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Class Information
Number: 438/733
Name: Semiconductor device manufacturing: process > Chemical etching > Vapor phase etching (i.e., dry etching) > Utilizing electromagnetic or wave energy > Using or orientation dependent etchant (i.e., anisotropic etchant)
Description: Processes wherein the vapor phase etching of the semiconductor substrate is produced through the use of an etchant possessing varying etching rates upon varying crystallographic orientations.

Patents under this class:
1 2 3 4 5

Patent Number Title Of Patent Date Issued
8685863 Semiconductor process, semiconductor element and package having semiconductor element Apr. 1, 2014
8664040 Exposing connectors in packages through selective treatment Mar. 4, 2014
8633116 Dry etching method Jan. 21, 2014
8597529 Method for processing substrate and method for producing liquid ejection head and substrate for liquid ejection head Dec. 3, 2013
8598040 ETCH process for 3D flash structures Dec. 3, 2013
8569181 Manufacturing method of semiconductor apparatus and semiconductor apparatus Oct. 29, 2013
8557706 Substrate processing method Oct. 15, 2013
8557613 Methods for designing, fabricating, and predicting shape formations in a material Oct. 15, 2013
8557612 Method for fabricating micro and nanostructures in a material Oct. 15, 2013
8551846 Methods for fabricating semiconductor devices Oct. 8, 2013
8551886 CMP process for processing STI on two distinct silicon planes Oct. 8, 2013
8501627 Profile control in dielectric etch Aug. 6, 2013
8501628 Differential metal gate etching process Aug. 6, 2013
8455314 Transistors comprising high-K metal gate electrode structures and embedded strain-inducing semiconductor alloys formed in a late stage Jun. 4, 2013
8450166 Method of fabricating semiconductor devices May. 28, 2013
8450167 Method of fabricating semiconductor devices May. 28, 2013
8450165 Semiconductor device having tipless epitaxial source/drain regions May. 28, 2013
8377828 Method of manufacturing a substrate for a liquid discharge head Feb. 19, 2013
8329589 Semiconductor device with gate-undercutting recessed region Dec. 11, 2012
8329591 Method of manufacturing a semiconductor device Dec. 11, 2012
8298948 Capping of copper interconnect lines in integrated circuit devices Oct. 30, 2012
8273591 Super lattice/quantum well nanowires Sep. 25, 2012
8241940 Double-sided reusable template for fabrication of semiconductor substrates for photovoltaic cell and microelectronics device manufacturing Aug. 14, 2012
8236710 Technique to create a buried plate in embedded dynamic random access memory device Aug. 7, 2012
8222158 Electronic device, method of manufacturing the same, display and sensor Jul. 17, 2012
8216877 Phase-change memory and fabrication method thereof Jul. 10, 2012
8202439 Diaphragm and device for measuring cellular potential using the same, manufacturing method of the diaphragm Jun. 19, 2012
8158529 Method for forming active pillar of vertical channel transistor Apr. 17, 2012
8133794 Semiconductor structure and method of manufacture Mar. 13, 2012
8129286 Reducing effective dielectric constant in semiconductor devices Mar. 6, 2012
8105949 Substrate processing method Jan. 31, 2012
8101447 Light emitting diode element and method for fabricating the same Jan. 24, 2012
8093119 CMOS microelectromechanical system (MEMS) device and fabrication method thereof Jan. 10, 2012
8080478 Method of producing mask Dec. 20, 2011
8026173 Semiconductor structure, in particular phase change memory device having a uniform height heater Sep. 27, 2011
8012365 Deep anisotropic silicon etch method Sep. 6, 2011
8003545 Method of forming an electronic device including forming features within a mask and a selective removal process Aug. 23, 2011
7981305 High-density field emission elements and a method for forming said emission elements Jul. 19, 2011
7981804 Manufacturing method of semiconductor device Jul. 19, 2011
7951670 Flash memory cell with split gate structure and method for forming the same May. 31, 2011
7947609 Method for etching low-k material using an oxide hard mask May. 24, 2011
7943449 Semiconductor component structure with vertical dielectric layers May. 17, 2011
7935640 Method for forming a damascene structure May. 3, 2011
7927966 Method of manufacturing openings in a substrate, a via in substrate, and a semiconductor device comprising such a via Apr. 19, 2011
7883972 Semiconductor device having a fin structure and method of manufacturing the same Feb. 8, 2011
7879726 Methods of forming semiconductor devices using selective etching of an active region through a hardmask Feb. 1, 2011
7875506 Etching method and manufacturing method of semiconductor device Jan. 25, 2011
7833887 Notched-base spacer profile for non-planar transistors Nov. 16, 2010
7821044 Transistor with improved tip profile and method of manufacture thereof Oct. 26, 2010
7816221 Dielectric ledge for high frequency devices Oct. 19, 2010

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