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Class Information
Number: 438/739
Name: Semiconductor device manufacturing: process > Chemical etching > Vapor phase etching (i.e., dry etching) > Differential etching of semiconductor substrate > Substrate possessing multiple layers > Selectively etching substrate possessing multiple layers of differing etch characteristics > Lateral etching of intermediate layer (i.e., undercutting)
Description: Processes wherein an intermediate layer on the substrate is etched laterally to the major surface thereof.

Patents under this class:
1 2 3 4 5 6 7 8

Patent Number Title Of Patent Date Issued
8686542 Compliant monopolar micro device transfer head with silicon electrode Apr. 1, 2014
8679986 Method for manufacturing display device Mar. 25, 2014
8652971 Cavity process etch undercut monitor Feb. 18, 2014
8643059 Substrate structure and method of manufacturing the same Feb. 4, 2014
8609492 Vertical memory cell Dec. 17, 2013
8609536 Stair step formation using at least two masks Dec. 17, 2013
8599616 Three-dimensional NAND memory with stacked mono-crystalline channels Dec. 3, 2013
8586395 Method and apparatus for reducing thermopile variations Nov. 19, 2013
8569182 Methods of fabricating three-dimensional semiconductor device Oct. 29, 2013
8530350 Apparatuses including stair-step structures and methods of forming the same Sep. 10, 2013
8530361 Process for producing silicon and oxide films from organoaminosilane precursors Sep. 10, 2013
8507386 Lateral uniformity in silicon recess etch Aug. 13, 2013
8501609 Method for generating a three-dimensional NAND memory with mono-crystalline channels using sacrificial material Aug. 6, 2013
8492218 Removal of an overlap of dual stress liners Jul. 23, 2013
8470629 Method for manufacturing micromachine Jun. 25, 2013
8461028 Synthesizing graphene from metal-carbon solutions using ion implantation Jun. 11, 2013
8461054 Method of manufacturing liquid crystal display device Jun. 11, 2013
8445978 Electromechanical transducer device and method of forming a electromechanical transducer device May. 21, 2013
8435846 Semiconductor devices with raised extensions May. 7, 2013
8415179 Method for manufacturing light emitting diode Apr. 9, 2013
8399876 Semiconductor dies, light-emitting devices, methods of manufacturing and methods of generating multi-wavelength light Mar. 19, 2013
8377785 Planar field effect transistor structure having an angled crystallographic etch-defined source/drain recess and a method of forming the transistor structure Feb. 19, 2013
8377320 Method of forming an undercut microstructure Feb. 19, 2013
8367490 Semiconductor structure and method for manufacturing the same Feb. 5, 2013
8361907 Directionally etched nanowire field effect transistors Jan. 29, 2013
8329492 Micro electronic device and method for fabricating micro electromechanical system resonator thereof Dec. 11, 2012
8324069 Method of fabricating high-performance capacitors in integrated MOS technologies Dec. 4, 2012
8309438 Synthesizing graphene from metal-carbon solutions using ion implantation Nov. 13, 2012
8309432 Epitaxial lift off stack having a universally shrunk handle and methods thereof Nov. 13, 2012
8263485 Method for fabricating semiconductor device Sep. 11, 2012
8243494 Self-aligned structure and method for confining a melting point in a resistor random access memory Aug. 14, 2012
8242025 Method for producing semiconductor chip, and field effect transistor and method for manufacturing same Aug. 14, 2012
8227318 Integration of multiple gate oxides with shallow trench isolation methods to minimize divot formation Jul. 24, 2012
8217495 High-frequency bridge suspended diode Jul. 10, 2012
8207026 Manufacturing method of thin film transistor and manufacturing method of display device Jun. 26, 2012
8173497 Semiconductor device preventing floating body effect in a peripheral region thereof and method for manufacturing the same May. 8, 2012
8158508 Structure and manufacturing method of a chip scale package Apr. 17, 2012
8138090 Method for forming fine patterns in semiconductor device Mar. 20, 2012
8114732 Method for manufacturing twin bit structure cell with Al.sub.2O.sub.3/nano-crystalline Si layer Feb. 14, 2012
8110900 Manufacturing process of semiconductor device and semiconductor device Feb. 7, 2012
8071482 Manufacturing method of a silicon carbide semiconductor device Dec. 6, 2011
8067291 MOS field-effect transistor and manufacturing method thereof Nov. 29, 2011
8057690 Single silicon-on-insulator (SOI) wafer accelerometer fabrication Nov. 15, 2011
8043973 Mask overhang reduction or elimination after substrate etch Oct. 25, 2011
8017475 Process to improve high-performance capacitors in integrated MOS technologies Sep. 13, 2011
8003492 Epitaxial lift off stack having a unidirectionally shrunk handle and methods thereof Aug. 23, 2011
8003545 Method of forming an electronic device including forming features within a mask and a selective removal process Aug. 23, 2011
7998876 Method of producing semiconductor element Aug. 16, 2011
7893493 Stacking fault reduction in epitaxially grown silicon Feb. 22, 2011
7883950 Semiconductor device having reduced polysilicon pattern width and method of manufacturing the same Feb. 8, 2011

1 2 3 4 5 6 7 8

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