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Class Information
Number: 438/745
Name: Semiconductor device manufacturing: process > Chemical etching > Liquid phase etching
Description: Processes wherein the chemical etchant is in a liquid state when brought into contact with the semiconductive substrate.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7618897 |
Alkali etching liquid for silicon wafer and etching method using same |
Nov. 17, 2009 |
| 7611995 |
Method for removing silicon oxide film and processing apparatus |
Nov. 3, 2009 |
| 7608548 |
Method for cleaning a multilayer substrate and method for bonding substrates and method for producing a bonded wafer |
Oct. 27, 2009 |
| 7608547 |
Etchant and method for fabricating liquid crystal display using the same |
Oct. 27, 2009 |
| 7605076 |
Method of manufacturing a semiconductor device from which damage layers and native oxide films in connection holes have been removed |
Oct. 20, 2009 |
| 7605075 |
Multilayer circuit board and method of manufacturing the same |
Oct. 20, 2009 |
| 7601642 |
Method of processing silicon wafer |
Oct. 13, 2009 |
| 7601621 |
Method of forming surface irregularities and method of manufacturing gallium nitride-based light emitting diode |
Oct. 13, 2009 |
| 7598168 |
Method of fabricating dual damascene interconnection and etchant for stripping sacrificial layer |
Oct. 6, 2009 |
| 7592266 |
Removing solution, cleaning method for semiconductor substrate, and process for production of semiconductor device |
Sep. 22, 2009 |
| 7591959 |
Etchants and etchant systems with plural etch selectivities |
Sep. 22, 2009 |
| 7585781 |
Method of forming openings in an organic resin material |
Sep. 8, 2009 |
| 7585779 |
Fabrication method of semiconductor device |
Sep. 8, 2009 |
| 7582570 |
Compositions for removal of processing byproducts and method for using same |
Sep. 1, 2009 |
| 7579309 |
Methods for characterizing defects on silicon surfaces and etching composition and treatment process therefor |
Aug. 25, 2009 |
| 7579284 |
Etching solution, method of forming a pattern using the same, method of manufacturing a multiple gate oxide layer using the same and method of manufacturing a flash memory device using the sam |
Aug. 25, 2009 |
| 7579280 |
Method of patterning a film |
Aug. 25, 2009 |
| 7572739 |
Tape removal in semiconductor structure fabrication |
Aug. 11, 2009 |
| 7572735 |
Blanket resist to protect active side of semiconductor |
Aug. 11, 2009 |
| 7569491 |
Method for enlarging a nano-structure |
Aug. 4, 2009 |
| 7569490 |
Electrochemical etching |
Aug. 4, 2009 |
| 7569478 |
Method and apparatus for manufacturing semiconductor device, control program and computer storage medium |
Aug. 4, 2009 |
| 7566666 |
Composition for removing an insulation material and related methods |
Jul. 28, 2009 |
| 7566596 |
Method of manufacturing a thin film transistor substrate and stripping composition |
Jul. 28, 2009 |
| 7566574 |
Method of performing a double-sided process |
Jul. 28, 2009 |
| 7563717 |
Method for fabricating a semiconductor device |
Jul. 21, 2009 |
| 7560386 |
Method of manufacturing nonvolatile semiconductor memory device |
Jul. 14, 2009 |
| 7547642 |
Micro-structure manufacturing method |
Jun. 16, 2009 |
| 7547627 |
Method for manufacturing semiconductor device |
Jun. 16, 2009 |
| 7547398 |
Self-aligned process for fabricating imprint templates containing variously etched features |
Jun. 16, 2009 |
| 7544624 |
Systems and methods for processing microfeature workpieces |
Jun. 9, 2009 |
| 7541293 |
Method for manufacturing semiconductor device |
Jun. 2, 2009 |
| 7541286 |
Method for manufacturing semiconductor device using KrF light source |
Jun. 2, 2009 |
| 7540968 |
Micro movable device and method of making the same using wet etching |
Jun. 2, 2009 |
| 7537709 |
Method for isotropic etching of copper |
May. 26, 2009 |
| 7534365 |
Ultra-violet assisted anisotropic etching of PET |
May. 19, 2009 |
| 7531463 |
Fabrication of semiconductor interconnect structure |
May. 12, 2009 |
| 7531462 |
Method of inspecting semiconductor wafer |
May. 12, 2009 |
| 7531406 |
Method for fabricating an electrical component |
May. 12, 2009 |
| 7531045 |
Method for removing haze in a photo mask |
May. 12, 2009 |
| 7524772 |
Pattern formation method |
Apr. 28, 2009 |
| 7524771 |
Substrate processing method using alkaline solution and acid solution |
Apr. 28, 2009 |
| 7524752 |
Method of manufacturing semiconductor device |
Apr. 28, 2009 |
| 7524733 |
Asymmetric source/drain transistor employing selective epitaxial growth (SEG) layer and method of fabricating same |
Apr. 28, 2009 |
| 7524705 |
Method for manufacturing a semiconductor substrate and method for manufacturing a semiconductor device |
Apr. 28, 2009 |
| 7521374 |
Method and apparatus for cleaning semiconductor substrates |
Apr. 21, 2009 |
| 7521373 |
Compositions for dissolution of low-k dielectric films, and methods of use |
Apr. 21, 2009 |
| 7517809 |
Removal of MEMS sacrificial layers using supercritical fluid/chemical formulations |
Apr. 14, 2009 |
| 7517808 |
Method for forming and removing a patterned silicone film |
Apr. 14, 2009 |
| 7517465 |
Ultra lightweight photovoltaic device and method for its manufacture |
Apr. 14, 2009 |
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