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Class Information
Number: 438/712
Name: Semiconductor device manufacturing: process > Chemical etching > Vapor phase etching (i.e., dry etching) > Utilizing electromagnetic or wave energy > By creating electric field (e.g., plasma, glow discharge, etc.) > Reactive ion beam etching (i.e., ribe)
Description: Processes wherein the semiconductor substrate is mounted on the RF-powered electrode of the etching apparatus.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8709919 Method for the synthesis of an array of metal nanowire capable of supporting localized plasmon resonances and photonic device comprising said array Apr. 29, 2014
8691700 Gas cluster ion beam etch profile control using beam divergence Apr. 8, 2014
8685860 Semiconductor structure and manufacturing method thereof Apr. 1, 2014
8664122 Method of fabricating a semiconductor device Mar. 4, 2014
8658048 Method of manufacturing magnetic recording medium Feb. 25, 2014
8658539 Fin profile structure and method of making same Feb. 25, 2014
8647920 Method for forming 3D-interconnect structures with airgaps Feb. 11, 2014
8642370 Cavity open process to improve undercut Feb. 4, 2014
8636913 Removing residues in magnetic head fabrication Jan. 28, 2014
8629063 Forming features on a substrate having varying feature densities Jan. 14, 2014
8617999 Method of manufacturing semiconductor device and computer readable medium for storing pattern size setting program Dec. 31, 2013
8617909 LED with substrate modifications for enhanced light extraction and method of making same Dec. 31, 2013
8614150 Methods of manufacturing semiconductor structures using RIE process Dec. 24, 2013
8609545 Method to improve mask critical dimension uniformity (CDU) Dec. 17, 2013
8609546 Pulsed bias plasma process to control microloading Dec. 17, 2013
8597527 Method for forming a concavo-convex pattern and a method of manufacturing a patterned medium type magnetic recording medium Dec. 3, 2013
8557708 Methods for fabricating a magnetic head reader using a chemical mechanical polishing (CMP) process for sensor stripe height patterning Oct. 15, 2013
8557707 Focused ion beam deep nano-patterning apparatus and method Oct. 15, 2013
8557645 Semiconductor device with a gate electrode having a shape formed based on a slope and gate lower opening and method of manufacturing the same Oct. 15, 2013
8546264 Etching radical controlled gas chopped deep reactive ion etching Oct. 1, 2013
8536031 Method of fabricating dual damascene structures using a multilevel multiple exposure patterning scheme Sep. 17, 2013
8536059 Equipment and methods for etching of MEMS Sep. 17, 2013
8524609 Method of fabricating semiconductor device Sep. 3, 2013
8524102 Ashing method and ashing device Sep. 3, 2013
8501499 Adaptive recipe selector Aug. 6, 2013
8501628 Differential metal gate etching process Aug. 6, 2013
8501630 Selective etch process for silicon nitride Aug. 6, 2013
8492286 Method of forming E-fuse in replacement metal gate manufacturing process Jul. 23, 2013
8486741 Process for etching trenches in an integrated optical device Jul. 16, 2013
8476166 Manufacturing method of semiconductor device Jul. 2, 2013
8466069 Method for manufacturing semiconductor device Jun. 18, 2013
8458892 Method for providing a perpendicular magnetic recording transducer using a low energy mill Jun. 11, 2013
8461052 Semiconductor device manufacturing method Jun. 11, 2013
8460567 Method and system for etching a MEM device Jun. 11, 2013
8455364 Sidewall image transfer using the lithographic stack as the mandrel Jun. 4, 2013
8450215 Particle beam systems and methods May. 28, 2013
8450813 Fin transistor structure and method of fabricating the same May. 28, 2013
8445973 Fin transistor structure and method of fabricating the same May. 21, 2013
8445296 Apparatus and methods for end point determination in reactive ion etching May. 21, 2013
8440578 GCIB process for reducing interfacial roughness following pre-amorphization May. 14, 2013
8435419 Methods of processing substrates having metal materials May. 7, 2013
8435895 Methods for stripping photoresist and/or cleaning metal regions May. 7, 2013
8431495 Stencil mask profile Apr. 30, 2013
8425789 Method and apparatus for anisotropic etching Apr. 23, 2013
8426317 Plasma processing apparatus and plasma processing method Apr. 23, 2013
8404596 Plasma ashing method Mar. 26, 2013
8383517 Substrate processing method and substrate processing apparatus Feb. 26, 2013
8372756 Selective etching of silicon dioxide compositions Feb. 12, 2013
8361869 Method for manufacturing suspended fin and gate-all-around field effect transistor Jan. 29, 2013
8338268 Transfer method for thin film nanomembrane structures Dec. 25, 2012

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