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Class Information
Number: 438/715
Name: Semiconductor device manufacturing: process > Chemical etching > Vapor phase etching (i.e., dry etching) > Utilizing electromagnetic or wave energy > By creating electric field (e.g., plasma, glow discharge, etc.) > With substrate heating or cooling
Description: Processes including the temperature maintenance or modification of the semiconductor substrate during the etching thereof with the energized gas.

Patents under this class:
1 2 3 4 5 6 7 8 9

Patent Number Title Of Patent Date Issued
8709952 Etching method, etching apparatus, and computer-readable recording medium Apr. 29, 2014
8709953 Pulsed plasma with low wafer temperature for ultra thin layer etches Apr. 29, 2014
8709848 Method for etched cavity devices Apr. 29, 2014
8679359 Low temperature metal etching and patterning Mar. 25, 2014
8668837 Method for etching substrate Mar. 11, 2014
8658048 Method of manufacturing magnetic recording medium Feb. 25, 2014
8657961 Method for UV based silylation chamber clean Feb. 25, 2014
8652970 Vacuum processing method and vacuum processing apparatus Feb. 18, 2014
8647980 Method of forming wiring and method of manufacturing semiconductor substrates Feb. 11, 2014
8642480 Adjusting substrate temperature to improve CD uniformity Feb. 4, 2014
8633115 Methods for atomic layer etching Jan. 21, 2014
8598040 ETCH process for 3D flash structures Dec. 3, 2013
8591755 Methods for controlling plasma constituent flux and deposition during semiconductor fabrication and apparatus for implementing the same Nov. 26, 2013
8580689 Plasma processing method Nov. 12, 2013
8580693 Temperature enhanced electrostatic chucking in plasma processing apparatus Nov. 12, 2013
8546267 Method of processing a workpiece in a plasma reactor using multiple zone feed forward thermal control Oct. 1, 2013
8529729 Plasma processing chamber component having adaptive thermal conductor Sep. 10, 2013
8529783 Method for backside polymer reduction in dry-etch process Sep. 10, 2013
8501629 Smooth SiConi etch for silicon-containing films Aug. 6, 2013
8501630 Selective etch process for silicon nitride Aug. 6, 2013
8497213 Plasma processing method Jul. 30, 2013
8492287 Substrate processing method Jul. 23, 2013
RE44292 Method of etching silicon nitride by a mixture of CH.sub.2F.sub.2, CH.sub.3F or CHF.sub.3 and an inert gas Jun. 11, 2013
8444869 Simultaneous front side ash and backside clean May. 21, 2013
8431063 Heat treatment for a panel and apparatus for carrying out the heat treatment method Apr. 30, 2013
8426763 Rapid thermal processing systems and methods for treating microelectronic substrates Apr. 23, 2013
8420544 Method for fabricating interconnection structure with dry-cleaning process Apr. 16, 2013
8415780 Package carrier and manufacturing method thereof Apr. 9, 2013
8409995 Substrate processing apparatus, positioning method and focus ring installation method Apr. 2, 2013
8398229 Curing Mar. 19, 2013
8377253 Pulsed etching cooling Feb. 19, 2013
8361837 Multiple integrated circuit die package with thermal performance Jan. 29, 2013
8361855 Method for fabricating a gate structure Jan. 29, 2013
8357615 Method of manufacturing semiconductor device Jan. 22, 2013
8338309 Method for forming deep trench in semiconductor device Dec. 25, 2012
8329591 Method of manufacturing a semiconductor device Dec. 11, 2012
8328981 Method for heating a focus ring in a plasma apparatus by high frequency power while no plasma being generated Dec. 11, 2012
8288287 Etching method and etching equipment Oct. 16, 2012
8288288 Transferring heat in loadlocks Oct. 16, 2012
8236596 Diffusion furnaces employing ultra low mass transport systems and methods of wafer rapid diffusion processing Aug. 7, 2012
8187389 Method of removing resist and apparatus therefor May. 29, 2012
8183161 Method and system for dry etching a hafnium containing material May. 22, 2012
8173523 Method of removing heavy metal in semiconductor substrate May. 8, 2012
8135487 Temperature setting method and apparatus for a thermal processing plate Mar. 13, 2012
8129284 Heat treatment method and heat treatment apparatus for heating substrate by light irradiation Mar. 6, 2012
8093529 Control method of a temperature of a sample Jan. 10, 2012
8048733 Method for fabricating a gate structure Nov. 1, 2011
8034175 Apparatus and method for manufacturing semiconductor device, and electronic apparatus Oct. 11, 2011
8026181 Manufacturing method for semiconductor chips Sep. 27, 2011
8026182 Heat treatment jig and heat treatment method for silicon wafer Sep. 27, 2011

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