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Class Information
Number: 438/713
Name: Semiconductor device manufacturing: process > Chemical etching > Vapor phase etching (i.e., dry etching) > Utilizing electromagnetic or wave energy > By creating electric field (e.g., plasma, glow discharge, etc.) > Forming tapered profile (e.g., tapered etching, etc.)
Description: Processes wherein the etchant removes material from the substrate resulting in a mesa or trench profile possessing nonparallel sides.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7582532 |
Method for fabricating semiconductor device |
Sep. 1, 2009 |
| 7579282 |
Method for removing metal foot during high-k dielectric/metal gate etching |
Aug. 25, 2009 |
| 7580279 |
Flash memory cells with reduced distances between cell elements |
Aug. 25, 2009 |
| 7572732 |
Method to modulate etch rate in SLAM |
Aug. 11, 2009 |
| 7569492 |
Method for post-etch cleans |
Aug. 4, 2009 |
| 7554108 |
Forming a semiconductor device feature using acquired parameters |
Jun. 30, 2009 |
| RE40748 |
Process for producing semiconductor device |
Jun. 16, 2009 |
| 7538039 |
Method for manufacturing a wiring over a substrate |
May. 26, 2009 |
| 7524770 |
Methods of forming image sensor microlens structures |
Apr. 28, 2009 |
| 7517710 |
Method of manufacturing field emission device |
Apr. 14, 2009 |
| 7498266 |
Method for structuring of silicon substrates for microsystem technological device elements and associated silicon substrate |
Mar. 3, 2009 |
| 7470629 |
Structure and method to fabricate finfet devices |
Dec. 30, 2008 |
| 7459364 |
Methods of forming self-aligned floating gates using multi-etching |
Dec. 2, 2008 |
| 7449401 |
Semiconductor device with asymmetric transistor and method for fabricating the same |
Nov. 11, 2008 |
| 7446036 |
Gap free anchored conductor and dielectric structure and method for fabrication thereof |
Nov. 4, 2008 |
| 7446048 |
Dry etching apparatus and dry etching method |
Nov. 4, 2008 |
| 7419613 |
Method and device for plasma-etching organic material film |
Sep. 2, 2008 |
| 7413915 |
Micro-fluid ejection head containing reentrant fluid feed slots |
Aug. 19, 2008 |
| 7410897 |
Contact plug processing and a contact plug |
Aug. 12, 2008 |
| 7396765 |
Method of fabricating a liquid crystal display device |
Jul. 8, 2008 |
| 7393791 |
Etching method, method of fabricating metal film structure, and etching structure |
Jul. 1, 2008 |
| 7390755 |
Methods for post etch cleans |
Jun. 24, 2008 |
| 7378703 |
Semiconductor device having step gates and method for fabricating the same |
May. 27, 2008 |
| 7365015 |
Damascene replacement metal gate process with controlled gate profile and length using Si.sub.1-xGe.sub.x as sacrificial material |
Apr. 29, 2008 |
| 7358170 |
Methods of forming conductive interconnects, and methods of depositing nickel |
Apr. 15, 2008 |
| 7354856 |
Method for forming dual damascene structures with tapered via portions and improved performance |
Apr. 8, 2008 |
| 7338906 |
Method for fabricating semiconductor device |
Mar. 4, 2008 |
| 7320897 |
Electroluminescence device with nanotip diodes |
Jan. 22, 2008 |
| 7320927 |
In situ hardmask pullback using an in situ plasma resist trim process |
Jan. 22, 2008 |
| 7307025 |
Lag control |
Dec. 11, 2007 |
| 7303945 |
Method for forming pattern of stacked film and thin film transistor |
Dec. 4, 2007 |
| 7265025 |
Method for filling trench and relief geometries in semiconductor structures |
Sep. 4, 2007 |
| 7247573 |
Process for forming tapered trenches in a dielectric material |
Jul. 24, 2007 |
| 7238609 |
Method for fabricating semiconductor device |
Jul. 3, 2007 |
| 7211517 |
Semiconductor device and method that includes reverse tapering multiple layers |
May. 1, 2007 |
| 7202178 |
Micro-fluid ejection head containing reentrant fluid feed slots |
Apr. 10, 2007 |
| 7189653 |
Etching method and etching apparatus |
Mar. 13, 2007 |
| 7186661 |
Method to improve profile control and N/P loading in dual doped gate applications |
Mar. 6, 2007 |
| 7175777 |
Method of forming a sub-micron tip feature |
Feb. 13, 2007 |
| 7169710 |
Wiring and method of manufacturing the same, and wiring board and method of manufacturing the same |
Jan. 30, 2007 |
| 7138341 |
Process for making a memory structure |
Nov. 21, 2006 |
| 7129171 |
Selective oxygen-free etching process for barrier materials |
Oct. 31, 2006 |
| 7119022 |
Manufacturing method of semiconductor device |
Oct. 10, 2006 |
| 7105435 |
Methods of forming a contact hole in a semiconductor device |
Sep. 12, 2006 |
| 7101786 |
Method for forming a metal line in a semiconductor device |
Sep. 5, 2006 |
| 7101798 |
Method to modulate etch rate in SLAM |
Sep. 5, 2006 |
| 7098137 |
Micro corner cube array, method of making the micro corner cube array, and display device |
Aug. 29, 2006 |
| 7098141 |
Use of silicon containing gas for CD and profile feature enhancements of gate and shallow trench structures |
Aug. 29, 2006 |
| 7081413 |
Method and structure for ultra narrow gate |
Jul. 25, 2006 |
| 7078279 |
Manufacturing method of a thin film transistor array substrate |
Jul. 18, 2006 |
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