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Class Information
Number: 438/742
Name: Semiconductor device manufacturing: process > Chemical etching > Vapor phase etching (i.e., dry etching) > Differential etching of semiconductor substrate > Substrate possessing multiple layers > Electrically conductive material (e.g., metal, conductive oxide, etc.)
Description: Processes wherein the material undergoing etching with the energized gas is an electrically conductive material.

Patents under this class:
1 2 3 4 5 6 7

Patent Number Title Of Patent Date Issued
8691700 Gas cluster ion beam etch profile control using beam divergence Apr. 8, 2014
8679874 Light-emitting device having a roughened surface with different topographies Mar. 25, 2014
8679984 Method of manufacturing electric device, array of electric devices, and manufacturing method therefor Mar. 25, 2014
8652338 Magnetic recording medium and method of manufacturing the same Feb. 18, 2014
8617998 Method of forming a micro-pattern for semiconductor devices Dec. 31, 2013
8614150 Methods of manufacturing semiconductor structures using RIE process Dec. 24, 2013
8592322 Method of fabricating openings Nov. 26, 2013
8586483 Semiconductor device structures and compositions for forming same Nov. 19, 2013
8569168 Dual-metal self-aligned wires and vias Oct. 29, 2013
8557710 Gas cluster ion beam etching process for metal-containing materials Oct. 15, 2013
8475872 Patterning of thin film layers Jul. 2, 2013
8461053 Self-aligned NAND flash select-gate wordlines for spacer double patterning Jun. 11, 2013
8431485 Manufacturing method for a buried circuit structure Apr. 30, 2013
8421228 Structure and methods of forming contact structures Apr. 16, 2013
8404597 Device and method for stopping an etching process Mar. 26, 2013
8372743 Hybrid pitch-split pattern-split lithography process Feb. 12, 2013
RE43877 Method for precision integrated circuit die singulation using differential etch rates Dec. 25, 2012
8338295 Method of fabricating metal interconnection and method of fabricating image sensor using the same Dec. 25, 2012
8309457 Multilayer low reflectivity hard mask and process therefor Nov. 13, 2012
8283259 Methods of removing a metal nitride material Oct. 9, 2012
8273666 Process to fabricate bottom electrode for MRAM device Sep. 25, 2012
8236702 Method of fabricating openings and contact holes Aug. 7, 2012
8232214 Liquid crystal display device and method of fabricating the same Jul. 31, 2012
8183146 Manufacturing method for a buried circuit structure May. 22, 2012
8173523 Method of removing heavy metal in semiconductor substrate May. 8, 2012
8163620 Method for etching Mo-based metal gate stack with aluminium nitride barrier Apr. 24, 2012
8080432 High performance MTJ element for STT-RAM and method for making the same Dec. 20, 2011
8012878 Atomic layer volatilization process for metal layers Sep. 6, 2011
7981734 Manufacturing method of thin film transistor including low resistance conductive thin films Jul. 19, 2011
7981786 Method of fabricating non-volatile memory device having charge trapping layer Jul. 19, 2011
7964463 Method for fabricating semiconductor device including vertical channel transistor Jun. 21, 2011
7948082 Method of fabricating a patterned nanoscopic article May. 24, 2011
7935641 Thin film etching method May. 3, 2011
RE42004 Method for fabricating a semiconductor storage device having an increased dielectric film area Dec. 21, 2010
7838436 Bottom electrode for MRAM device and method to fabricate it Nov. 23, 2010
7799691 System and method for anisotropically etching a recess in a silicon substrate Sep. 21, 2010
7776644 Phase change memory cell and method and system for forming the same Aug. 17, 2010
7754616 Semiconductor device and method of manufacturing the same Jul. 13, 2010
7754618 Method of forming an apparatus having a dielectric containing cerium oxide and aluminum oxide Jul. 13, 2010
7741204 Mixed-scale electronic interfaces Jun. 22, 2010
7683415 Semiconductor device and method for fabricating the same Mar. 23, 2010
7678642 Method for manufacturing phase change memory device using a patterning process Mar. 16, 2010
7670946 Methods to eliminate contact plug sidewall slit Mar. 2, 2010
7635648 Methods for fabricating dual material gate in a semiconductor device Dec. 22, 2009
7618894 Multi-step selective etching for cross-point memory Nov. 17, 2009
7588992 Integrated thin-film capacitor with etch-stop layer, process of making same, and packages containing same Sep. 15, 2009
7585698 Thin film transistor having oxide semiconductor layer and manufacturing method thereof Sep. 8, 2009
7550381 Contact clean by remote plasma and repair of silicide surface Jun. 23, 2009
7544622 Passivation for cleaning a material Jun. 9, 2009
7537987 Semiconductor device manufacturing method May. 26, 2009

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