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Class Information
Number: 438/718
Name: Semiconductor device manufacturing: process > Chemical etching > Vapor phase etching (i.e., dry etching) > Utilizing electromagnetic or wave energy > By creating electric field (e.g., plasma, glow discharge, etc.) > Compound semiconductor
Description: Processes wherein the material undergoing etching with the energized gas is a compound semiconductor.

Patents under this class:
1 2 3 4 5

Patent Number Title Of Patent Date Issued
8664123 Method for manufacturing nitride semiconductor substrate Mar. 4, 2014
8652343 Method for selectively removing material from the surface of a substrate, masking material for a wafer, and wafer with masking material Feb. 18, 2014
8586859 Wafer level interconnection of inverted metamorphic multijunction solar cells Nov. 19, 2013
8575033 Carbosilane precursors for low temperature film deposition Nov. 5, 2013
8546269 Top-down nanowire thinning processes Oct. 1, 2013
8491805 Semiconductor device manufacturing method and plasma etching apparatus Jul. 23, 2013
8476166 Manufacturing method of semiconductor device Jul. 2, 2013
8440571 Methods for deposition of silicon carbide and silicon carbonitride films May. 14, 2013
8330036 Method of fabrication and structure for multi-junction solar cell formed upon separable substrate Dec. 11, 2012
8288290 Integration CMOS compatible of micro/nano optical gain materials Oct. 16, 2012
8263853 Wafer level interconnection of inverted metamorphic multijunction solar cells Sep. 11, 2012
8263500 Photoelectrochemical etching for laser facets Sep. 11, 2012
8232212 Within-sequence metrology based process tuning for adaptive self-aligned double patterning Jul. 31, 2012
8222157 Hybrid RF capacitively and inductively coupled plasma source using multifrequency RF powers and methods of use thereof Jul. 17, 2012
8211808 Silicon-selective dry etch for carbon-containing films Jul. 3, 2012
8173891 Monolithic, multi-bandgap, tandem, ultra-thin, strain-counterbalanced, photovoltaic energy converters with optimal subcell bandgaps May. 8, 2012
8133818 Method of forming a hard mask pattern in a semiconductor device Mar. 13, 2012
8119532 Inductively coupled dual zone processing chamber with single planar antenna Feb. 21, 2012
8105953 Method of manufacturing a semiconductor device Jan. 31, 2012
8067687 High-efficiency, monolithic, multi-bandgap, tandem photovoltaic energy converters Nov. 29, 2011
RE42955 GaN-based permeable base transistor and method of fabrication Nov. 22, 2011
8021564 Method for detecting an end point of resist peeling, method and apparatus for peeling resist, and computer-readable storage medium Sep. 20, 2011
7964424 Method for manufacturing nitride semiconductor light-emitting element Jun. 21, 2011
7948075 Silicon nitride substrate, method of manufacturing the same, and silicon nitride circuit board and semiconductor module using the same May. 24, 2011
7935641 Thin film etching method May. 3, 2011
7892979 Columnar structured material and method of manufacturing the same Feb. 22, 2011
7842617 Etching method and etching apparatus Nov. 30, 2010
7828987 Organic BARC etch process capable of use in the formation of low K dual damascene integrated circuits Nov. 9, 2010
7811891 Method to control the gate sidewall profile by graded material composition Oct. 12, 2010
RE41632 Liquid crystal display device and method of manufacturing the same Sep. 7, 2010
7776752 Method of etching for multi-layered structure of semiconductors in group III-V and method for manufacturing vertical cavity surface emitting laser device Aug. 17, 2010
7767596 Wafer support pin for preventing slip dislocation during annealing of water and wafer annealing method using the same Aug. 3, 2010
7758762 Method for manufacturing an electron-emitting device with first and second carbon films Jul. 20, 2010
7737043 Inspection method of compound semiconductor substrate, compound semiconductor substrate, surface treatment method of compound semiconductor substrate, and method of producing compound semicond Jun. 15, 2010
7718499 Method of fabricating a semiconductor device May. 18, 2010
7691735 Method for manufacturing metal chips by plasma from a layer comprising several elements Apr. 6, 2010
7682991 Method of manufacturing silicon carbide semiconductor device Mar. 23, 2010
7682937 Method of treating a substrate, method of processing a substrate using a laser beam, and arrangement Mar. 23, 2010
7674395 Laser etching method and apparatus therefor Mar. 9, 2010
7666795 Method for manufacturing semiconductor device Feb. 23, 2010
7648915 Methods of forming semiconductor constructions, and methods of recessing materials within openings Jan. 19, 2010
7585698 Thin film transistor having oxide semiconductor layer and manufacturing method thereof Sep. 8, 2009
7575998 Semiconductor device and metal line fabrication method of the same Aug. 18, 2009
7544611 Method of manufacturing III-V nitride semiconductor device Jun. 9, 2009
7528076 Method for manufacturing gate oxide layer with different thicknesses May. 5, 2009
7482177 Method for manufacturing optical device, and optical device wafer Jan. 27, 2009
7436075 Ion beam irradiation apparatus and ion beam irradiation method Oct. 14, 2008
7429534 Etching a nitride-based heterostructure Sep. 30, 2008
7413958 GaN-based permeable base transistor and method of fabrication Aug. 19, 2008
7390750 Method of patterning elements within a semiconductor topography Jun. 24, 2008

1 2 3 4 5

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