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Class Information
Number: 438/745
Name: Semiconductor device manufacturing: process > Chemical etching > Liquid phase etching
Description: Processes wherein the chemical etchant is in a liquid state when brought into contact with the semiconductive substrate.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6046112 |
Chemical mechanical polishing slurry |
Apr. 4, 2000 |
| 6046113 |
Combined dry and wet etch for improved silicide formation |
Apr. 4, 2000 |
| 6046117 |
Process for etching semiconductor wafers |
Apr. 4, 2000 |
| 6042736 |
Method for preparing samples for microscopic examination |
Mar. 28, 2000 |
| 6043154 |
Method for manufacturing charge storage electrode |
Mar. 28, 2000 |
| 6037269 |
Etching methods of silicon nitride films employed in microelectronic devices |
Mar. 14, 2000 |
| 6032682 |
Method for sulfuric acid resist stripping |
Mar. 7, 2000 |
| 6033989 |
Device for and method of concentrating chemical substances for semiconductor fabrication |
Mar. 7, 2000 |
| 6033993 |
Process for removing residues from a semiconductor substrate |
Mar. 7, 2000 |
| 6028010 |
Style gas ring with a guard extension |
Feb. 22, 2000 |
| 6028011 |
Method of forming electric pad of semiconductor device and method of forming solder bump |
Feb. 22, 2000 |
| 6025278 |
Methods for manufacturing semiconductive wafers and semiconductive material stencil masks |
Feb. 15, 2000 |
| 6017827 |
System and method for mixing a gas into a solvent used in semiconductor processing |
Jan. 25, 2000 |
| 6001216 |
Apparatus and methods for rerecirculating etching solution during semiconductor wafer processing |
Dec. 14, 1999 |
| 6001743 |
Method for fabricating a self-aligned contact |
Dec. 14, 1999 |
| 6001744 |
Method of cleaning a surface of a compound semiconductor crystal of group II-VI elements of periodic table |
Dec. 14, 1999 |
| 5999235 |
Liquid crystal displaying apparatus and method of manufacturing TFT array |
Dec. 7, 1999 |
| 5994239 |
Manufacturing process to eliminate polystringers in high density nand-type flash memory devices |
Nov. 30, 1999 |
| 5989952 |
Method for fabricating a crown-type capacitor of a DRAM cell |
Nov. 23, 1999 |
| 5990021 |
Integrated circuit having self-aligned CVD-tungsten/titanium contact plugs strapped with metal interconnect and method of manufacture |
Nov. 23, 1999 |
| 5980633 |
Process for producing a semiconductor substrate |
Nov. 9, 1999 |
| 5981400 |
Compliant universal substrate for epitaxial growth |
Nov. 9, 1999 |
| 5981401 |
Method for selective etching of anitreflective coatings |
Nov. 9, 1999 |
| 5976983 |
Method of cleaning semiconductor wafers after lapping |
Nov. 2, 1999 |
| 5976988 |
Etching material and etching method |
Nov. 2, 1999 |
| 5968848 |
Process for treating a lithographic substrate and a rinse solution for the treatment |
Oct. 19, 1999 |
| 5970315 |
Microelectromechanical structure and process of making same |
Oct. 19, 1999 |
| 5965465 |
Etching of silicon nitride |
Oct. 12, 1999 |
| 5958797 |
Planarization of a patterned structure on a substrate using an ion implantation-assisted wet chemical etch |
Sep. 28, 1999 |
| 5952242 |
Method and device for removing a semiconductor wafer from a flat substrate |
Sep. 14, 1999 |
| 5949123 |
Solar cell including multi-crystalline silicon and a method of texturizing the surface of p-type multi-crystalline silicon |
Sep. 7, 1999 |
| 5945351 |
Method for etching damaged zones on an edge of a semiconductor substrate, and etching system |
Aug. 31, 1999 |
| 5942131 |
Treatment of a surface having an expose silicon/silica interface |
Aug. 24, 1999 |
| 5942448 |
Method of making contacts on an integrated circuit |
Aug. 24, 1999 |
| 5942449 |
Method for removing an upper layer of material from a semiconductor wafer |
Aug. 24, 1999 |
| 5939336 |
Aqueous solutions of ammonium fluoride in propylene glycol and their use in the removal of etch residues from silicon substrates |
Aug. 17, 1999 |
| 5935869 |
Method of planarizing semiconductor wafers |
Aug. 10, 1999 |
| 5932493 |
Method to minimize watermarks on silicon substrates |
Aug. 3, 1999 |
| 5928968 |
Semiconductor pressure transducer structures and methods for making the same |
Jul. 27, 1999 |
| 5930676 |
Multilayered interconnection substrate and process for fabricating the same |
Jul. 27, 1999 |
| 5925213 |
Wet processing apparatus with movable partitioning plate between two processing chambers |
Jul. 20, 1999 |
| 5919715 |
Method for cleaning a semiconductor surface |
Jul. 6, 1999 |
| 5914052 |
Wet etch method and apparatus |
Jun. 22, 1999 |
| 5910257 |
Process for producing a semiconductor device using purified phosphoric acid |
Jun. 8, 1999 |
| 5904156 |
Dry film resist removal in the presence of electroplated C4's |
May. 18, 1999 |
| 5904572 |
Wet etching station and a wet etching method adapted for utilizing the same |
May. 18, 1999 |
| 5885901 |
Rinsing solution after resist stripping process and method for manufacturing semiconductor device |
Mar. 23, 1999 |
| 5882950 |
Fabrication method for horizontal direction semiconductor PN junction array |
Mar. 16, 1999 |
| 5883012 |
Method of etching a trench into a semiconductor substrate |
Mar. 16, 1999 |
| 5879572 |
Method of protecting silicon wafers during wet chemical etching |
Mar. 9, 1999 |
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