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Class Information
Number: 438/738
Name: Semiconductor device manufacturing: process > Chemical etching > Vapor phase etching (i.e., dry etching) > Differential etching of semiconductor substrate > Substrate possessing multiple layers > Selectively etching substrate possessing multiple layers of differing etch characteristics
Description: Process involving the etching of a multilayered substrate, using a single etching step, where the process parameters used causes a difference of the etching rate or characteristic in at least two different layers of the substrate.










Sub-classes under this class:

Class Number Class Name Patents
438/739 Lateral etching of intermediate layer (i.e., undercutting) 368
438/740 Utilizing etch stop layer 464


Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17

Patent Number Title Of Patent Date Issued
8710501 Electro-optical device, method of manufacturing the same, and electronic apparatus Apr. 29, 2014
8691704 Methods for forming semiconductor constructions, and methods for selectively etching silicon nitride relative to conductive material Apr. 8, 2014
8692339 Micromechanical component having a rear volume Apr. 8, 2014
8652926 Methods of forming capacitors Feb. 18, 2014
8652338 Magnetic recording medium and method of manufacturing the same Feb. 18, 2014
8647991 Method for forming dual damascene opening Feb. 11, 2014
8642370 Cavity open process to improve undercut Feb. 4, 2014
8642484 Method for manufacturing semiconductor device Feb. 4, 2014
8633117 Sputter and surface modification etch processing for metal patterning in integrated circuits Jan. 21, 2014
8629064 Multiple patterning lithography using spacer and self-aligned assist patterns Jan. 14, 2014
8603921 Maintaining mask integrity to form openings in wafers Dec. 10, 2013
8598044 Method of fabricating a semiconductor device Dec. 3, 2013
8599616 Three-dimensional NAND memory with stacked mono-crystalline channels Dec. 3, 2013
8592320 Method for forming fin-shaped semiconductor structure Nov. 26, 2013
8586189 Gas-barrier film and organic device comprising same Nov. 19, 2013
8580694 Method of patterning hard mask layer for defining deep trench Nov. 12, 2013
8574928 MRAM fabrication method with sidewall cleaning Nov. 5, 2013
8575035 Methods of forming varying depth trenches in semiconductor devices Nov. 5, 2013
8569182 Methods of fabricating three-dimensional semiconductor device Oct. 29, 2013
8569181 Manufacturing method of semiconductor apparatus and semiconductor apparatus Oct. 29, 2013
8563439 Method of pitch dimension shrinkage Oct. 22, 2013
8557612 Method for fabricating micro and nanostructures in a material Oct. 15, 2013
8557691 Method of fabricating semiconductor device having buried wiring and related device Oct. 15, 2013
8557706 Substrate processing method Oct. 15, 2013
8546268 Manufacturing integrated circuit components having multiple gate oxidations Oct. 1, 2013
8541313 Method for etching a sacrificial layer for a micro-machined structure Sep. 24, 2013
8536063 MRAM etching processes Sep. 17, 2013
8536064 Double patterning strategy for contact hole and trench in photolithography Sep. 17, 2013
8524604 Method for forming fine pattern of semiconductor device Sep. 3, 2013
8524608 Method for fabricating a patterned structure of a semiconductor device Sep. 3, 2013
8518795 Method of manufacturing semiconductor device Aug. 27, 2013
8513143 Semiconductor structure and method of manufacturing Aug. 20, 2013
8513138 Gas cluster ion beam etching process for Si-containing and Ge-containing materials Aug. 20, 2013
8513134 Semiconductor device producing method Aug. 20, 2013
8513086 Methods for etching doped oxides in the manufacture of microfeature devices Aug. 20, 2013
8512586 Gas cluster ion beam etching process for achieving target etch process metrics for multiple materials Aug. 20, 2013
8513131 Fin field effect transistor with variable channel thickness for threshold voltage tuning Aug. 20, 2013
8501609 Method for generating a three-dimensional NAND memory with mono-crystalline channels using sacrificial material Aug. 6, 2013
8486192 Thermalizing gas injectors for generating increased precursor gas, material deposition systems including such injectors, and related methods Jul. 16, 2013
8481426 Method of forming pattern structure and method of fabricating semiconductor device using the same Jul. 9, 2013
8476166 Manufacturing method of semiconductor device Jul. 2, 2013
8455364 Sidewall image transfer using the lithographic stack as the mandrel Jun. 4, 2013
8440576 Method for pitch reduction in integrated circuit fabrication May. 14, 2013
8435884 Method for forming an interconnect structure May. 7, 2013
8426316 Ta-TaN selective removal process for integrated device fabrication Apr. 23, 2013
8426299 Method of manufacturing semiconductor device Apr. 23, 2013
8415179 Method for manufacturing light emitting diode Apr. 9, 2013
8404130 Method of manufacturing a discrete track medium type perpendicular magnetic recording medium Mar. 26, 2013
8394724 Processing with reduced line end shortening ratio Mar. 12, 2013
8394280 Resist pattern protection technique for double patterning application Mar. 12, 2013

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17










 
 
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