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Class Information
Number: 438/708
Name: Semiconductor device manufacturing: process > Chemical etching > Vapor phase etching (i.e., dry etching) > Utilizing electromagnetic or wave energy > Photo-induced etching
Description: Processes involving the simultaneous irradiation of the substrate or adjoining space with infrared, visible, or ultraviolet radiation to induce the vapor phase etching of regions thereof.










Sub-classes under this class:

Class Number Class Name Patents
438/709 Photo-induced plasma etching 214


Patents under this class:
1 2 3 4 5 6

Patent Number Title Of Patent Date Issued
8709271 Laser marking of a card Apr. 29, 2014
8703617 Method for planarizing interlayer dielectric layer Apr. 22, 2014
8685836 Method for forming a silicon layer on any substrate using light irradiation Apr. 1, 2014
8679354 Method of etching a sacrificial silicon oxide layer Mar. 25, 2014
8642478 Plasma processing method and plasma processing apparatus Feb. 4, 2014
8633115 Methods for atomic layer etching Jan. 21, 2014
8609545 Method to improve mask critical dimension uniformity (CDU) Dec. 17, 2013
8609546 Pulsed bias plasma process to control microloading Dec. 17, 2013
8575020 Pattern-split decomposition strategy for double-patterned lithography process Nov. 5, 2013
8563226 Mould for galvanoplasty and method of fabricating the same Oct. 22, 2013
8563431 Method for manufacturing semiconductor device Oct. 22, 2013
8524607 Anisotropically conductive member and method of manufacture Sep. 3, 2013
8518829 Self-sealed fluidic channels for nanopore array Aug. 27, 2013
8518836 Semiconductor patterning Aug. 27, 2013
8506828 Method and system for providing a magnetic recording transducer using an ion beam scan polishing planarization Aug. 13, 2013
8501629 Smooth SiConi etch for silicon-containing films Aug. 6, 2013
8476762 Ni plating of a BLM edge for Pb-free C4 undercut control Jul. 2, 2013
8461038 Two-track cross-connects in double-patterned metal layers using a forbidden zone Jun. 11, 2013
8461052 Semiconductor device manufacturing method Jun. 11, 2013
8372743 Hybrid pitch-split pattern-split lithography process Feb. 12, 2013
8367555 Removal of masking material Feb. 5, 2013
8368228 Area efficient through-hole connections Feb. 5, 2013
8343877 Angle ion implant to re-shape sidewall image transfer patterns Jan. 1, 2013
8334203 Interconnect structure and method of fabricating Dec. 18, 2012
8314032 Semiconductor device and method for manufacturing the same Nov. 20, 2012
8298956 Method for fabricating fine pattern Oct. 30, 2012
8278222 Selective etching and formation of xenon difluoride Oct. 2, 2012
8263500 Photoelectrochemical etching for laser facets Sep. 11, 2012
8263499 Plasma processing method and computer readable storage medium Sep. 11, 2012
8211804 Methods of forming a hole having a vertical profile and semiconductor devices having a vertical hole Jul. 3, 2012
8207067 Method of processing resist, semiconductor device, and method of producing the same Jun. 26, 2012
8198195 Plasma processing method and plasma processing apparatus Jun. 12, 2012
8158525 Plasma etching method and apparatus, and method of manufacturing liquid ejection head Apr. 17, 2012
8148269 Boron nitride and boron-nitride derived materials deposition method Apr. 3, 2012
8129217 Method for producing at least one multilayer body, and multilayer body Mar. 6, 2012
8093156 Method for manufacturing semiconductor device Jan. 10, 2012
8075732 EUV collector debris management Dec. 13, 2011
8058108 Methods of forming semiconductor chip underfill anchors Nov. 15, 2011
8039203 Integrated circuits and methods of design and manufacture thereof Oct. 18, 2011
8017525 Processing method Sep. 13, 2011
8017460 Method of manufacturing flat panel display Sep. 13, 2011
7994065 Method for fabricating semiconductor device Aug. 9, 2011
7985688 Notch stop pulsing process for plasma processing system Jul. 26, 2011
7972873 Material removing processes in device formation and the devices formed thereby Jul. 5, 2011
7955513 Apparatus and method for reactive atom plasma processing for material deposition Jun. 7, 2011
7938975 Method for making a micro-fluid ejection device May. 10, 2011
7919808 Flash memory device Apr. 5, 2011
7888250 Method and apparatus for activating compound semiconductor Feb. 15, 2011
7884024 Apparatus and method for optical interference fringe based integrated circuit processing Feb. 8, 2011
7871933 Combined stepper and deposition tool Jan. 18, 2011

1 2 3 4 5 6










 
 
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