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Class Information
Number: 438/745
Name: Semiconductor device manufacturing: process > Chemical etching > Liquid phase etching
Description: Processes wherein the chemical etchant is in a liquid state when brought into contact with the semiconductive substrate.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6727187 |
Fabrication method for semiconductor device |
Apr. 27, 2004 |
| 6727188 |
Etchant and method for fabricating a substrate for an electronic device using the same wherein the substrate includes a copper or copper alloy film |
Apr. 27, 2004 |
| 6727189 |
Method for detecting metal contamination on a silicon chip by implanting arsenic |
Apr. 27, 2004 |
| 6727494 |
Method and apparatus for detecting contaminating species on a wafer edge |
Apr. 27, 2004 |
| 6723250 |
Method of producing structured wafers |
Apr. 20, 2004 |
| 6723626 |
Method of manufacturing semiconductor device |
Apr. 20, 2004 |
| 6723644 |
Method of fabricating a semiconductor device using two chemical mechanical polishing processes to polish regions having different conductive pattern densities |
Apr. 20, 2004 |
| 6723656 |
Method and apparatus for etching a semiconductor die |
Apr. 20, 2004 |
| 6723657 |
Method for fabricating a gate stack in very large scale integrated semiconductor memories |
Apr. 20, 2004 |
| 6723658 |
Gate structure and method |
Apr. 20, 2004 |
| 6716365 |
Method for wet etching and wet etching apparatus |
Apr. 6, 2004 |
| 6713400 |
Method for improving the stability of amorphous silicon |
Mar. 30, 2004 |
| 6709531 |
Chemical liquid processing apparatus for processing a substrate and the method thereof |
Mar. 23, 2004 |
| 6709888 |
Method of decapsulating a packaged copper-technology integrated circuit |
Mar. 23, 2004 |
| 6709979 |
Method of manufacturing a semiconductor device |
Mar. 23, 2004 |
| 6709988 |
Production process of electronic component using wet etching, electronic component, and suspension for hard disk |
Mar. 23, 2004 |
| 6709990 |
Method for fabrication of a high capacitance interpoly dielectric |
Mar. 23, 2004 |
| 6706207 |
Non-chromate metal surface etching solutions |
Mar. 16, 2004 |
| 6706641 |
Spray member and method for using the same |
Mar. 16, 2004 |
| 6706642 |
Method for fabricating semiconductor capacitors |
Mar. 16, 2004 |
| 6703278 |
Method of forming layers of oxide on a surface of a substrate |
Mar. 9, 2004 |
| 6703319 |
Compositions and methods for removing etch residue |
Mar. 9, 2004 |
| 6703320 |
Successful and easy method to remove polysilicon film |
Mar. 9, 2004 |
| 6699400 |
Etch process and apparatus therefor |
Mar. 2, 2004 |
| 6699773 |
Shallow trench isolation type semiconductor device and method of forming the same |
Mar. 2, 2004 |
| 6699794 |
Self aligned buried plate |
Mar. 2, 2004 |
| 6692580 |
Method of cleaning a dual damascene structure |
Feb. 17, 2004 |
| 6692976 |
Post-etch cleaning treatment |
Feb. 17, 2004 |
| 6693034 |
Deadhesion method and mechanism for wafer processing |
Feb. 17, 2004 |
| 6693039 |
Process for forming a buried cavity in a semiconductor material wafer and a buried cavity |
Feb. 17, 2004 |
| 6693044 |
Semiconductor device and method of manufacturing the same |
Feb. 17, 2004 |
| 6693045 |
High density wafer production method |
Feb. 17, 2004 |
| 6693365 |
Local electrochemical deplating of alignment mark regions of semiconductor wafers |
Feb. 17, 2004 |
| 6686237 |
High precision integrated circuit capacitors |
Feb. 3, 2004 |
| 6686284 |
Chemical mechanical polisher equipped with chilled retaining ring and method of using |
Feb. 3, 2004 |
| 6686288 |
Integrated circuit having self-aligned CVD-tungsten/titanium contact plugs strapped with metal interconnect and method of manufacture |
Feb. 3, 2004 |
| 6686297 |
Method of manufacturing a semiconductor device and apparatus to be used therefore |
Feb. 3, 2004 |
| 6682658 |
Transparent electrode made from indium-zinc-oxide and etchant for etching the same |
Jan. 27, 2004 |
| 6683004 |
Method of manufacturing a semiconductor device, and semiconductor device manufactured thereby |
Jan. 27, 2004 |
| 6683007 |
Etching and cleaning methods and etching and cleaning apparatus used therefor |
Jan. 27, 2004 |
| 6683008 |
Process of removing ion-implanted photoresist from a workpiece |
Jan. 27, 2004 |
| 6683009 |
Method for local etching |
Jan. 27, 2004 |
| 6683034 |
Stripper composition for negative chemically amplified resist |
Jan. 27, 2004 |
| 6676846 |
Device and method for fabricating diffractive gratings |
Jan. 13, 2004 |
| 6677233 |
Material deposition from a liquefied gas solution |
Jan. 13, 2004 |
| 6677239 |
Methods and compositions for chemical mechanical polishing |
Jan. 13, 2004 |
| 6677247 |
Method of increasing the etch selectivity of a contact sidewall to a preclean etchant |
Jan. 13, 2004 |
| 6677249 |
Method for manufacturing breakaway layers for detaching deposited layer systems |
Jan. 13, 2004 |
| 6673723 |
Circuit board and a method for making the same |
Jan. 6, 2004 |
| 6670269 |
Method of forming through-hole or recess in silicon substrate |
Dec. 30, 2003 |
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