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Class Information
Number: 438/713
Name: Semiconductor device manufacturing: process > Chemical etching > Vapor phase etching (i.e., dry etching) > Utilizing electromagnetic or wave energy > By creating electric field (e.g., plasma, glow discharge, etc.) > Forming tapered profile (e.g., tapered etching, etc.)
Description: Processes wherein the etchant removes material from the substrate resulting in a mesa or trench profile possessing nonparallel sides.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8703619 Taper-etching method and method of manufacturing near-field light generator Apr. 22, 2014
8691700 Gas cluster ion beam etch profile control using beam divergence Apr. 8, 2014
8669663 Wiring over substrate, semiconductor device, and methods for manufacturing thereof Mar. 11, 2014
8664122 Method of fabricating a semiconductor device Mar. 4, 2014
8658048 Method of manufacturing magnetic recording medium Feb. 25, 2014
8609546 Pulsed bias plasma process to control microloading Dec. 17, 2013
8609545 Method to improve mask critical dimension uniformity (CDU) Dec. 17, 2013
8597992 Transistor and manufacturing method of the same Dec. 3, 2013
8598036 Method for forming fine pattern having variable width and method for manufacturing semiconductor device using the same Dec. 3, 2013
8519482 Reliable contacts Aug. 27, 2013
8497212 Filling narrow openings using ion beam etch Jul. 30, 2013
8486741 Process for etching trenches in an integrated optical device Jul. 16, 2013
8481401 Component having a through-contact Jul. 9, 2013
8481424 Multilayer printed wiring board Jul. 9, 2013
8461052 Semiconductor device manufacturing method Jun. 11, 2013
8420546 Manufacturing method of semiconductor device Apr. 16, 2013
8389405 Method for forming fine pattern having variable width and method for manufacturing semiconductor device using the same Mar. 5, 2013
8383498 Method for formation of tips Feb. 26, 2013
8338309 Method for forming deep trench in semiconductor device Dec. 25, 2012
8334153 Semiconductor light emitting device and method of fabricating semiconductor light emitting device Dec. 18, 2012
8273615 Thin film transistor and method of fabricating the same Sep. 25, 2012
8242024 Method of forming metal interconnection on thick polyimide film Aug. 14, 2012
8236698 Method for forming non-aligned microcavities of different depths Aug. 7, 2012
8216481 Process for fabricating ultra-narrow dimension magnetic sensor Jul. 10, 2012
8211805 Method for forming via Jul. 3, 2012
8207532 Constant and reducible hole bottom CD in variable post-CMP thickness and after-development-inspection CD Jun. 26, 2012
8207026 Manufacturing method of thin film transistor and manufacturing method of display device Jun. 26, 2012
8168531 Semiconductor device and method of fabricating the same May. 1, 2012
8119534 Semiconductor light emitting device with protrusions to improve external efficiency and crystal growth Feb. 21, 2012
8066892 Method for manufacturing a perpendicular magnetic write head with a wrap around shield Nov. 29, 2011
8058181 Method for post-etch cleans Nov. 15, 2011
8034721 Manufacturing method of semiconductor device Oct. 11, 2011
7998876 Method of producing semiconductor element Aug. 16, 2011
7989351 Method for manufacturing a wiring over a substrate Aug. 2, 2011
7951677 Corner rounding in a replacement gate approach based on a sacrificial fill material applied prior to work function metal deposition May. 31, 2011
7928013 Display panel and rework method of gate insulating layer of thin film transistor Apr. 19, 2011
7888193 Semiconductor device with mushroom electrode and manufacture method thereof Feb. 15, 2011
7786019 Multi-step photomask etching with chlorine for uniformity control Aug. 31, 2010
7772103 Method of forming a wire structure Aug. 10, 2010
7749911 Method for forming an improved T-shaped gate structure Jul. 6, 2010
7741226 Optimal tungsten through wafer via and process of fabricating same Jun. 22, 2010
7736956 Lateral undercut of metal gate in SOI device Jun. 15, 2010
7727898 Semiconductor device and method of fabricating same Jun. 1, 2010
7700495 Thin film transistor device and method of manufacturing the same, and liquid crystal display device Apr. 20, 2010
7700444 Post-lithography misalignment correction with shadow effect for multiple patterning Apr. 20, 2010
7696099 Manufacturing method of semiconductor device Apr. 13, 2010
7682991 Method of manufacturing silicon carbide semiconductor device Mar. 23, 2010
7682981 Topography transfer method with aspect ratio scaling Mar. 23, 2010
7682980 Method to improve profile control and N/P loading in dual doped gate applications Mar. 23, 2010
7670955 Semiconductor device and manufacturing method of the same Mar. 2, 2010

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