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Class Information
Number: 438/745
Name: Semiconductor device manufacturing: process > Chemical etching > Liquid phase etching
Description: Processes wherein the chemical etchant is in a liquid state when brought into contact with the semiconductive substrate.










Sub-classes under this class:

Class Number Class Name Patents
438/754 Electrically conductive material (e.g., metal, conductive oxide, etc.) 536
438/752 Germanium 159
438/748 Projection of etchant against a moving substrate or controlling the angle or pattern of projected etchant 164
438/749 Sequential application of etchant 209
438/757 Silicon nitride 278
438/756 Silicon oxide 535
438/753 Silicon 606
438/746 Utilizing electromagnetic or wave energy 112
438/747 With relative movement between substrate and confined pool of etchant 174


Patents under this class:

Patent Number Title Of Patent Date Issued
8709957 Spalling utilizing stressor layer portions Apr. 29, 2014
8709954 Wafer recycling method Apr. 29, 2014
8703621 Manufacturing method of magnetic recording medium Apr. 22, 2014
8703620 Methods for PFET fabrication using APM solutions Apr. 22, 2014
8703605 High yield and high throughput method for the manufacture of integrated circuit devices of improved integrity, performance and reliability Apr. 22, 2014
8703005 Methods for removing dielectric materials Apr. 22, 2014
8691705 Method of patterning metal alloy material layer having hafnium and molybdenum Apr. 8, 2014
8685864 Method and device for treating a substrate surface of a substrate Apr. 1, 2014
8685863 Semiconductor process, semiconductor element and package having semiconductor element Apr. 1, 2014
8685836 Method for forming a silicon layer on any substrate using light irradiation Apr. 1, 2014
8685273 Etching agent for type II InAs/GaInSb superlattice epitaxial materials Apr. 1, 2014
8685272 Composition for etching silicon oxide layer, method for etching semiconductor device using the same, and composition for etching semiconductor device Apr. 1, 2014
8685260 Conductive polymer electrodes Apr. 1, 2014
8673764 Method and system for making and cleaning semiconductor device Mar. 18, 2014
8669190 Method for manufacturing semiconductor device and semiconductor wafer Mar. 11, 2014
8669189 Method for treating a semiconductor wafer Mar. 11, 2014
8664040 Exposing connectors in packages through selective treatment Mar. 4, 2014
8658544 Method for texturing silicon surfaces and wafers thereof Feb. 25, 2014
8658543 Methods for pFET fabrication using APM solutions Feb. 25, 2014
8658053 Etching composition for metal material and method for manufacturing semiconductor device by using same Feb. 25, 2014
8652345 Method of forming a patterned substrate Feb. 18, 2014
8642485 Method for fabricating patterned polyimide film and applications thereof Feb. 4, 2014
8637409 Etching method, method for manufacturing semiconductor device, and etching device Jan. 28, 2014
8637408 In-situ reclaim of volatile components Jan. 28, 2014
8637374 Method of fabricating self-aligned nanotube field effect transistor Jan. 28, 2014
8632690 Method and apparatus for preventing native oxide regrowth Jan. 21, 2014
8624267 Low 1C screw dislocation 3 inch silicon carbide wafer Jan. 7, 2014
8623231 Method for etching an ultra thin film Jan. 7, 2014
8618000 Selective wet etching of hafnium aluminum oxide films Dec. 31, 2013
8617969 Method for producing semiconductor optical device Dec. 31, 2013
8617417 Cleaning composition, method for producing semiconductor device, and cleaning method Dec. 31, 2013
8617409 Magnetically levitated gas cell for touchless site-isolated wet processing Dec. 31, 2013
8613287 Apparatus for preventing stiction of MEMS microstructure Dec. 24, 2013
8603917 Method of processing a wafer Dec. 10, 2013
8603837 High productivity combinatorial workflow for post gate etch clean development Dec. 10, 2013
8603348 Method of reducing main pole corrosion during aluminum oxide etch Dec. 10, 2013
8591756 Method of manufacturing a metallized ceramic substrate Nov. 26, 2013
8586859 Wafer level interconnection of inverted metamorphic multijunction solar cells Nov. 19, 2013
8585910 Process of making a microtube and microfluidic devices formed therewith Nov. 19, 2013
8580696 Systems and methods for detecting watermark formations on semiconductor wafers Nov. 12, 2013
8580695 Method of fabricating a semiconductor device Nov. 12, 2013
8580133 Methods of controlling the etching of silicon nitride relative to silicon dioxide Nov. 12, 2013
8580128 Method of manufacturing electromagnetic-wave shielding plate, electromagnetic-wave shielding plate manufactured thereby, and filter display using the same Nov. 12, 2013
8575016 Method for etching gate stack Nov. 5, 2013
8569084 Method for fabricating light emitting device including photonic crystal structures Oct. 29, 2013
8563446 Technique to create a buried plate in embedded dynamic random access memory device Oct. 22, 2013
8563440 Method for chemically treating a substrate Oct. 22, 2013
8563437 Method for treating group III nitride semiconductor Oct. 22, 2013
8562855 Silicon etching liquid and etching method Oct. 22, 2013
8560977 Drop recipe creating method, database creating method and medium Oct. 15, 2013











 
 
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