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Class Information
Number: 438/745
Name: Semiconductor device manufacturing: process > Chemical etching > Liquid phase etching
Description: Processes wherein the chemical etchant is in a liquid state when brought into contact with the semiconductive substrate.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7371694 |
Semiconductor device fabrication method and fabrication apparatus |
May. 13, 2008 |
| 7371693 |
Manufacturing method of semiconductor device with chamfering |
May. 13, 2008 |
| 7371333 |
Methods of etching nickel silicide and cobalt silicide and methods of forming conductive lines |
May. 13, 2008 |
| 7368416 |
Methods of removing metal-containing materials |
May. 6, 2008 |
| 7368397 |
Method for monitoring edge bead removal process of copper metal interconnection |
May. 6, 2008 |
| 7368396 |
Dry etching methods |
May. 6, 2008 |
| 7368395 |
Method for fabricating a nano-imprinting mold |
May. 6, 2008 |
| 7367343 |
Method of cleaning a surface of a cobalt-containing material, method of forming an opening to a cobalt-containing material, semiconductor processing method of forming an integrated circuit com |
May. 6, 2008 |
| 7365021 |
Methods of fabricating a semiconductor device using an organic compound and fluoride-based buffered solution |
Apr. 29, 2008 |
| 7361610 |
Method of etching a glass substrate |
Apr. 22, 2008 |
| 7361609 |
Mask patterns for semiconductor device fabrication and related methods |
Apr. 22, 2008 |
| 7358195 |
Method for fabricating liquid crystal display device |
Apr. 15, 2008 |
| 7354870 |
Process for chemical etching of parts fabricated by stereolithography |
Apr. 8, 2008 |
| 7354869 |
Substrate processing method, substrate processing apparatus, and semiconductor device manufacturing method |
Apr. 8, 2008 |
| 7354868 |
Methods of fabricating a semiconductor device using a dilute aqueous solution of an ammonia and peroxide mixture |
Apr. 8, 2008 |
| 7354860 |
Manufacturing method of mask blank and manufacturing method of transfer mask |
Apr. 8, 2008 |
| 7354523 |
Methods for sidewall etching and etching during filling of a trench |
Apr. 8, 2008 |
| 7351667 |
Etching solution for silicon oxide method of manufacturing a semiconductor device using the same |
Apr. 1, 2008 |
| 7348230 |
Manufacturing method of semiconductor device |
Mar. 25, 2008 |
| 7344998 |
Wafer recovering method, wafer, and fabrication method |
Mar. 18, 2008 |
| 7344955 |
Cut-and-paste imprint lithographic mold and method therefor |
Mar. 18, 2008 |
| 7341958 |
Integrated process for thin film resistors with silicides |
Mar. 11, 2008 |
| 7341065 |
Single wafer cleaning method to reduce particle defects on a wafer surface |
Mar. 11, 2008 |
| 7338911 |
Method for etching and for forming a contact hole using thereof |
Mar. 4, 2008 |
| 7338910 |
Method of fabricating semiconductor devices and method of removing a spacer |
Mar. 4, 2008 |
| 7338909 |
Micro-etching method to replicate alignment marks for semiconductor wafer photolithography |
Mar. 4, 2008 |
| 7338908 |
Method for fabrication of semiconductor interconnect structure with reduced capacitance, leakage current, and improved breakdown voltage |
Mar. 4, 2008 |
| 7338904 |
Method for manufacturing single-side mirror surface wafer |
Mar. 4, 2008 |
| 7338859 |
Non-volatile memory cells having floating gate and method of forming the same |
Mar. 4, 2008 |
| 7338610 |
Etching method for manufacturing semiconductor device |
Mar. 4, 2008 |
| 7332449 |
Method for forming dual damascenes with supercritical fluid treatments |
Feb. 19, 2008 |
| 7332441 |
Passivation of porous semiconductors |
Feb. 19, 2008 |
| 7332437 |
Method for processing semiconductor wafer and semiconductor wafer |
Feb. 19, 2008 |
| 7332436 |
Process of removing residue from a precision surface using liquid or supercritical carbon dioxide composition |
Feb. 19, 2008 |
| 7329616 |
Substrate processing apparatus and substrate processing method |
Feb. 12, 2008 |
| 7329611 |
Method for forming finely-structured parts, finely-structured parts formed thereby, and product using such finely-structured part |
Feb. 12, 2008 |
| 7329365 |
Etchant composition for indium oxide layer and etching method using the same |
Feb. 12, 2008 |
| 7326654 |
Monodisperse nanoparticles produced by size-selective photoetching reaction |
Feb. 5, 2008 |
| 7323420 |
Method for manufacturing multi-thickness gate dielectric layer of semiconductor device |
Jan. 29, 2008 |
| 7323413 |
Method for stripping silicon nitride |
Jan. 29, 2008 |
| 7314834 |
Semiconductor device fabrication method |
Jan. 1, 2008 |
| 7314833 |
Method for manufacturing substrate for discrete track recording media and method for manufacturing discrete track recording media |
Jan. 1, 2008 |
| 7314521 |
Low micropipe 100 mm silicon carbide wafer |
Jan. 1, 2008 |
| 7314520 |
Low 1c screw dislocation 3 inch silicon carbide wafer |
Jan. 1, 2008 |
| 7312153 |
Treatment of semiconductor wafers |
Dec. 25, 2007 |
| 7306955 |
Method of performing a double-sided process |
Dec. 11, 2007 |
| 7303994 |
Process for interfacial adhesion in laminate structures through patterned roughing of a surface |
Dec. 4, 2007 |
| 7303933 |
Process of manufacturing a semiconductor device |
Dec. 4, 2007 |
| 7300827 |
Method of manufacturing a thin film transistor substrate and stripping composition |
Nov. 27, 2007 |
| 7297639 |
Methods for etching doped oxides in the manufacture of microfeature devices |
Nov. 20, 2007 |
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