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Class Information
Number: 438/709
Name: Semiconductor device manufacturing: process > Chemical etching > Vapor phase etching (i.e., dry etching) > Utilizing electromagnetic or wave energy > Photo-induced etching > Photo-induced plasma etching
Description: Processes wherein the photo-induced vapor phase etching is accompanied with the excitation of the etchant into a plasma.

Patents under this class:
1 2 3 4 5

Patent Number Title Of Patent Date Issued
8709949 System and method for removing oxide from a sensor clip assembly Apr. 29, 2014
8703619 Taper-etching method and method of manufacturing near-field light generator Apr. 22, 2014
8685266 Monocyclic high aspect ratio titanium inductively coupled plasma deep etching processes and products so produced Apr. 1, 2014
8642478 Plasma processing method and plasma processing apparatus Feb. 4, 2014
8637374 Method of fabricating self-aligned nanotube field effect transistor Jan. 28, 2014
8633115 Methods for atomic layer etching Jan. 21, 2014
8609545 Method to improve mask critical dimension uniformity (CDU) Dec. 17, 2013
8609546 Pulsed bias plasma process to control microloading Dec. 17, 2013
8563431 Method for manufacturing semiconductor device Oct. 22, 2013
8557710 Gas cluster ion beam etching process for metal-containing materials Oct. 15, 2013
8551888 Method of forming patterns for semiconductor device Oct. 8, 2013
8536051 Manufacture method for semiconductor device Sep. 17, 2013
8518829 Self-sealed fluidic channels for nanopore array Aug. 27, 2013
8513138 Gas cluster ion beam etching process for Si-containing and Ge-containing materials Aug. 20, 2013
8513142 Method of manufacturing non-photosensitive polyimide passivation layer Aug. 20, 2013
8513134 Semiconductor device producing method Aug. 20, 2013
8486291 Plasma processing method Jul. 16, 2013
8476762 Ni plating of a BLM edge for Pb-free C4 undercut control Jul. 2, 2013
8461052 Semiconductor device manufacturing method Jun. 11, 2013
8445390 Patterning of antistiction films for electromechanical systems devices May. 21, 2013
8426312 Method of reducing contamination by providing an etch stop layer at the substrate edge Apr. 23, 2013
8404595 Plasma processing method Mar. 26, 2013
8367555 Removal of masking material Feb. 5, 2013
8343877 Angle ion implant to re-shape sidewall image transfer patterns Jan. 1, 2013
8314035 Method for the manufacture of an active matrix OLED display Nov. 20, 2012
8268184 Etch process for reducing silicon recess Sep. 18, 2012
8263498 Semiconductor device fabricating method, plasma processing system and storage medium Sep. 11, 2012
8263499 Plasma processing method and computer readable storage medium Sep. 11, 2012
8252691 Method of forming semiconductor patterns Aug. 28, 2012
8227353 Method for manufacturing semiconductor device Jul. 24, 2012
8211804 Methods of forming a hole having a vertical profile and semiconductor devices having a vertical hole Jul. 3, 2012
8198195 Plasma processing method and plasma processing apparatus Jun. 12, 2012
8198147 Superior fill conditions in a replacement gate approach by using a tensile stressed overlayer Jun. 12, 2012
8158525 Plasma etching method and apparatus, and method of manufacturing liquid ejection head Apr. 17, 2012
8148269 Boron nitride and boron-nitride derived materials deposition method Apr. 3, 2012
8075732 EUV collector debris management Dec. 13, 2011
8043981 Dual frequency low temperature oxidation of a semiconductor device Oct. 25, 2011
7994065 Method for fabricating semiconductor device Aug. 9, 2011
7985699 Substrate processing method and storage medium Jul. 26, 2011
7967996 Process for wafer backside polymer removal and wafer front side photoresist removal Jun. 28, 2011
7838430 Plasma control using dual cathode frequency mixing Nov. 23, 2010
7799693 Method for manufacturing a semiconductor device Sep. 21, 2010
RE41581 Monolithic low dielectric constant platform for passive components and method Aug. 24, 2010
7772026 MEMS device package and method for manufacturing the same Aug. 10, 2010
7767596 Wafer support pin for preventing slip dislocation during annealing of water and wafer annealing method using the same Aug. 3, 2010
7704890 Method for fabricating thin film transistor and pixel structure Apr. 27, 2010
7670956 Beam-induced etching Mar. 2, 2010
7670947 Metal interconnect structure and process for forming same Mar. 2, 2010
7666793 Method of manufacturing amorphous metal oxide film and methods of manufacturing capacitance element having amorphous metal oxide film and semiconductor device Feb. 23, 2010
7648916 Method and apparatus for performing hydrogen optical emission endpoint detection for photoresist strip and residue removal Jan. 19, 2010

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