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Class Information
Number: 438/717
Name: Semiconductor device manufacturing: process > Chemical etching > Vapor phase etching (i.e., dry etching) > Utilizing electromagnetic or wave energy > By creating electric field (e.g., plasma, glow discharge, etc.) > Utilizing multilayered mask
Description: Processes wherein selected regions of the semiconductor substrate are protected from the effects of the energized gas through use of a mask composed of plural layers.










Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13

Patent Number Title Of Patent Date Issued
8703606 Method for manufacturing semiconductor device having a wiring structure Apr. 22, 2014
8703570 Methods of fabricating substrates Apr. 22, 2014
8685858 Formation of metal nanospheres and microspheres Apr. 1, 2014
8673787 Method to reduce charge buildup during high aspect ratio contact etch Mar. 18, 2014
8669188 Method for making a pattern from sidewall image transfer Mar. 11, 2014
8652343 Method for selectively removing material from the surface of a substrate, masking material for a wafer, and wafer with masking material Feb. 18, 2014
8652968 Method of manufacturing a semiconductor device Feb. 18, 2014
8647980 Method of forming wiring and method of manufacturing semiconductor substrates Feb. 11, 2014
8642482 Plasma etching method, control program and computer storage medium Feb. 4, 2014
8637407 Methods of forming fine patterns in semiconductor devices Jan. 28, 2014
8633117 Sputter and surface modification etch processing for metal patterning in integrated circuits Jan. 21, 2014
8623229 Manufacturing techniques to limit damage on workpiece with varying topographies Jan. 7, 2014
8623771 Method for fabricating micropattern of semiconductor device Jan. 7, 2014
8617998 Method of forming a micro-pattern for semiconductor devices Dec. 31, 2013
8609549 Plasma etching method, plasma etching apparatus, and computer-readable storage medium Dec. 17, 2013
8603884 Methods of fabricating substrates Dec. 10, 2013
8598041 Method for positioning spacers in pitch multiplication Dec. 3, 2013
8580675 Two-track cross-connect in double-patterned structure using rectangular via Nov. 12, 2013
8575020 Pattern-split decomposition strategy for double-patterned lithography process Nov. 5, 2013
8569178 Plasma processing method and plasma processing apparatus Oct. 29, 2013
8557709 Plasma processing apparatus and plasma processing method Oct. 15, 2013
8551843 Methods of forming CMOS semiconductor devices Oct. 8, 2013
8551888 Method of forming patterns for semiconductor device Oct. 8, 2013
8546268 Manufacturing integrated circuit components having multiple gate oxidations Oct. 1, 2013
8529779 Methods for forming surface features using self-assembling masks Sep. 10, 2013
8524608 Method for fabricating a patterned structure of a semiconductor device Sep. 3, 2013
8524609 Method of fabricating semiconductor device Sep. 3, 2013
8513136 Memory devices and method of manufacturing the same Aug. 20, 2013
8513114 Method for forming a dual damascene interconnect structure Aug. 20, 2013
8497213 Plasma processing method Jul. 30, 2013
8491800 Manufacturing of hard masks for patterning magnetic media Jul. 23, 2013
8486741 Process for etching trenches in an integrated optical device Jul. 16, 2013
8486842 Method of selectively removing patterned hard mask Jul. 16, 2013
8475872 Patterning of thin film layers Jul. 2, 2013
8470715 CD bias loading control with ARC layer open Jun. 25, 2013
8461053 Self-aligned NAND flash select-gate wordlines for spacer double patterning Jun. 11, 2013
8455364 Sidewall image transfer using the lithographic stack as the mandrel Jun. 4, 2013
8450119 Magnetic tunnel junction patterning using Ta/TaN as hard mask May. 28, 2013
8445382 Side wall pore sealing for low-k dielectrics May. 21, 2013
8440570 Method for manufacturing semiconductor device May. 14, 2013
8440569 Method of eliminating a lithography operation May. 14, 2013
8435419 Methods of processing substrates having metal materials May. 7, 2013
8420540 Sub-lithographic printing method Apr. 16, 2013
8420499 Concave-convex pattern forming method and magnetic tunnel junction element forming method Apr. 16, 2013
8415805 Etched wafers and methods of forming the same Apr. 9, 2013
8409453 Method and system for providing a wrap-around shield using a patterned seed layer Apr. 2, 2013
8394724 Processing with reduced line end shortening ratio Mar. 12, 2013
RE44071 Method for patterning a multilayered conductor/substrate structure Mar. 12, 2013
8383517 Substrate processing method and substrate processing apparatus Feb. 26, 2013
8372755 Multilayer hard mask Feb. 12, 2013

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