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Class Information
Number: 438/735
Name: Semiconductor device manufacturing: process > Chemical etching > Vapor phase etching (i.e., dry etching) > Differential etching of semiconductor substrate
Description: Processes directed to (a) contact only selected surface areas of the substrate with the etchant to remove a constituent part of the substrate at the selected surface areas only or (b) cause the substrate to be treated at different rates in different areas to produce a nonuniform surface.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7344994 |
Multiple layer etch stop and etching method |
Mar. 18, 2008 |
| 7344997 |
Semiconductor substrate, semiconductor device, method for manufacturing semiconductor substrate and method for manufacturing semiconductor device |
Mar. 18, 2008 |
| 7341943 |
Post etch copper cleaning using dry plasma |
Mar. 11, 2008 |
| 7309654 |
Technique for reducing etch damage during the formation of vias and trenches in interlayer dielectrics |
Dec. 18, 2007 |
| 7291282 |
Method of fabricating a mold for imprinting a structure |
Nov. 6, 2007 |
| 7282447 |
Method for an integrated circuit contact |
Oct. 16, 2007 |
| 7282455 |
Method of producing a diffraction grating |
Oct. 16, 2007 |
| 7217631 |
Semiconductor device and method for fabricating the device |
May. 15, 2007 |
| 7214626 |
Etching process for decreasing mask defect |
May. 8, 2007 |
| 7208396 |
Permanent adherence of the back end of a wafer to an electrical component or sub-assembly |
Apr. 24, 2007 |
| 7205244 |
Patterning substrates employing multi-film layers defining etch-differential interfaces |
Apr. 17, 2007 |
| 7166232 |
Method for producing a solid body including a microstructure |
Jan. 23, 2007 |
| 7153710 |
Etching method, method of manufacturing semiconductor device, and semiconductor device |
Dec. 26, 2006 |
| 7141275 |
Imprinting lithography using the liquid/solid transition of metals and their alloys |
Nov. 28, 2006 |
| 7135360 |
Liquid crystal display device and method of fabricating the same |
Nov. 14, 2006 |
| 7109125 |
Selective fabrication of high capacitance density areas in a low dielectric constant material |
Sep. 19, 2006 |
| 7105457 |
Semiconductor device manufacturing method and apparatus used in the semiconductor device manufacturing method |
Sep. 12, 2006 |
| 7105436 |
Method for in-line monitoring of via/contact holes etch process based on test structures in semiconductor wafer manufacturing |
Sep. 12, 2006 |
| 7098143 |
Etching method using an at least semi-solid media |
Aug. 29, 2006 |
| 7074718 |
Method of fabricating a semiconductor device having a buried and enlarged contact hole |
Jul. 11, 2006 |
| 7064081 |
Semiconductor device and method for producing the same |
Jun. 20, 2006 |
| 7064080 |
Semiconductor processing method using photoresist and an antireflective coating |
Jun. 20, 2006 |
| 7060197 |
Micromechanical mass flow sensor and method for the production thereof |
Jun. 13, 2006 |
| 7049246 |
Method for selective fabrication of high capacitance density areas in a low dielectric constant material |
May. 23, 2006 |
| 7041604 |
Method of patterning surfaces while providing greater control of recess anisotropy |
May. 9, 2006 |
| 7029965 |
Semiconductor device and manufacturing method thereof |
Apr. 18, 2006 |
| 7015149 |
Simplified dual damascene process |
Mar. 21, 2006 |
| 7012029 |
Method of forming a lamination film pattern and improved lamination film pattern |
Mar. 14, 2006 |
| 7008547 |
Solid phase sensors |
Mar. 7, 2006 |
| 6995094 |
Method for deep trench etching through a buried insulator layer |
Feb. 7, 2006 |
| 6982228 |
Methods of etching a contact opening over a node location on a semiconductor substrate |
Jan. 3, 2006 |
| 6974778 |
Semiconductor device manufactured with auxillary mask and method for producing the same |
Dec. 13, 2005 |
| 6962878 |
Method to reduce photoresist mask line dimensions |
Nov. 8, 2005 |
| 6955988 |
Method of forming a cavity and SOI in a semiconductor substrate |
Oct. 18, 2005 |
| 6955992 |
One mask PT/PCMO/PT stack etching process for RRAM applications |
Oct. 18, 2005 |
| 6943092 |
Methods of manufacturing semiconductor devices |
Sep. 13, 2005 |
| 6936484 |
Method of manufacturing semiconductor device and semiconductor device |
Aug. 30, 2005 |
| 6933236 |
Method for forming pattern using argon fluoride photolithography |
Aug. 23, 2005 |
| 6930051 |
Method to fabricate multi-level silicon-based microstructures via use of an etching delay layer |
Aug. 16, 2005 |
| 6905943 |
Forming a trench to define one or more isolation regions in a semiconductor structure |
Jun. 14, 2005 |
| 6900139 |
Method for photoresist trim endpoint detection |
May. 31, 2005 |
| 6900123 |
BARC etch comprising a selective etch chemistry and a high polymerizing gas for CD control |
May. 31, 2005 |
| 6893938 |
STI formation for vertical and planar transistors |
May. 17, 2005 |
| 6887785 |
Etching openings of different depths using a single mask layer method and structure |
May. 3, 2005 |
| 6878638 |
Multi-level integrated circuit for wide-gap substrate bonding |
Apr. 12, 2005 |
| 6875704 |
Method for forming pattern using printing process |
Apr. 5, 2005 |
| 6869892 |
Method of oxidizing work pieces and oxidation system |
Mar. 22, 2005 |
| 6867116 |
Fabrication method of sub-resolution pitch for integrated circuits |
Mar. 15, 2005 |
| 6864182 |
Method of producing large-area membrane masks by dry etching |
Mar. 8, 2005 |
| 6858153 |
Integrated low K dielectrics and etch stops |
Feb. 22, 2005 |
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