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Class Information
Number: 438/705
Name: Semiconductor device manufacturing: process > Chemical etching > Altering etchability of substrate region by compositional or crystalline modification
Description: Processes wherein the manner in which a semiconductor substrate is etched by a chemical etchant is altered by contacting the substrate prior to etching (a) with a material which alloys or diffuses into a substrate region or (b) by modifying the crystalline structure of a substrate region (e.g., amorphosizing, introducing dislocations, etc.).


Patents under this class:
1 2 3 4 5 6 7

Patent Number Title Of Patent Date Issued
7358181 Method for structuring a semiconductor device Apr. 15, 2008
7341941 Methods to facilitate etch uniformity and selectivity Mar. 11, 2008
7316978 Method for forming recesses Jan. 8, 2008
7276175 Semiconductor device fabrication method Oct. 2, 2007
7267127 Method for manufacturing electronic device Sep. 11, 2007
7259103 Fabrication method of polycrystalline silicon TFT Aug. 21, 2007
7256130 Process for defining a chalcogenide material layer, in particular in a process for manufacturing phase change memory cells Aug. 14, 2007
7253120 Selectable area laser assisted processing of substrates Aug. 7, 2007
7232765 Utilization of a Ta-containing cap over copper to facilitate concurrent formation of copper vias and memory element structures Jun. 19, 2007
7229928 Method for processing a layered stack in the production of a semiconductor device Jun. 12, 2007
7214978 Semiconductor fabrication that includes surface tension control May. 8, 2007
7208419 Method for fabricating semiconductor device Apr. 24, 2007
7205244 Patterning substrates employing multi-film layers defining etch-differential interfaces Apr. 17, 2007
7202122 Cobalt silicidation process for substrates with a silicon--germanium layer Apr. 10, 2007
7195946 Process for fabricating a semiconductor device having a suspended micro-system and resultant device Mar. 27, 2007
7196016 Fabrication process for preparing recording head sliders made from silicon substrates with SiO.sub.2 overcoats Mar. 27, 2007
7186657 Method for patterning HfO2-containing dielectric Mar. 6, 2007
7179748 Method for forming recesses Feb. 20, 2007
7169669 Method of making thin silicon sheets for solar cells Jan. 30, 2007
7166232 Method for producing a solid body including a microstructure Jan. 23, 2007
7157377 Method of making a semiconductor device using treated photoresist Jan. 2, 2007
7135360 Liquid crystal display device and method of fabricating the same Nov. 14, 2006
7119006 Via formation for damascene metal conductors in an integrated circuit Oct. 10, 2006
7087440 Monitoring of nitrided oxide gate dielectrics by determination of a wet etch Aug. 8, 2006
7078352 Methods for selective integration of airgaps and devices made by such methods Jul. 18, 2006
7067430 Method of making relaxed silicon-germanium on insulator via layer transfer with stress reduction Jun. 27, 2006
7064076 Process for low temperature, dry etching, and dry planarization of copper Jun. 20, 2006
7063091 Method for cleaning the surface of a substrate Jun. 20, 2006
7053003 Photoresist conditioning with hydrogen ramping May. 30, 2006
7049241 Method for forming a trench in a layer or a layer stack on a semiconductor wafer May. 23, 2006
7045073 Pre-etch implantation damage for the removal of thin film layers May. 16, 2006
7045407 Amorphous etch stop for the anisotropic etching of substrates May. 16, 2006
7037849 Process for patterning high-k dielectric material May. 2, 2006
7037851 Methods for selective integration of airgaps and devices made by such methods May. 2, 2006
7026247 Nanocircuit and self-correcting etching method for fabricating same Apr. 11, 2006
7022611 Plasma in-situ treatment of chemically amplified resist Apr. 4, 2006
7018928 Plasma treatment method to reduce silicon erosion over HDI silicon regions Mar. 28, 2006
7018936 Ion implant lithography method of processing a semiconductor substrate Mar. 28, 2006
7015136 Method for preventing formation of photoresist scum Mar. 21, 2006
7001811 Method for making memory cell without halo implant Feb. 21, 2006
6989331 Hard mask removal Jan. 24, 2006
6960531 Method of manufacturing electronic device Nov. 1, 2005
6951819 High efficiency, monolithic multijunction solar cells containing lattice-mismatched materials and methods of forming same Oct. 4, 2005
6946398 Method for fabricating a micro machine Sep. 20, 2005
6943118 Method of fabricating flash memory Sep. 13, 2005
6939758 Gate length control for semiconductor chip design Sep. 6, 2005
6932916 Semiconductor substrate with trenches of varying depth Aug. 23, 2005
6930030 Method of forming an electronic device on a recess in the surface of a thin film of silicon etched to a precise thickness Aug. 16, 2005
6927082 Method of evaluating the quality of a contact plug fill Aug. 9, 2005
6924217 Method of forming trench in semiconductor device Aug. 2, 2005

1 2 3 4 5 6 7


 
 
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