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Class Information
Number: 438/725
Name: Semiconductor device manufacturing: process > Chemical etching > Vapor phase etching (i.e., dry etching) > Utilizing electromagnetic or wave energy > By creating electric field (e.g., plasma, glow discharge, etc.) > Organic material (e.g., resist, etc.)
Description: Processes wherein the material undergoing etching with the energized gas is an organic material.










Patents under this class:

Patent Number Title Of Patent Date Issued
8710501 Electro-optical device, method of manufacturing the same, and electronic apparatus Apr. 29, 2014
8703002 Plasma processing apparatus, plasma processing method and storage medium Apr. 22, 2014
8703000 Slimming method of carbon-containing thin film and oxidation apparatus Apr. 22, 2014
8691701 Strip with reduced low-K dielectric damage Apr. 8, 2014
8673789 Method for fabricating carbon hard mask and method for fabricating patterns of semiconductor device using the same Mar. 18, 2014
8664124 Method for etching organic hardmasks Mar. 4, 2014
8664122 Method of fabricating a semiconductor device Mar. 4, 2014
8658542 Coarse grid design methods and structures Feb. 25, 2014
8658050 Method to transfer lithographic patterns into inorganic substrates Feb. 25, 2014
8657961 Method for UV based silylation chamber clean Feb. 25, 2014
8652964 Method and apparatus for the formation of an electronic device Feb. 18, 2014
8652338 Magnetic recording medium and method of manufacturing the same Feb. 18, 2014
8633116 Dry etching method Jan. 21, 2014
8614140 Semiconductor device manufacturing apparatus Dec. 24, 2013
8598042 Device manufacturing and cleaning method Dec. 3, 2013
8591661 Low damage photoresist strip method for low-K dielectrics Nov. 26, 2013
8574369 Method of removing resist and apparatus therefor Nov. 5, 2013
8569179 Method for etching organic hardmasks Oct. 29, 2013
8551888 Method of forming patterns for semiconductor device Oct. 8, 2013
8551288 Apparatus and method for removing a photoresist structure from a substrate Oct. 8, 2013
8535549 Method for forming stair-step structures Sep. 17, 2013
8530357 Method for manufacturing semiconductor device and apparatus for manufacturing semiconductor device Sep. 10, 2013
8530354 Substrate processing method Sep. 10, 2013
8528224 Systems and methods for at least partially converting films to silicon oxide and/or improving film quality using ultraviolet curing in steam and densification of films using UV curing in ammon Sep. 10, 2013
8524609 Method of fabricating semiconductor device Sep. 3, 2013
8518832 Process for masking and removal of residue from complex shapes Aug. 27, 2013
8513135 Methods of modifying oxide spacers Aug. 20, 2013
8502388 Semiconductor device and method for fabricating the same Aug. 6, 2013
8501619 Methods for forming a plurality of contact holes in a microelectronic device Aug. 6, 2013
8492178 Method of monitoring fabrication processing including edge bead removal processing Jul. 23, 2013
8491805 Semiconductor device manufacturing method and plasma etching apparatus Jul. 23, 2013
8486840 Inverse spacer processing Jul. 16, 2013
8486772 Method of manufacturing SOI substrate Jul. 16, 2013
8486291 Plasma processing method Jul. 16, 2013
8475666 Method for making toughening agent materials Jul. 2, 2013
8461053 Self-aligned NAND flash select-gate wordlines for spacer double patterning Jun. 11, 2013
8460565 Process for fabricating patterned magnetic recording device Jun. 11, 2013
8450212 Method of reducing critical dimension process bias differences between narrow and wide damascene wires May. 28, 2013
8445382 Side wall pore sealing for low-k dielectrics May. 21, 2013
8444869 Simultaneous front side ash and backside clean May. 21, 2013
8426315 Method of manufacturing semiconductor device Apr. 23, 2013
8415000 Patterned inorganic layers, radiation based patterning compositions and corresponding methods Apr. 9, 2013
8409457 Methods of forming a photoresist-comprising pattern on a substrate Apr. 2, 2013
8404590 Plasma processing method and storage medium Mar. 26, 2013
8394724 Processing with reduced line end shortening ratio Mar. 12, 2013
8388852 Method for fabricating touch sensor panels Mar. 5, 2013
8383522 Micro pattern forming method Feb. 26, 2013
8383520 Method of etching organosiloxane dielectric material and semiconductor device thereof Feb. 26, 2013
8383001 Plasma etching method, plasma etching apparatus and storage medium Feb. 26, 2013
8372754 Methods for removing photoresist defects and a method for processing a semiconductor device structure Feb. 12, 2013











 
 
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