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Class Information
Number: 438/736
Name: Semiconductor device manufacturing: process > Chemical etching > Vapor phase etching (i.e., dry etching) > Differential etching of semiconductor substrate > Utilizing multilayered mask
Description: Processes wherein selected regions of the semiconductor substrate are protected from the effects of the etching gas through use of a mask composed of plural layers.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8692339 Micromechanical component having a rear volume Apr. 8, 2014
8685858 Formation of metal nanospheres and microspheres Apr. 1, 2014
8673681 Electrical device fabrication Mar. 18, 2014
8669188 Method for making a pattern from sidewall image transfer Mar. 11, 2014
8642484 Method for manufacturing semiconductor device Feb. 4, 2014
8642482 Plasma etching method, control program and computer storage medium Feb. 4, 2014
8637945 Component having a micromechanical microphone structure, and method for its production Jan. 28, 2014
8637407 Methods of forming fine patterns in semiconductor devices Jan. 28, 2014
8633117 Sputter and surface modification etch processing for metal patterning in integrated circuits Jan. 21, 2014
8623772 Method of forming patterns of semiconductor device Jan. 7, 2014
8623226 Making stacked pancake motors using patterned adhesives Jan. 7, 2014
8623229 Manufacturing techniques to limit damage on workpiece with varying topographies Jan. 7, 2014
8617999 Method of manufacturing semiconductor device and computer readable medium for storing pattern size setting program Dec. 31, 2013
8609491 Method for fabricating semiconductor device with buried bit lines Dec. 17, 2013
8598036 Method for forming fine pattern having variable width and method for manufacturing semiconductor device using the same Dec. 3, 2013
8598041 Method for positioning spacers in pitch multiplication Dec. 3, 2013
8598043 Methods of forming semiconductor constructions Dec. 3, 2013
8598044 Method of fabricating a semiconductor device Dec. 3, 2013
8592321 Method for fabricating an aperture Nov. 26, 2013
8575034 Fabricating method of semiconductor element Nov. 5, 2013
8569181 Manufacturing method of semiconductor apparatus and semiconductor apparatus Oct. 29, 2013
8563371 Method of forming semiconductor device Oct. 22, 2013
8557706 Substrate processing method Oct. 15, 2013
8551883 Masking method Oct. 8, 2013
8551843 Methods of forming CMOS semiconductor devices Oct. 8, 2013
8546218 Method for fabricating semiconductor device with buried word line Oct. 1, 2013
8530358 Vertical cavity surface emitting laser and manufacturing method thereof Sep. 10, 2013
8524604 Method for forming fine pattern of semiconductor device Sep. 3, 2013
8524609 Method of fabricating semiconductor device Sep. 3, 2013
8513143 Semiconductor structure and method of manufacturing Aug. 20, 2013
8512583 Method using block copolymers and a hard electroplated mask for making a master disk for nanoimprinting patterned magnetic recording disks Aug. 20, 2013
8492259 Method of forming metal gate structure Jul. 23, 2013
8481426 Method of forming pattern structure and method of fabricating semiconductor device using the same Jul. 9, 2013
8481431 Method for opening one-side contact region of vertical transistor and method for fabricating one-side junction region using the same Jul. 9, 2013
8476168 Non-conformal hardmask deposition for through silicon etch Jul. 2, 2013
8476166 Manufacturing method of semiconductor device Jul. 2, 2013
8470717 Method of forming current tracks on semiconductors Jun. 25, 2013
8461053 Self-aligned NAND flash select-gate wordlines for spacer double patterning Jun. 11, 2013
8455364 Sidewall image transfer using the lithographic stack as the mandrel Jun. 4, 2013
8445382 Side wall pore sealing for low-k dielectrics May. 21, 2013
8440575 Method of fabricating semiconductor device May. 14, 2013
8440513 Method of semiconductor processing May. 14, 2013
8435419 Methods of processing substrates having metal materials May. 7, 2013
8420408 Semiconductor memory and manufacturing method thereof Apr. 16, 2013
8420499 Concave-convex pattern forming method and magnetic tunnel junction element forming method Apr. 16, 2013
8420542 Method of patterned image reversal Apr. 16, 2013
8409457 Methods of forming a photoresist-comprising pattern on a substrate Apr. 2, 2013
8404592 Methods for fabricating FinFET semiconductor devices using L-shaped spacers Mar. 26, 2013
8394280 Resist pattern protection technique for double patterning application Mar. 12, 2013
8395238 Method of manufacturing semiconductor device, and semiconductor device Mar. 12, 2013

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