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Class Information
Number: 438/706
Name: Semiconductor device manufacturing: process > Chemical etching > Vapor phase etching (i.e., dry etching)
Description: Processes wherein the chemical etchant is in a gaseous state when brought into contact with the semiconductive substrate.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7025896 |
Process for treating solid surface and substrate surface |
Apr. 11, 2006 |
| 7026174 |
Method for reducing wafer arcing |
Apr. 11, 2006 |
| 7026195 |
Planarizing method for forming FIN-FET device |
Apr. 11, 2006 |
| 7026233 |
Method for reducing defects in post passivation interconnect process |
Apr. 11, 2006 |
| 7026248 |
Method for manufacturing semiconductor device with semiconductor region inserted into trench |
Apr. 11, 2006 |
| 7026249 |
SiGe lattice engineering using a combination of oxidation, thinning and epitaxial regrowth |
Apr. 11, 2006 |
| 7026250 |
Method for reducing contact resistance of a semiconductor device |
Apr. 11, 2006 |
| 7022537 |
Liquid crystal display device and fabricating method thereof, and reworking method of alignment film using the same |
Apr. 4, 2006 |
| 7022611 |
Plasma in-situ treatment of chemically amplified resist |
Apr. 4, 2006 |
| 7022612 |
Method of removing etch residues |
Apr. 4, 2006 |
| 7022613 |
Reduced cross-contamination between chambers in a semiconductor processing tool |
Apr. 4, 2006 |
| 7022616 |
High speed silicon etching method |
Apr. 4, 2006 |
| 7022618 |
Method of forming a conductive contact |
Apr. 4, 2006 |
| 7022619 |
Method for fabricating electronic device |
Apr. 4, 2006 |
| 7018926 |
Method of manufacturing semiconductor device |
Mar. 28, 2006 |
| 7018929 |
Method for reducing a low volatility byproduct from a wafer surface following an etching process |
Mar. 28, 2006 |
| 7018930 |
Method for fabricating semiconductor device |
Mar. 28, 2006 |
| 7018931 |
Method of forming an isolation film in a semiconductor device |
Mar. 28, 2006 |
| 7018934 |
Methods and apparatus for etching metal layers on substrates |
Mar. 28, 2006 |
| 7018935 |
Method of forming metal line of semiconductor device |
Mar. 28, 2006 |
| 7014787 |
Etching method of organic insulating film |
Mar. 21, 2006 |
| 7014788 |
Surface treatment method and equipment |
Mar. 21, 2006 |
| 7015143 |
Structure including multiple wire-layers and methods for forming the same |
Mar. 21, 2006 |
| 7015145 |
Self-aligned collar and strap formation for semiconductor devices |
Mar. 21, 2006 |
| 7012026 |
Method for producing defined polycrystalline silicon areas in an amorphous silicon layer |
Mar. 14, 2006 |
| 7008877 |
Etching of chromium layers on photomasks utilizing high density plasma and low frequency RF bias |
Mar. 7, 2006 |
| 7005032 |
Wafer table for local dry etching apparatus |
Feb. 28, 2006 |
| 7005302 |
Semiconductor on insulator substrate and devices formed therefrom |
Feb. 28, 2006 |
| 7005305 |
Signal layer for generating characteristic optical plasma emissions |
Feb. 28, 2006 |
| 7005380 |
Simultaneous formation of device and backside contacts on wafers having a buried insulator layer |
Feb. 28, 2006 |
| 7001846 |
High-density SOI cross-point memory array and method for fabricating same |
Feb. 21, 2006 |
| 7001847 |
Micro pattern forming method and semiconductor device manufacturing method |
Feb. 21, 2006 |
| 6997776 |
Process for producing a semiconductor wafer |
Feb. 14, 2006 |
| 6998347 |
Method of reworking layers over substrate |
Feb. 14, 2006 |
| 6998348 |
Method for manufacturing electronic circuits integrated on a semiconductor substrate |
Feb. 14, 2006 |
| 6995092 |
Method for manufacturing an electronic device |
Feb. 7, 2006 |
| 6995093 |
Polysilicon etching method |
Feb. 7, 2006 |
| 6992010 |
Gate structure and method of manufacture |
Jan. 31, 2006 |
| 6992011 |
Method and apparatus for removing material from chamber and wafer surfaces by high temperature hydrogen-containing plasma |
Jan. 31, 2006 |
| 6989105 |
Detection of hardmask removal using a selective etch |
Jan. 24, 2006 |
| 6989108 |
Etchant gas composition |
Jan. 24, 2006 |
| 6989228 |
Method and apparatus for processing samples |
Jan. 24, 2006 |
| 6984535 |
Selective etching of a protective layer to form a catalyst layer for an electron-emitting device |
Jan. 10, 2006 |
| 6982227 |
Single and multilevel rework |
Jan. 3, 2006 |
| 6982228 |
Methods of etching a contact opening over a node location on a semiconductor substrate |
Jan. 3, 2006 |
| 6979652 |
Etching multi-shaped openings in silicon |
Dec. 27, 2005 |
| 6977228 |
Semiconductor device using damascene technique and manufacturing method therefor |
Dec. 20, 2005 |
| 6973712 |
Lead plating method for GMR head manufacture |
Dec. 13, 2005 |
| 6974709 |
Method and device for providing a semiconductor etching end point and for detecting the end point |
Dec. 13, 2005 |
| 6972261 |
Method for fabricating fine features by jet-printing and surface treatment |
Dec. 6, 2005 |
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