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Class Information
Number: 438/716
Name: Semiconductor device manufacturing: process > Chemical etching > Vapor phase etching (i.e., dry etching) > Utilizing electromagnetic or wave energy > By creating electric field (e.g., plasma, glow discharge, etc.) > With substrate handling (e.g., conveying, etc.)
Description: Processes including the physical handling or manipulation of the semiconductor substrate in conjunction with the etching thereof.

Patents under this class:
1 2 3 4

Patent Number Title Of Patent Date Issued
8673166 Plasma processing apparatus and plasma processing method Mar. 18, 2014
8664123 Method for manufacturing nitride semiconductor substrate Mar. 4, 2014
8658048 Method of manufacturing magnetic recording medium Feb. 25, 2014
8633115 Methods for atomic layer etching Jan. 21, 2014
8501499 Adaptive recipe selector Aug. 6, 2013
8470692 Method and device for preparing compound semiconductor film Jun. 25, 2013
8309465 System and method for producing devices including a semiconductor part and a non-semiconductor part Nov. 13, 2012
8298957 Plasma etchimg method and plasma etching apparatus Oct. 30, 2012
8211323 Method for the removal of doped surface layers on the back faces of crystalline silicon solar wafers Jul. 3, 2012
8202796 Method of forming vias in silicon carbide and resulting devices and circuits Jun. 19, 2012
8183119 Semiconductor device fabrication method using multiple mask patterns May. 22, 2012
8163611 Semiconductor device fabrication method and semiconductor device Apr. 24, 2012
8158527 Semiconductor device fabrication method using multiple resist patterns Apr. 17, 2012
8129285 Substrate processing system Mar. 6, 2012
8097541 Method for surface treating semiconductor Jan. 17, 2012
8083959 Substrate processing method, substrate processing system, and computer-readable storage medium Dec. 27, 2011
8083963 Removal of process residues on the backside of a substrate Dec. 27, 2011
8017029 Plasma mask etch method of controlling a reactor tunable element in accordance with the output of an array of optical sensors viewing the mask backside Sep. 13, 2011
8016592 Method and system for thermal processing of objects in chambers Sep. 13, 2011
7977247 Field effect transistor device including an array of channel elements Jul. 12, 2011
7943522 Manufacturing method of semiconductor device May. 17, 2011
7863162 Semiconductor device and manufacturing method thereof Jan. 4, 2011
7858530 Processing method for wafer and processing apparatus therefor Dec. 28, 2010
7846848 Cluster tool with integrated metrology chamber for transparent substrates Dec. 7, 2010
7824996 Semiconductor device fabrication method and semiconductor device Nov. 2, 2010
7820554 Method for unloading thermally treated non-planar silicon wafers with a conveying blade Oct. 26, 2010
7816272 Process of cleaning a semiconductor manufacturing system and method of manufacturing a semiconductor device Oct. 19, 2010
7776226 Multi-chamber system having compact installation set-up for an etching facility for semiconductor device manufacturing Aug. 17, 2010
7758340 Heating device and heating method Jul. 20, 2010
7740768 Simultaneous front side ash and backside clean Jun. 22, 2010
7713377 Apparatus and method for plasma treating a substrate May. 11, 2010
7659201 Process for manufacturing semiconductor integrated circuit device Feb. 9, 2010
7651948 Pre-cleaning of substrates in epitaxy chambers Jan. 26, 2010
7566665 Semiconductor device manufacturing method and manufacturing line thereof Jul. 28, 2009
7510970 Process for manufacturing semiconductor integrated circuit device Mar. 31, 2009
7494916 Design structures incorporating interconnect structures with liner repair layers Feb. 24, 2009
7482177 Method for manufacturing optical device, and optical device wafer Jan. 27, 2009
7413963 Method of edge bevel rinse Aug. 19, 2008
7387968 Batch photoresist dry strip and ash system and process Jun. 17, 2008
7365019 Atmospheric process and system for controlled and rapid removal of polymers from high aspect ratio holes Apr. 29, 2008
7332262 Photolithography scheme using a silicon containing resist Feb. 19, 2008
7312156 Method and apparatus for supporting a semiconductor wafer during processing Dec. 25, 2007
7276097 Load-lock system, exposure processing system, and device manufacturing method Oct. 2, 2007
7256132 Substrate centering apparatus and method Aug. 14, 2007
7223702 Method of and apparatus for performing sequential processes requiring different amounts of time in the manufacturing of semiconductor devices May. 29, 2007
7211518 Waferless automatic cleaning after barrier removal May. 1, 2007
7208423 Semiconductor device fabrication method and semiconductor device Apr. 24, 2007
7189647 Sequential station tool for wet processing of semiconductor wafers Mar. 13, 2007
7163897 Method for assaying elements in a substrate for optics, electronics, or optoelectronics Jan. 16, 2007
7129174 Methods of fabricating a semiconductor substrate for reducing wafer warpage Oct. 31, 2006

1 2 3 4

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