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Class Information
Number: 438/735
Name: Semiconductor device manufacturing: process > Chemical etching > Vapor phase etching (i.e., dry etching) > Differential etching of semiconductor substrate
Description: Processes directed to (a) contact only selected surface areas of the substrate with the etchant to remove a constituent part of the substrate at the selected surface areas only or (b) cause the substrate to be treated at different rates in different areas to produce a nonuniform surface.


Sub-classes under this class:

Class Number Class Name Patents
438/737 Substrate possessing multiple layers 200
438/736 Utilizing multilayered mask 304


Patents under this class:
1 2 3 4 5 6

Patent Number Title Of Patent Date Issued
7625603 Crack and residue free conformal deposited silicon oxide with predictable and uniform etching characteristics Dec. 1, 2009
7608504 Memory and manufacturing method thereof Oct. 27, 2009
7595206 Manufacturing method for semiconductor light emitting device Sep. 29, 2009
7592264 Process for removing material from substrates Sep. 22, 2009
7569489 High performance 3D FET structures, and methods for forming the same using preferential crystallographic etching Aug. 4, 2009
7560389 Method for fabricating semiconductor element Jul. 14, 2009
7547635 Process for etching dielectric films with improved resist and/or etch profile characteristics Jun. 16, 2009
7534721 Semiconductor device manufacturing device May. 19, 2009
7534686 Multi-structured Si-fin and method of manufacture May. 19, 2009
7528075 Self-masking defect removing method May. 5, 2009
7524770 Methods of forming image sensor microlens structures Apr. 28, 2009
7485485 Method and apparatus for making a MEMS scanner Feb. 3, 2009
7473648 Double exposure double resist layer process for forming gate patterns Jan. 6, 2009
7470630 Approach to reduce parasitic capacitance from dummy fill Dec. 30, 2008
7456112 Method of fabricating micro-needle array Nov. 25, 2008
7435685 Method of forming a low-K dual damascene interconnect structure Oct. 14, 2008
7432213 Electrical connection pattern in an electronic panel Oct. 7, 2008
7429534 Etching a nitride-based heterostructure Sep. 30, 2008
7427569 Metal etching process and rework method thereof Sep. 23, 2008
7419915 Laser assisted chemical etching method for release microscale and nanoscale devices Sep. 2, 2008
7410907 Fabricating integrated devices using embedded masks Aug. 12, 2008
7381640 Method of forming metal line and contact plug of flash memory device Jun. 3, 2008
7344997 Semiconductor substrate, semiconductor device, method for manufacturing semiconductor substrate and method for manufacturing semiconductor device Mar. 18, 2008
7344994 Multiple layer etch stop and etching method Mar. 18, 2008
7341943 Post etch copper cleaning using dry plasma Mar. 11, 2008
7309654 Technique for reducing etch damage during the formation of vias and trenches in interlayer dielectrics Dec. 18, 2007
7291282 Method of fabricating a mold for imprinting a structure Nov. 6, 2007
7282447 Method for an integrated circuit contact Oct. 16, 2007
7282455 Method of producing a diffraction grating Oct. 16, 2007
7217631 Semiconductor device and method for fabricating the device May. 15, 2007
7214626 Etching process for decreasing mask defect May. 8, 2007
7208396 Permanent adherence of the back end of a wafer to an electrical component or sub-assembly Apr. 24, 2007
7205244 Patterning substrates employing multi-film layers defining etch-differential interfaces Apr. 17, 2007
7166232 Method for producing a solid body including a microstructure Jan. 23, 2007
7153710 Etching method, method of manufacturing semiconductor device, and semiconductor device Dec. 26, 2006
7141275 Imprinting lithography using the liquid/solid transition of metals and their alloys Nov. 28, 2006
7135360 Liquid crystal display device and method of fabricating the same Nov. 14, 2006
7109125 Selective fabrication of high capacitance density areas in a low dielectric constant material Sep. 19, 2006
7105436 Method for in-line monitoring of via/contact holes etch process based on test structures in semiconductor wafer manufacturing Sep. 12, 2006
7105457 Semiconductor device manufacturing method and apparatus used in the semiconductor device manufacturing method Sep. 12, 2006
7098143 Etching method using an at least semi-solid media Aug. 29, 2006
7074718 Method of fabricating a semiconductor device having a buried and enlarged contact hole Jul. 11, 2006
7064081 Semiconductor device and method for producing the same Jun. 20, 2006
7064080 Semiconductor processing method using photoresist and an antireflective coating Jun. 20, 2006
7060197 Micromechanical mass flow sensor and method for the production thereof Jun. 13, 2006
7049246 Method for selective fabrication of high capacitance density areas in a low dielectric constant material May. 23, 2006
7041604 Method of patterning surfaces while providing greater control of recess anisotropy May. 9, 2006
7029965 Semiconductor device and manufacturing method thereof Apr. 18, 2006
7015149 Simplified dual damascene process Mar. 21, 2006
7012029 Method of forming a lamination film pattern and improved lamination film pattern Mar. 14, 2006

1 2 3 4 5 6


 
 
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