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Class Information
Number: 438/737
Name: Semiconductor device manufacturing: process > Chemical etching > Vapor phase etching (i.e., dry etching) > Differential etching of semiconductor substrate > Substrate possessing multiple layers
Description: Processes wherein the semiconductor substrate undergoing etching possesses plural layers.

Sub-classes under this class:

Class Number Class Name Patents
438/742 Electrically conductive material (e.g., metal, conductive oxide, etc.) 312
438/738 Selectively etching substrate possessing multiple layers of differing etch characteristics 817
438/744 Silicon nitride 253
438/743 Silicon oxide or glass 473

Patents under this class:
1 2 3 4 5 6

Patent Number Title Of Patent Date Issued
8669188 Method for making a pattern from sidewall image transfer Mar. 11, 2014
8642484 Method for manufacturing semiconductor device Feb. 4, 2014
8642483 Substrate processing with shrink etching step Feb. 4, 2014
8629064 Multiple patterning lithography using spacer and self-aligned assist patterns Jan. 14, 2014
8598044 Method of fabricating a semiconductor device Dec. 3, 2013
8592327 Formation of SiOCl-containing layer on exposed low-k surfaces to reduce low-k damage Nov. 26, 2013
8592320 Method for forming fin-shaped semiconductor structure Nov. 26, 2013
8569178 Plasma processing method and plasma processing apparatus Oct. 29, 2013
8557706 Substrate processing method Oct. 15, 2013
8541313 Method for etching a sacrificial layer for a micro-machined structure Sep. 24, 2013
8536063 MRAM etching processes Sep. 17, 2013
8536048 Method of manufacturing electronic component Sep. 17, 2013
8529776 High lateral to vertical ratio etch process for device manufacturing Sep. 10, 2013
8513143 Semiconductor structure and method of manufacturing Aug. 20, 2013
8512586 Gas cluster ion beam etching process for achieving target etch process metrics for multiple materials Aug. 20, 2013
8481426 Method of forming pattern structure and method of fabricating semiconductor device using the same Jul. 9, 2013
8476166 Manufacturing method of semiconductor device Jul. 2, 2013
8461047 Method for processing amorphous carbon film, and semiconductor device manufacturing method using the method Jun. 11, 2013
8455364 Sidewall image transfer using the lithographic stack as the mandrel Jun. 4, 2013
8453312 Method of manufacturing vibrating micromechanical structures Jun. 4, 2013
8440513 Method of semiconductor processing May. 14, 2013
8420522 Semiconductor device and manufacturing method of the same Apr. 16, 2013
8420547 Plasma processing method Apr. 16, 2013
8418359 Method for manufacturing circuit pattern-provided substrate Apr. 16, 2013
8409457 Methods of forming a photoresist-comprising pattern on a substrate Apr. 2, 2013
8394280 Resist pattern protection technique for double patterning application Mar. 12, 2013
8377785 Planar field effect transistor structure having an angled crystallographic etch-defined source/drain recess and a method of forming the transistor structure Feb. 19, 2013
8314036 Methods of forming fine patterns of semiconductor device Nov. 20, 2012
8309457 Multilayer low reflectivity hard mask and process therefor Nov. 13, 2012
8298954 Sidewall image transfer process employing a cap material layer for a metal nitride layer Oct. 30, 2012
8298961 Patterns of semiconductor device and method of forming the same Oct. 30, 2012
8283254 Etching method and etching apparatus Oct. 9, 2012
8273591 Super lattice/quantum well nanowires Sep. 25, 2012
8273256 Method for manufacturing wiring structure of wiring board Sep. 25, 2012
8242025 Method for producing semiconductor chip, and field effect transistor and method for manufacturing same Aug. 14, 2012
8241950 System and method to manufacture an implantable electrode Aug. 14, 2012
8198111 Array substrate for liquid crystal display device and method of manufacturing the same Jun. 12, 2012
8173550 Method for positioning spacers for pitch multiplication May. 8, 2012
8163583 Manufacturing method of micro electronic mechanical system structure Apr. 24, 2012
8158508 Structure and manufacturing method of a chip scale package Apr. 17, 2012
8153531 Semiconductor device and method of manufacturing the same Apr. 10, 2012
8138096 Plasma etching method Mar. 20, 2012
8138059 Semiconductor device manufacturing method Mar. 20, 2012
8130312 Reflowable camera module with integrated flash Mar. 6, 2012
8123968 Multiple deposition for integration of spacers in pitch multiplication process Feb. 28, 2012
8124543 Method for manufacturing semiconductor laser diode Feb. 28, 2012
8105949 Substrate processing method Jan. 31, 2012
8088664 Method of manufacturing integrated deep and shallow trench isolation structures Jan. 3, 2012
8088692 Method for fabricating a multilayer microstructure with balancing residual stress capability Jan. 3, 2012
8084352 Method of manufacturing semiconductor device Dec. 27, 2011

1 2 3 4 5 6

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