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Class Information
Number: 438/745
Name: Semiconductor device manufacturing: process > Chemical etching > Liquid phase etching
Description: Processes wherein the chemical etchant is in a liquid state when brought into contact with the semiconductive substrate.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6255227 |
Etching process of CoSi2 layers |
Jul. 3, 2001 |
| 6251785 |
Apparatus and method for polishing a semiconductor wafer in an overhanging position |
Jun. 26, 2001 |
| 6251786 |
Method to create a copper dual damascene structure with less dishing and erosion |
Jun. 26, 2001 |
| 6251787 |
Elimination of photo-induced electrochemical dissolution in chemical mechanical polishing |
Jun. 26, 2001 |
| 6251794 |
Method and apparatus with heat treatment for stripping photoresist to eliminate post-strip photoresist extrusion defects |
Jun. 26, 2001 |
| 6251797 |
Method of fabricating semiconductor device |
Jun. 26, 2001 |
| 6248670 |
Method of wet processing |
Jun. 19, 2001 |
| 6245191 |
Wet etch apparatus |
Jun. 12, 2001 |
| 6245250 |
Process vessel |
Jun. 12, 2001 |
| 6245581 |
Method and apparatus for control of critical dimension using feedback etch control |
Jun. 12, 2001 |
| 6245679 |
Apparatus and methods for chemical-mechanical polishing of semiconductor wafers |
Jun. 12, 2001 |
| 6245680 |
Circumferentially oscillating carousel apparatus for sequentially processing substrates for polishing and cleaning |
Jun. 12, 2001 |
| 6245684 |
Method of obtaining a rounded top trench corner for semiconductor trench etch applications |
Jun. 12, 2001 |
| 6242353 |
Wafer holding head and wafer polishing apparatus, and method for manufacturing wafers |
Jun. 5, 2001 |
| 6242357 |
Method for forming a deep trench capacitor of a DRAM cell |
Jun. 5, 2001 |
| 6239030 |
Method of fabricating a trench isolation structure for a semiconductor device |
May. 29, 2001 |
| 6239037 |
Autoaligned etching process for realizing word lines and improving the reliability of semiconductor integrated memory devices |
May. 29, 2001 |
| 6239038 |
Method for chemical processing semiconductor wafers |
May. 29, 2001 |
| 6239039 |
Semiconductor wafers processing method and semiconductor wafers produced by the same |
May. 29, 2001 |
| 6235637 |
Method for marking a wafer without inducing flat edge particle problem |
May. 22, 2001 |
| 6232139 |
Method of making suspended thin-film semiconductor piezoelectric devices |
May. 15, 2001 |
| 6232228 |
Method of manufacturing semiconductor devices, etching composition for manufacturing semiconductor devices, and semiconductor devices made using the method |
May. 15, 2001 |
| 6232232 |
High selectivity BPSG to TEOS etchant |
May. 15, 2001 |
| 6232239 |
Method for cleaning contact holes in a semiconductor device |
May. 15, 2001 |
| 6232240 |
Method for fabricating a capacitor |
May. 15, 2001 |
| 6232241 |
Pre-oxidation cleaning method for reducing leakage current of ultra-thin gate oxide |
May. 15, 2001 |
| 6228661 |
Method to determine the dark-to-clear exposure dose for the swing curve |
May. 8, 2001 |
| 6228673 |
Method of fabricating a surface coupled InGaAs photodetector |
May. 8, 2001 |
| 6228770 |
Method to form self-sealing air gaps between metal interconnects |
May. 8, 2001 |
| 6225174 |
Method for forming a spacer using photosensitive material |
May. 1, 2001 |
| 6225225 |
Method to form shallow trench isolation structures for borderless contacts in an integrated circuit |
May. 1, 2001 |
| 6225232 |
Semiconductor processing methods, and methods of forming capacitor constructions |
May. 1, 2001 |
| 6225235 |
Method and device for cleaning and etching individual wafers using wet chemistry |
May. 1, 2001 |
| 6221766 |
Method and apparatus for processing refractory metals on semiconductor substrates |
Apr. 24, 2001 |
| 6221781 |
Combined process chamber with multi-positionable pedestal |
Apr. 24, 2001 |
| 6221785 |
Method for forming shallow trench isolations |
Apr. 24, 2001 |
| 6221786 |
Methods for isolating interconnects |
Apr. 24, 2001 |
| 6214127 |
Methods of processing electronic device workpieces and methods of positioning electronic device workpieces within a workpiece carrier |
Apr. 10, 2001 |
| 6214704 |
Method of processing semiconductor wafers to build in back surface damage |
Apr. 10, 2001 |
| 6211086 |
Method of avoiding CMP caused residue on wafer edge uncompleted field |
Apr. 3, 2001 |
| 6211090 |
Method of fabricating flux concentrating layer for use with magnetoresistive random access memories |
Apr. 3, 2001 |
| 6207570 |
Method of manufacturing integrated circuit devices |
Mar. 27, 2001 |
| 6207572 |
Reverse linear chemical mechanical polisher with loadable housing |
Mar. 27, 2001 |
| 6204180 |
Apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing sorbent-based fluid storage and dispensing system for reagent delivery |
Mar. 20, 2001 |
| 6204182 |
In-situ fluid jet orifice |
Mar. 20, 2001 |
| 6204185 |
Method for forming self-align stop layer for borderless contact process |
Mar. 20, 2001 |
| 6200414 |
Circulation system for supplying chemical for manufacturing semiconductor devices and circulating method thereof |
Mar. 13, 2001 |
| 6200897 |
Method for manufacturing even dielectric layer |
Mar. 13, 2001 |
| 6200909 |
Method for selective etching of antireflective coatings |
Mar. 13, 2001 |
| 6197692 |
Semiconductor wafer planarizing device and method for planarizing a surface of semiconductor wafer by polishing it |
Mar. 6, 2001 |
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