Oct. 3, 2006 |
| 7115526 |
Method for wet etching of high k thin film at low temperature |
Oct. 3, 2006 |
| 7115509 |
Method for forming polysilicon local interconnects |
Oct. 3, 2006 |
| 7109128 |
Semiconductor device and method of manufacturing the same |
Sep. 19, 2006 |
| 7105103 |
System and method for the manufacture of surgical blades |
Sep. 12, 2006 |
| 7105447 |
Etching method |
Sep. 12, 2006 |
| 7101492 |
Fluorinated surfactants for aqueous acid etch solutions |
Sep. 5, 2006 |
| 7101796 |
Method for forming a plane structure |
Sep. 5, 2006 |
| 7101808 |
Chromate-free method for surface etching of stainless steel |
Sep. 5, 2006 |
| 7101809 |
Method of manufacturing a substrate for an electronic device by using etchant and electronic device having the substrate |
Sep. 5, 2006 |
| 7097784 |
Etching method and apparatus for semiconductor wafers |
Aug. 29, 2006 |
| 7098085 |
Method and apparatus for forming a thin semiconductor film, method and apparatus for producing a semiconductor device, and electro-optical apparatus |
Aug. 29, 2006 |
| 7098136 |
Structure having flush circuit features and method of making |
Aug. 29, 2006 |
| 7094131 |
Microelectronic substrate having conductive material with blunt cornered apertures, and associated methods for removing conductive material |
Aug. 22, 2006 |
| 7094696 |
Method for TMAH etching of CMOS integrated circuits |
Aug. 22, 2006 |
| 7091074 |
Method of forming a gate oxide layer in a semiconductor device and method of forming a gate electrode having the same |
Aug. 15, 2006 |
| 7091128 |
Method for avoiding oxide undercut during pre-silicide clean for thin spacer FETs |
Aug. 15, 2006 |
| 7091131 |
Method of forming integrated circuit structures in silicone ladder polymer |
Aug. 15, 2006 |
| 7091132 |
Ultrasonic assisted etch using corrosive liquids |
Aug. 15, 2006 |
| 7087494 |
Method for manufacturing semiconductor device and semiconductor device |
Aug. 8, 2006 |
| 7083741 |
Process and device for the wet-chemical treatment of silicon |
Aug. 1, 2006 |
| 7084073 |
Method of forming a via hole through a glass wafer |
Aug. 1, 2006 |
| 7074726 |
Substrate treating method and substrate treating apparatus |
Jul. 11, 2006 |
| 7070702 |
Pattern formation method using light-induced suppression of etching |
Jul. 4, 2006 |
| 7071072 |
Forming shallow trench isolation without the use of CMP |
Jul. 4, 2006 |
| 7067015 |
Modified clean chemistry and megasonic nozzle for removing backside CMP slurries |
Jun. 27, 2006 |
| 7067016 |
Chemically assisted mechanical cleaning of MRAM structures |
Jun. 27, 2006 |
| 7064082 |
Methods for forming pin alloy-semiconductor devices with rectifying junction contacts |
Jun. 20, 2006 |
| 7060630 |
Method of forming isolation film of semiconductor device |
Jun. 13, 2006 |
| 7060631 |
Methods of cleaning surfaces of copper-containing materials, and methods of forming openings to copper-containing substrates |
Jun. 13, 2006 |
| 7052623 |
Method for processing silicon using etching processes |
May. 30, 2006 |
| 7049235 |
Method of manufacturing semiconductor device |
May. 23, 2006 |
| 7041232 |
Selective etching of substrates with control of the etch profile |
May. 9, 2006 |
| 7037844 |
Method for manufacturing a housing for a chip having a micromechanical structure |
May. 2, 2006 |
| 7037845 |
Selective etch process for making a semiconductor device having a high-k gate dielectric |
May. 2, 2006 |
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